Manufacturing method of conductive probe
A manufacturing method of a conductive probe that is configured to write information to and read information from a ferroelectric recording medium is provided. The manufacturing method includes: forming, on a conductive material, an insulating layer by oxidizing the conductive material; forming an isolation layer on the insulating layer; applying a photoresist on the isolation layer; forming a hole in the photoresist; etching in the hole to the conductive material; depositing metal on a surface of the conductive material in the hole, thereby obtaining a needle-shaped electrode; and removing the isolation layer. A portion of the needle-shaped electrode protrudes from the surface of the insulating layer.
1 . A manufacturing method of a conductive probe that is configured to write information to and read information from a ferroelectric recording medium, the manufacturing method comprising:
forming, on a conductive material, an insulating layer by oxidizing the conductive material;
forming an isolation layer on the insulating layer;
applying a photoresist on the isolation layer;
forming a hole in the photoresist;
etching in the hole to the conductive material;
depositing metal on a surface of the conductive material in the hole, thereby obtaining a needle-shaped electrode; and
removing the isolation layer,
wherein a portion of the needle-shaped electrode protrudes from the surface of the insulating layer.
2 . The manufacturing method according to claim 1 , wherein the hole is formed in a circular shape, a triangular shape, or a quadrangular shape.