Method for producing a mirror of a microlithographic projection exposure apparatus

1 . A method, comprising:

providing a first mirror part comprising a first connecting surface and a second mirror part comprising a second connecting surface, the second mirror part comprising channels selected from the group consisting of cooling channels and auxiliary channels;

bringing together the first and second mirror parts so that initially a partial region of the first connecting surface and a partial region of the second connecting surface come into contact to provide a common contact surface; and

enlarging the contact surface by continuing to bring the first and second mirror parts together in a rolling movement in a transverse direction with respect to the channels, thereby forming a mirror comprising the first connecting surface optical contact bonded to the second connecting surface,

wherein the channels open toward the second connecting surface, and the channels are devoid of solid material.

2 . The method of claim 1 , wherein the second mirror part comprises the cooling channels.

3 . The method of claim 2 , wherein the second mirror part comprises the auxiliary channels.

4 . The method of claim 1 , wherein at least one member selected from the group consisting of the first connecting surface and the second connecting surface has a curvature.

5 . The method of claim 1 , wherein:

the first connecting surface is convex and the second connecting surface is concave, or the first connecting surface is concave and the second connecting surface is convex; and

while the first and second mirror parts are being brought together, an absolute value of a mean radius of curvature of the convex surface is less than an absolute value of a mean radius of curvature of the concave surface.

6 . The method of claim 1 , wherein, for at least one surface selected from the group consisting of the first connecting surface and the second connecting surface, the surface is not rotationally symmetrically so that it has different mean radii of curvature.

7 . The method of claim 6 , further comprising continuing to bring together the first and second mirror parts along a direction in which the first connecting surface and/or the second connecting surface has a radius of curvature with a smallest absolute value.

8 . The method of claim 1 , wherein the first mirror part comprises cooling channels that open toward the first connecting surface.

9 . The method of claim 1 , wherein the second mirror part comprises the auxiliary channels, and the auxiliary channels open toward a side of the second mirror part to provide an optical surface.

10 . The method of claim 9 , wherein the second mirror part further comprises the cooling channels.

11 . The method of claim 9 , wherein the auxiliary channels contain a first material, and the second mirror part comprises a second material different from the first material while the first and second mirror parts are brought together.

12 . The method of claim 9 , further comprising levelling out the auxiliary channels before the optical surface is formed.

13 . The method of claim 1 , wherein the channels have a linear profile.

14 . The method of claim 1 , wherein the channels are ring-shaped or comprises ring segments.

15 . The method of claim 1 , further comprising disposing the mirror in an illumination optical unit.

16 . The method of claim 1 , further comprising disposing the mirror in a projection lens.

17 . The method of claim 1 , further comprising disposing the mirror in a microlithographic projection exposure apparatus.

18 . A method, comprising:

providing a first mirror part comprising a first connecting surface and a second mirror part comprising a second connecting surface, the second mirror part comprising at least one member selected from the group consisting of cooling channels and auxiliary channels;

bringing together the first and second mirror parts so that initially a partial region of the first connecting surface and a partial region of the second connecting surface come into contact to provide a common contact surface; and

enlarging the contact surface by continuing to bring the first and second mirror parts together in a transverse direction with respect to the at least one member,

wherein:

the first connecting surface is convex and the second connecting surface is concave, or the first connecting surface is concave and the second connecting surface is convex; and

while the first and second mirror parts are being brought together, an absolute value of a mean radius of curvature of the convex surface is less than an absolute value of a mean radius of curvature of the concave surface.

19 . A method, comprising:

providing a first mirror part comprising a first connecting surface and a second mirror part comprising a second connecting surface, the second mirror part comprising at least one member selected from the group consisting of cooling channels and auxiliary channels;

bringing together the first and second mirror parts so that initially a partial region of the first connecting surface and a partial region of the second connecting surface come into contact to provide a common contact surface; and

enlarging the contact surface by continuing to bring the first and second mirror parts together in a transverse direction with respect to the at least one member,

wherein:

for at least one surface selected from the group consisting of the first connecting surface and the second connecting surface, the surface is not rotationally symmetrically so that it has different mean radii of curvature; and

the method further comprises continuing to bring together the first and second mirror parts along a direction in which the first connecting surface and/or the second connecting surface has a radius of curvature with a smallest absolute value.