Method for operating an optical component, and optical component
View Patent ↗The invention relates to a method for operating an optical component having a mirror element, a substrate for carrying the mirror element, an actuator device for tilting the mirror element about one or two tilt axes, which actuator device has a first actuator electrode structure and a second actuator electrode structure, and a sensor device for detecting a tilt angle of the mirror element. The first actuator electrode structure in this case comprises a plurality of first active actuator electrodes and at least one first passive actuator electrode. The second actuator electrode structure in this case comprises a plurality of second active actuator electrodes and at least one second passive actuator electrode. At least one of the first active actuator electrodes is subjected to a first voltage and at least one of the second active actuator electrodes is subjected to a second voltage. In order to tilt the mirror element, the first and the second voltage are changed with different rates of change.
1 . A method for operating an optical component comprising
a mirror element,
a substrate for carrying the mirror element,
an actuator device that is configured to tilt the mirror element about one or two tilt axes, wherein
the actuator device has a first actuator electrode structure and a second actuator electrode structure, and
a sensor device for detecting a tilt angle of the mirror element,
wherein the first actuator electrode structure comprises:
a plurality of first active actuator electrodes and
at least one first passive actuator electrode and
wherein the second actuator electrode structure comprises:
a plurality of second active actuator electrodes and
at least one second passive actuator electrode,
characterized in that
at least one of the first active actuator electrodes is subjected to a first voltage and
at least one of the second active actuator electrodes is subjected to a second voltage,
wherein, in order to tilt the mirror element, the first and the second voltage are changed with different rates of change.
2 . The method according to claim 1 , characterized in that
the first voltage is changed with a first signal and the second voltage is changed with a second signal, wherein the first and the second signal have different time constants.
3 . The method according to claim 2 , characterized in that
the first signal has a first signal gradient that is designed so as to avoid interference with sensor signals of the sensor device, and/or the second signal has a second signal gradient that is designed so as to compensate for position changes of the mirror element.
4 . The method according to claim 3 , characterized in that
the first signal has a first signal gradient that is designed so as to avoid interference with sensor signals of the sensor device.
5 . The method according to claim 3 , characterized in that
the second signal has a second signal gradient that is designed so as to compensate for position changes of the mirror element.
6 . The method according to claim 3 , characterized in that
the first signal has a first signal gradient that is designed so as to avoid interference with sensor signals of the sensor device and the second signal has a second signal gradient that is designed so as to compensate for position changes of the mirror element.
7 . The method according to claim 2 , characterized in that
the strength of the second signal for changing the second voltage adopts a constant value or is computed on the basis of a difference between a target tilt angle and a detected tilt angle.
8 . The method according to claim 2 , characterized in that
the first signal is regulated such that the second signal, in a steady state of the first signal, is in an optimum operating state.
9 . An optical component, comprising
a mirror element,
a substrate for carrying the mirror element,
an actuator device that is configured to tilt the mirror element about one or two tilt axes, and
a sensor device for detecting a tilt angle of the mirror element,
characterized in that
the optical component is configured to carry out a method according to claim 1 .
10 . A mirror array, comprising a plurality of optical components according to claim 9 .
11 . An illumination optical unit for a projection exposure apparatus for guiding illumination radiation to an object field, comprising at least one mirror array according to claim 10 .
12 . An illumination system for a projection exposure apparatus, comprising
an illumination optical unit according to claim 11 and
a radiation source.
13 . A microlithographic projection exposure apparatus, comprising
an illumination optical unit according to claim 11 and
a projection optical unit for projecting a reticle arranged in an object field into an object field into an image field.
14 . The method according to claim 1 , characterized in that
the plurality of first active actuator electrodes is attached to the substrate.
15 . The method according to claim 14 , characterized in that
the plurality of second active actuator electrodes is attached to the substrate.
16 . The method according to claim 1 , characterized in that
the at least one first passive actuator electrode is attached to the mirror element.
17 . The method according to claim 16 , characterized in that
the at least one second passive actuator electrode is attached to the mirror element.
18 . The method according to claim 1 , characterized in that
the plurality of first active actuator electrodes is attached to the substrate; and
the at least one first passive actuator electrode is attached to the mirror element.
19 . The method according to claim 1 , characterized in that
the plurality of second active actuator electrodes is attached to the substrate; and
the at least one second passive actuator electrode is attached to the mirror element.
20 . The method according to claim 1 , characterized in that
the plurality of first active actuator electrodes and the plurality of second active actuator electrodes are attached to the substrate; and
the at least one first passive actuator electrode and the at least one second passive actuator electrode are attached to the mirror element.