Light source device, method for manufacturing light source device, and electronic device
Provided are a light source device that has a reduced height and in which the number of components is reduced, a method for manufacturing the light source device, and an electronic device. A light source device according to an embodiment includes: a substrate; a light generating element that is provided on a first surface of the substrate and emits generated light from a second surface opposite to the first surface via the substrate; and a lens that is provided at a position corresponding to the light generating element in the second surface of the substrate and increases an NA.
1 . A light source device, comprising:
a substrate;
a plurality of light generating elements provided on a first surface of the substrate, wherein each light generating element in the plurality of light generating elements emits generated light from a second surface opposite to the first surface via the substrate;
a plurality of concave lenses, wherein one concave lens of the plurality of concave lenses is provided for each light generating element of the plurality of light generating elements, and wherein each concave lens in the plurality of concave lenses is provided in the second surface of the substrate; and
a functional film, wherein the functional film is formed on the second surface of the substrate in a region excluding regions of the concave lenses.
2 . The light source device according to claim 1 , wherein the functional film is a light shielding film.
3 . The light source device according to claim 1 , wherein each of the concave lenses is a recess provided in the second surface of the substrate.
4 . The light source device according to claim 3 , further comprising an antireflection film that is provided on an inner surface of each of the recesses.
5 . The light source device according to claim 3 , further comprising a low refractive index film provided inside each of the recesses and having a refractive index lower than a refractive index of the substrate, wherein
a region other than the recesses in the substrate and a surface of the low refractive index film forms a planar surface.
6 . The light source device according to claim 1 , wherein the functional film is a heat dissipation film.
7 . The light source device according to claim 1 , wherein
the functional film includes a plurality of laminated functional films.
8 . The light source device according to claim 7 , wherein
the functional films have a structure in which different numbers of the functional films are laminated according to positions on the substrate.
9 . The light source device according to claim 1 , wherein
the functional film includes an alignment mark.
10 . The light source device according to claim 9 , wherein the alignment mark in the functional film is provided in a predetermined position on the functional film in a region excluding the regions of the concave lenses.
11 . The light source device according to claim 1 , wherein
the functional film is provided on the second surface of the substrate and is present in a region other than a scribe region where the substrate is divided into individual pieces.
12 . The light source device according to claim 1 , wherein the functional film is a protective film.
13 . A method for manufacturing a light source device, the method comprising:
a recess forming step of forming a recess at a position corresponding to a light generating element in a second surface opposite to a first surface of a substrate on which the light generating element is provided,
wherein the recess forming step includes forming the recess using dishing that occurs due to chemical mechanical polishing, and
wherein the recess forming step includes forming, on the second surface, a hard mask in which a region corresponding to the recess is opened, and performing the chemical mechanical polishing on the hard mask in which the region corresponding to the recess is opened.
14 . A method for manufacturing a light source device, the method comprising:
a recess forming step of forming a recess at a position corresponding to a light generating element in a second surface opposite to a first surface of a substrate on which the light generating element is provided,
wherein the recess forming step includes forming, on the second surface, an auxiliary film having an etching rate different from an etching rate of the substrate, and forming the recess using a ratio of the etching rate of the substrate and the etching rate of the auxiliary film.
15 . The method for manufacturing a light source device according to claim 14 , wherein
the recess forming step includes forming a protrusion at a position corresponding to the recess on the second surface, forming the auxiliary film that has an etching rate lower than the substrate and the protrusion and has a flat surface on the second surface on which the protrusion is formed, and performing etching on the auxiliary film to form the recess.
16 . The method for manufacturing a light source device according to claim 15 , wherein
the recess forming step includes forming the auxiliary film having an etching rate higher than the substrate on the second surface, forming a hard mask on the auxiliary film, forming an opening at a position corresponding to the recess of the hard mask, performing isotropic etching on the auxiliary film, peeling off the hard mask after completion of the isotropic etching, and etching an entire surface in a vertical direction to form the recess.