Substrate transfer system and transfer module
This substrate transfer system is provided with: a load-lock module; an atmospheric transfer module having a first sidewall, a second sidewall and a third sidewall, the first sidewall extending along a first direction and connected to the load-lock module, the second sidewall extending along a second direction perpendicular to the first direction, the third sidewall being disposed on an opposite side of the second sidewall; a first load port extending outward from the second sidewall along the first direction; and a second load port extending outward from the third sidewall along the first direction.
1 . A substrate transfer system comprising:
a load-lock module;
an atmospheric transfer module including:
a first sidewall;
a second sidewall;
a third sidewall, the first sidewall extending along a first direction and connected to the load-lock module, the second sidewall extending along a second direction perpendicular to the first direction, and the third sidewall being disposed on an opposite side of the second sidewall;
a fourth sidewall opposite to the first sidewall;
a guide rail formed on the fourth sidewall and extending in a vertical direction; and
a transfer robot moving vertically along the guide rail;
a first load port extending outward from the second sidewall along the first direction, the first load port including a first moving part configured to rotate a container placed thereon to change a direction of an opening of the container and to move the container to connect the container to the atmospheric transfer module; and
a second load port extending outward from the third sidewall along the first direction, the second load port including a second moving part configured to rotate a container placed thereon to change a direction of an opening of the container and to move the container to connect the container to the atmospheric transfer module,
wherein the atmospheric transfer module further includes an opening formed in the first sidewall and communicating with the load-lock module, the opening being disposed below the first load port and the second load port.
2 . The substrate transfer system of claim 1 , wherein the first moving part is a first substrate carrier stage, and
the second moving part is a second substrate carrier stage.
3 . The substrate transfer system of claim 2 , further comprising:
a third load port disposed above the first load port and extending outward from the second sidewall along the first direction, the third load port including a third moving part configured to rotate a container placed thereon to change a direction of an opening of the container and to move the container to connect the container to the atmospheric transfer module,
wherein the third moving part is a third substrate carrier stage, and
the first substrate carrier stage and the third substrate carrier stage are disposed at different positions in plan view.
4 . The substrate transfer system of claim 3 , further comprising:
a fourth load port disposed above the second load port and extending outward from the third sidewall along the first direction, the fourth load port including a fourth moving part configured to rotate a container placed thereon to change a direction of an opening of the container and to move the container to connect the container to the atmospheric transfer module,
wherein the fourth moving part is a fourth substrate carrier stage, and
the second substrate carrier stage and the fourth substrate carrier stage are disposed at different positions in plan view.
5 . The substrate transfer system of claim 1 , wherein the first load port includes a guide rail on which the first moving part moves to connect the container to the atmospheric transfer module.
6 . The substrate transfer system of claim 5 , wherein the first moving part is configured to change the position and the direction of the container, which is disposed such that the opening is along a sidewall surface, so that the opening of the container faces the opening of the atmospheric transfer module.
7 . The substrate transfer system of claim 1 , further comprising storage disposed below the atmospheric transfer module offset from a main travel path of a guiderail and disposed beneath the second load port.
8 . The substrate transfer system of claim 1 , wherein the atmospheric transfer module further includes an alignment chamber including an aligner for adjusting a direction of a substrate disposed in the alignment chamber, and
the transfer robot moves vertically in the atmospheric transfer module to transfer the substrate between the first load port and the second load port, the alignment chamber and the load-lock module.
9 . A transfer module comprising:
a housing;
storage disposed near a bottom of the housing;
an alignment chamber including an aligner for adjusting a direction of a substrate
a guide rail extending in a vertical direction; and
a transfer device disposed in the housing and movable along the guide rail,
wherein the housing includes:
a first sidewall having a first opening communicating with a load-lock module;
a second sidewall connected to a first load port and having at least one second opening;
a third sidewall opposite to the second sidewall, connected to a second load port, and having at least one third opening; and
a fourth sidewall opposite to the first sidewall,
wherein the guide rail is formed on the fourth sidewall and extends in a vertical direction,
wherein the first opening is disposed below the first load port and the second load port, and
wherein the first load port and the second load port are disposed above the storage.
10 . The transfer module of claim 9 , wherein said at least one second opening includes a plurality of second openings arranged along a horizontal direction.
11 . The transfer module of claim 9 , wherein the first opening and said at least one second opening are formed at different heights.
12 . The transfer module of claim 11 , wherein a surface of the first sidewall where the first opening is formed protrudes toward a region of the second sidewall when viewed from a direction intersecting the surface of the second sidewall.
13 . The transfer module of claim 9 , wherein said at least one second opening includes a plurality of second openings arranged along a longitudinal direction.
14 . The transfer module of claim 13 , wherein at least one of the plurality of second openings is formed at a position higher than the first opening, and at least another one of the plurality of second openings is formed at a position lower than the first opening.
15 . The transfer module of claim 14 , wherein the plurality of second openings are formed on a same plane.
16 . The transfer module of claim 14 , wherein another plurality of the second openings are additionally formed so as to be arranged in a horizontal direction along the surface of the second sidewall at the same height position as the position where the plurality of the second openings are formed.
17 . The transfer module of claim 16 , wherein the surface of the first sidewall where the first opening is formed protrudes toward a region of the second sidewall when viewed from a direction intersecting the surface of the second sidewall.
18 . The transfer module of claim 9 , further comprising:
a gas supply for supplying and circulating an inert gas in the housing.
19 . The transfer module of claim 9 , further comprising storage disposed below the atmospheric transfer module offset from a main travel path of the guiderail and disposed beneath the second load port.