IP Library › Granted Patent US 12688994

Granted Patent B2

US 12688994 · App. 17/927,976 · Granted Jul 21, 2026

Stage device, and charged particle beam device

Inventors: Motohiro Takahashi (Tokyo, JP); Masaki Mizuochi (Tokyo, JP); Shuichi Nakagawa (Tokyo, JP); Tomotaka Shibazaki (Tokyo, JP); Hironori Ogawa (Tokyo, JP); Takanori Kato (Tokyo, JP)

Assignee: Hitachi High-Tech Corporation

H01J37/20 G01B11/002 H01J2237/20221 H01J2237/24578

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Quick Facts

Patent No.: US 12688994
App. No.: 17/927,976
Granted: Jul 21, 2026
Kind: B2

External Links

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Abstract

The present invention provides: a stage device that can suppress bending deformation of a mirror, and that can reduce the positioning error of a stage by reducing the measurement error of the position of the stage; and a charged particle beam device comprising this stage device. The stage device according to the present invention comprises: a table ( 105 ) on which a sample ( 106 ) is placed; a bar mirror ( 111 ) installed on the table ( 105 ); a laser interferometer ( 104 ) that irradiates the bar mirror ( 111 ) with laser light and receives reflected light from the bar mirror ( 111 ), thereby measuring the position of the table ( 105 ); a drive mechanism ( 103 ) that moves the table ( 105 ); and a plurality of elastic members ( 203 ) installed between the bar mirror ( 111 ) and the table ( 105 ).

Claims (44)

1 . A stage device comprising:

a table on which a sample is placed;

a bar mirror installed on the table;

a laser interferometer that irradiates the bar mirror with laser light and receives reflected light from the bar mirror, thereby measuring a position of the table;

a drive mechanism that moves the table; and

a plurality of block-shaped elastic members installed between the bar mirror and the table; and

wherein, a fixing portion between each elastic member and the table is a first fixing portion, and a fixing portion between each elastic member and the bar mirror is a second fixing portion, wherein a position of the first fixing portion and a position of the second fixing portion of each elastic member are different from each other in a length direction of the bar mirror.

2 . The stage device according to claim 1 , wherein the table includes two steps with different heights, and the plurality of elastic member is installed on an upper surface of a lower step.

3 . The stage device according to claim 1 , wherein the bar mirror is made of a material with a higher thermal conductivity than that of glass.

4 . The stage device according to claim 1 , wherein the bar mirror is formed using ceramics.

5 . The stage device according to claim 1 , wherein the bar mirror is formed using alumina ceramics.

6 . A charged particle beam device comprising:

a sample chamber in which a sample is placed;

a lens barrel through which the sample is irradiated with a charged particle beam; and

a stage device that moves the sample, wherein the stage device is the stage device according to claim 1 .

7 . The stage device according to claim 1 , wherein the plurality of elastic members is made of an aluminum alloy.

8 . The stage device according to claim 1 , wherein bolts are fixed between the table and the plurality of elastic members and between the plurality of elastic members and the bar mirror.

9 . A stage device comprising:

a table on which a sample is placed;

a bar mirror installed on the table;

a laser interferometer that irradiates the bar mirror with laser light and receives reflected light from the bar mirror, thereby measuring a position of the table;

a drive mechanism that moves the table; and

a plurality of elastic members installed between the bar mirror and the table,

10 . The stage device according to claim 9 , wherein the table includes two steps with different heights, and the elastic member is installed on an upper surface of the lower step.

11 . The stage device according to claim 9 , wherein a distance between the first fixing portion and the second fixing portion of each of the plurality of elastic members in the length direction of the bar mirror is determined by using an interval between the first fixing portions of two adjacent elastic members, an interval between the second fixing portions of the two adjacent elastic members, a linear expansion coefficient of the table, a linear expansion coefficient of the bar mirror, and a linear expansion coefficient of the elastic member.

12 . The stage device according to claim 9 , wherein the bar mirror is made of a material with a higher thermal conductivity than that of glass, and wherein the bar mirror is formed using ceramics or alumina ceramics.

13 . The stage device according to claim 9 , wherein the elastic member includes first portion projecting toward the table at one end in a length direction of the bar mirror and second portion projecting toward the bar mirror at other end in the length direction of the bar mirror, and

wherein the elastic member is fixed with the table by the first portion at the first fixing portion and is fixed with the bar mirror by the second portion at the second fixing portion.

14 . A stage device comprising:

a table on which a sample is placed;

a bar mirror installed on the table;

a laser interferometer that irradiates the bar mirror with laser light and receives reflected light from the bar mirror, thereby measuring a position of the table;

a drive mechanism that moves the table; and

a plurality of elastic members installed between the bar mirror and the table,

wherein only a lower surface of the bar mirror is fixed to the table with the plurality of elastic members being interposed therebetween.

15 . The stage device according to claim 14 , wherein the table includes at least two steps with different heights, and the plurality of elastic members is installed on an upper surface of the lower step.

16 . The stage device according to claim 14 , wherein the bar mirror is made of a material with a higher thermal conductivity than that of glass, and wherein the bar mirror is formed using ceramics or alumina ceramics.

17 . The stage device according to claim 1 , wherein the plurality of block-shaped elastic members are made of an elastic material comprising heat conductivity.

18 . The stage device according to claim 1 , wherein the plurality of block-shaped elastic member comprise a first portion projecting toward the table at one end in a length direction of the bar mirror and a second portion projecting toward the bar mirror at other end in the length direction of the bar mirror, and

wherein the plurality of block-shaped elastic member is fixed with the table by the first portion at the first fixing portion and is fixed with the bar mirror by the second portion at the second fixing portion.

19 . The stage device according to claim 1 , wherein the block-shaped elastic members suppress a transmission of deformation and distortion of the table to the bar mirror.

20 . The stage device according to claim 1 , wherein the plurality of block-shaped elastic member is installed at a height position of a middle plane of the table or in a vicinity of the height position of the middle plane.