High efficiency trap for particle collection in a vacuum foreline
Embodiments disclosed herein include a particle collection trap for an abatement system for abating compounds produced in semiconductor processes. The particle collection trap includes a device for producing spiral gas flow in the particle collection trap. The spiral gas flow causes particles, which are heavier than the gas, to travel to the outside diameter of the flow path where the gas velocity is slower and to drop out of the gas stream. The device may be a spiral member coupled to a hollow tube or a rolled member having an inner portion coupled to a hollow tube. The particle collection trap increases the accumulation rate of particles in the gas stream without reducing the velocity of the gas flow.
1 . A particle collection trap, comprising:
a body comprising a side wall, a first end, and a second end opposite the first end;
a hollow tube disposed in the body, the hollow tube extending from an opening to an interior of the body through the first end of the body and terminating in direct contact with the second end of the body, the hollow tube having one or more openings being formed in the hollow tube at the second end;
an inlet port at the first end open to an interior of the hollow tube;
a rolled member disposed in the body around the hollow tube, the rolled member having a top, a bottom, a first edge and a second edge, the rolled member extending along the top in contact with the first end to the bottom in contact with the second end, the rolled member and extending in a non-helical spiral coil pattern from the first edge at the hollow tube to a second edge at the side wall; and
an outlet port open to the interior of the body, an entirety of the outlet port disposed through the first end and adjacent the side wall.
2 . The particle collection trap of claim 1 , wherein the body, the hollow tube, and the rolled member each comprises stainless steel, aluminum, or nickel coated aluminum.
3 . The particle collection trap of claim 1 , wherein the rolled member comprises an inner portion at the hollow tube and an outer portion at the side wall, wherein the rolled member winds around the hollow tube with continuously increasing distance from the hollow tube.
4 . The particle collection trap of claim 3 , wherein the rolled member is fabricated from a single piece of material.
5 . The particle collection trap of claim 1 , wherein the one or more openings comprises one or more vertical slits.
6 . The particle collection trap of claim 1 , wherein the one or more openings have the same size.
7 . The particle collection trap of claim 1 , wherein the one or more openings have different sizes.
8 . A abatement system, comprising:
a plasma source; and
a particle collection trap disposed downstream of the plasma source, the particle collection trap of claim 1 being configured to provide a spiral path for a gas stream exiting the plasma source.
9 . The abatement system of claim 8 , wherein the particle collection trap comprises a rolled member.
10 . The abatement system of claim 8 wherein the plasma source is configured to be fluidly coupled to an exhaust port of a vacuum processing system via a foreline.
11 . The abatement system of claim 8 further comprising:
a vacuum pump coupled to the outlet of the particle collection trap, wherein the vacuum pump is configured to pump fluid from the vacuum processing system through the abatement system.
12 . The abatement system of claim 8 , wherein a fluid pathway through the particle collection trap is open from the first end to the second end while extending around the rolled member to the second edge at the side wall.
13 . The abatement system of claim 8 , wherein the body is configured to direct a fluid entering the inlet port about the rolled member and out the outlet port.
14 . The particle collection trap of claim 1 , wherein a fluid pathway through the particle collection trap is open from the first end to the second end while extending around the rolled member to the second edge at the side wall.
15 . The particle collection trap of claim 1 , wherein the body is configured to direct a fluid entering the inlet port about the rolled member and out the outlet port.
16 . The particle collection trap of claim 1 , wherein the body further comprises a fluid passageway fluidly coupling the inlet port to the outlet port, wherein all fluid entering the inlet port is directed by the fluid passageway to leave the body of the particle collection trap at the outlet port.
17 . The particle collection trap of claim 1 , wherein rolled member winds around the hollow tube with continuously increasing distance from the hollow tube.
18 . The particle collection trap of claim 1 , wherein the rolled member comprises:
a plurality of layers formed from each successive roll of the rolled member about the hollow tube, wherein distances between each layer of the rolled member is greatest near the hollow tube and the smallest near the side wall.