Two-layer optical beam steering device, system, method of utilization, and method of fabrication
View Patent ↗A two-layer optical beam steering device, system, method of utilization and method of fabrication are disclosed. The solid-state device enables beam steering in two dimensions with dramatically fewer control lines than prior devices. This renders the device more technically realizable, easier to control, and more affordable to manufacture. Because less data need be transferred to the device, the device is also able to operate at faster speeds.
1 . An optical beam steering device comprising at least two scanning actuation layers, wherein the action of the first layer is to steer the beam in a first scanning dimension, and the action of the second layer is to steer the beam in a second scanning dimension, the device further comprising a liquid crystal material and wherein scanning control is achieved by applying an electric field to the liquid crystal material, the device comprising a lower layer and an upper layer, wherein the first layer is the lower layer of the device and the second layer is the upper layer of the device, the upper layer comprising a plurality of upper electrodes that at least partially define a plurality of upper optical cavities, the lower layer comprising a plurality of lower electrodes that at least partially define a plurality of lower optical cavities, wherein at least one cavity of the plurality of the upper cavities and at least one cavity of the plurality of lower cavities contain the liquid crystal material, the device further comprising an interconnect layer that is electrically connected to at least some electrodes of the plurality of lower electrodes.
2 . The device of claim 1 wherein the at least two scanning actuation layers provide at least two scanning dimensions, and where said scanning dimensions are oriented orthogonal to each other.
3 . The device of claim 1 wherein at least one scanning actuation layer provides control over scanning in elevation.
4 . The device of claim 1 wherein at least one scanning actuation layer provides control over scanning in azimuth.
5 . The device of claim 1 wherein the at least two scanning actuation layers provide at least two scanning dimensions, and where at least two of said scanning dimensions are oriented parallel to each other.
6 . The device of claim 5 wherein the two parallel scanning dimensions provide coarse and fine scanning control.
7 . The device of claim 1 constructed using at least one layer fabricated using copper-damascene microfabrication techniques.
8 . The device of claim 1 , wherein at least some electrodes of the plurality of the upper electrodes are arranged as common bar electrodes.
9 . The device of claim 1 , wherein at least some electrodes of the plurality of lower electrodes are arranged in a plurality of rows, the device further comprising a plurality of separators, wherein for each row of the lower electrodes, at least some separators of the plurality of separators electrically isolate lower electrodes from each other.
10 . The device of claim 1 , wherein the plurality of separators comprises oxide separators.
11 . The device of claim 1 , wherein each row of the lower electrodes is offset from the next row of the lower electrodes in an alternating manner.
12 . The device of claim 1 , further comprising an isolation layer configured to electrically isolate at least some of the electrodes of the plurality of lower electrodes from at least some electrodes of the plurality of upper electrodes.
13 . The device of claim 1 , further comprising a plurality of vias disposed between the interconnect layer and the plurality of lower electrodes, wherein the interconnect layer comprises a plurality of control lines, wherein at least some control lines of the plurality of control lines connect to at least some electrodes of the plurality of lower electrodes through at least some vias of the plurality of vias.
14 . The device of claim 1 , wherein at least some control lines of the plurality of control lines are disposed perpendicular to at least some electrodes of the plurality of the lower electrodes.
15 . The device of claim 1 , wherein the interconnect layer comprises a plurality of optical reflectors.
16 . The device of claim 1 , wherein at least some of the plurality of control lines are arranged as optical reflectors.
17 . An optical beam steering device, comprising: at least a first scanning actuation layer and a second scanning actuation layer, wherein the first scanning actuation layer is configured to steer the optical beam in a first scanning dimension, and the second scanning actuation layer is configured to steer the optical beam in a second scanning dimension, the device further comprising a liquid crystal material adapted to actuate scanning under a control of an applied electric field, the device comprising a lower layer and an upper layer, wherein the first scanning actuation layer is the lower layer of the device and the second scanning actuation layer is the upper layer of the device, the upper layer comprising a plurality of upper electrodes that at least partially define a plurality of upper optical cavities, the lower layer comprising a plurality of lower electrodes that at least partially define a plurality of lower optical cavities, wherein the plurality of upper cavities and the plurality of lower cavities contain the liquid crystal material, wherein at least some electrodes of the plurality of lower electrodes are arranged in a plurality of rows, the device further comprising a plurality of separators, wherein for each row of the lower electrodes, at least some separators of the plurality of separators electrically isolate the lower electrodes from each other, the device further comprising an interconnect layer that is electrically connected to at least some electrodes of the plurality of lower electrodes.
18 . The device of claim 17 , wherein the plurality of separators comprises oxide separators.
19 . The device of claim 17 , wherein each row of the lower electrodes is offset from the next row of the lower electrodes in an alternating manner.
20 . The device of claim 17 , further comprising a plurality of vias disposed between the interconnect layer and the plurality of lower electrodes, wherein the interconnect layer comprises a plurality of control lines, wherein at least some control lines of the plurality of control lines connect to at least some electrodes of the plurality of lower electrodes through at least some vias of the plurality of vias.
21 . The device of claim 17 , wherein at least some control lines of the plurality of control lines are disposed perpendicular to at least some electrodes of the plurality of lower electrodes.
22 . The device of claim 17 , wherein the interconnect layer comprises a plurality of optical reflectors.
23 . The device of claim 17 , wherein at least some control lines of the plurality of the control lines are arranged as optical reflectors.
24 . The device of claim 17 , wherein the upper electrodes are arranged as common bar electrodes.