Method of controlling fluid flow

Inventors: Sean Joseph Penley (Sparks, NV); Michael Maeder (Riverview, FL); Marcos E. Perez-Blanco (Sparks, NV); Tyler James Wright (Reno, NV)

G05D7/0658 H10P72/0404

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Quick Facts

Patent No.: US 12687865
App. No.: 18/448,549
Granted: Jul 21, 2026
Kind: B2

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Abstract

Systems for processing articles are essential for semiconductor fabrication. In one method of controlling gas flow, a processing system is provided, the processing system having first and second fluid supplies. The first fluid supply is coupled to a first apparatus for controlling flow and the second fluid supply is coupled to the second apparatus for controlling flow. The first process fluid is then delivered to a process chamber via outlet of the first apparatus for controlling flow. The first process fluid is also bled via a bleed port of the first apparatus for controlling flow. The flow rate of the first process fluid through the bleed port is controlled at a first flow rate which is less than a first threshold.

Claims (29)

1 . A method of controlling fluid flow comprising:

providing a processing system comprising a first fluid supply configured to supply a first process fluid, the first fluid supply fluidly coupled to an inlet of a first apparatus for controlling flow, and a second fluid supply configured to supply a second process fluid, the second fluid supply fluidly coupled to an inlet of a second apparatus for controlling flow;

delivering the first process fluid to a processing chamber fluidly coupled to an outlet of the first apparatus for controlling flow; and

venting the first process fluid to a vent manifold fluidly coupled to a bleed port of the first apparatus for controlling flow through the bleed port into the vent manifold at a first flow rate which is less than a first threshold and venting the second process fluid to the vent manifold fluidly coupled to a bleed port of the second apparatus for controlling flow through the bleed port into the vent manifold at a second flow rate, the second flow rate controlled by a proportional valve to control a concentration of the first process fluid below a second threshold.

2 . The method of claim 1 wherein the first apparatus for controlling flow comprises a flow restrictor and a bleed valve configured to control flow from the bleed port of the first apparatus for controlling flow, the bleed valve preventing flow through the flow restrictor in a closed state.

3 . The method of claim 1 wherein the first process fluid is reactive and the second process fluid is inert.

4 . The method of claim 1 wherein the second apparatus for controlling flow vents the second process fluid simultaneously with the venting of the first process fluid.

5 . The method of claim 1 wherein the step of venting is performed subsequent to the step of delivering.

6 . The method of claim 1 wherein the first apparatus for controlling flow comprises a flow path extending from the inlet to the outlet and the bleed port, a first proportional valve fluidly coupled to the flow path between the inlet and the bleed port and a second proportional valve fluidly coupled to the flow path between the first proportional valve and the bleed port; and wherein the second proportional valve is configured to vent the first process fluid at the first flow rate.

7 . The method of claim 1 wherein the processing system further comprises a controller comprising a memory, the memory of the controller storing the first threshold.

8 . The method of claim 1 wherein the venting of the first process fluid is controlled by a proportional valve and a controller.

9 . A method of controlling fluid flow comprising:

delivering the first process fluid to a processing chamber fluidly coupled to an outlet of the first apparatus for controlling flow; and

venting the first process fluid to a vent manifold fluidly coupled to a bleed port of the first apparatus for controlling flow at a first flow rate and simultaneously venting the second process fluid to the vent manifold fluidly coupled to a bleed port of the second apparatus for controlling flow at a second flow rate to control a concentration of the first process fluid within the vent manifold below a second threshold, the second flow rate actively controlled by a proportional valve of the second apparatus for controlling flow to maintain the concentration of the first process fluid below the second threshold.

10 . The method of claim 9 wherein the first flow rate is less than a first threshold.

11 . The method of claim 9 wherein the first process fluid is reactive and the second process fluid is inert.

12 . The method of claim 9 wherein the step of venting is performed subsequent to the step of delivering.

13 . The method of claim 9 wherein the first apparatus for controlling flow comprises a flow path extending from the inlet to the outlet and the bleed port, a first proportional valve fluidly coupled to the flow path between the inlet and the outlet and a second proportional valve fluidly coupled to the flow path between the first proportional valve and the bleed port; and wherein the second proportional valve is configured to vent the first process fluid at the first flow rate.

14 . The method of claim 9 wherein the processing system further comprises a controller comprising a memory, the memory of the controller storing the second threshold.

15 . A method of controlling fluid flow comprising:

venting the first process fluid to a vent manifold fluidly coupled to a bleed port of the first apparatus for controlling flow at a first flow rate into the vent manifold, a concentration of the first process fluid within the vent manifold being below a threshold; and

delivering the first process fluid to a processing chamber fluidly coupled to an outlet of the first apparatus for controlling flow;

wherein the first apparatus for controlling flow comprises a flow restrictor configured to control flow from the bleed port of the first apparatus for controlling flow, a bleed valve of the first apparatus for controlling flow preventing flow through the flow restrictor when the bleed valve is in a closed state.

16 . The method of claim 15 wherein the step of venting further comprises venting the second process fluid to the vent manifold via a bleed port of the second apparatus for controlling flow; and wherein the first process fluid is reactive and the second process fluid is inert.

17 . The method of claim 16 wherein the second apparatus for controlling flow vents the second process fluid simultaneously with the venting of the first process fluid.

18 . The method of claim 15 wherein the second apparatus for controlling flow vents the second process fluid at a second flow rate to control a concentration of the first process fluid below a second threshold.

19 . The method of claim 15 wherein the first apparatus for controlling flow comprises a flow path extending from the inlet to the outlet and the bleed port, a first proportional valve fluidly coupled to the flow path between the inlet and the outlet and the bleed valve fluidly coupled to the flow path between the first proportional valve and the bleed port.