Acoustic wave device
An acoustic wave device includes a high-acoustic-velocity film, a low-acoustic-velocity film, a piezoelectric layer including lithium tantalate, and an IDT electrode on the piezoelectric layer. The IDT electrode includes first and second busbars and first and second electrode fingers. An intersecting region is a portion where the first and second electrode fingers overlap in an acoustic wave propagation direction. The intersecting region includes a central region and first and second edge regions. The IDT electrode includes first and second gap regions outside the first and second edge regions. The first and second electrode fingers are wider in the first and second edge regions than in the central region. A duty ratio in the first and second edge regions is from about 0.62 to about 0.73.
1 . An acoustic wave device comprising:
a high-acoustic-velocity material layer;
a low-acoustic-velocity film on the high-acoustic-velocity material layer;
a piezoelectric layer including lithium tantalate on the low-acoustic-velocity film; and
an interdigital transducer (IDT) electrode on the piezoelectric layer; wherein
an acoustic velocity of bulk waves propagating through the high-acoustic-velocity material layer is higher than an acoustic velocity of acoustic waves propagating through the piezoelectric layer;
an acoustic velocity of bulk waves propagating through the low-acoustic-velocity film is lower than an acoustic velocity of bulk waves propagating through the piezoelectric layer;
the IDT electrode includes a first busbar and a second busbar facing each other, a plurality of first electrode fingers each including one end connected to the first busbar, and a plurality of second electrode fingers each including one end connected to the second busbar and that are interdigitated with the plurality of first electrode fingers;
when an acoustic wave propagation direction is a first direction and a direction perpendicular to the first direction is a second direction, a portion of the IDT electrode where the first electrode fingers and the second electrode fingers overlap in the first direction is an intersecting region;
the intersecting region includes a central region centrally located in the second direction, a first edge region at a side of the central region closer to the first busbar, and a second edge region at a side of the central region closer to the second busbar;
the IDT electrode includes a first gap region between the first edge region and the first busbar and a second gap region between the second edge region and the second busbar;
the first electrode fingers and the second electrode fingers are wider in at least one region of the first edge region and the second edge region than in the central region; and
a duty ratio in the first edge region and the second edge region is from 0.62 to 0.73.
2 . The acoustic wave device according to claim 1 , wherein
a low-acoustic-velocity region having a lower acoustic velocity than the central region is in the first edge region and the second edge region; and
a high-acoustic-velocity region having a higher acoustic velocity than the central region is outside the first edge region in the second direction and outside the second edge region in the second direction.
3 . The acoustic wave device according to claim 2 , wherein the high- acoustic-velocity region is in the first gap region and the second gap region.
4 . The acoustic wave device according to claim 1 , wherein
the IDT electrode includes a main electrode layer;
the main electrode layer is an Al layer or an AlCu layer;
a Cu content percentage of the main electrode layer is less than or equal to 2 wt %; and
when an optimum duty ratio is a duty ratio in the first edge region and the second edge region at which an acoustic velocity in the first edge region and the second edge region is lowest, an LT film thickness is a film thickness of the piezoelectric layer, and an electrode film thickness is a film thickness of the main electrode layer in the first electrode fingers and the second electrode fingers of the IDT electrode, the LT film thickness and the electrode film thickness are within ranges where the optimum duty ratio is from 0.62 to 0.73 in Formula 1 below:
OPTIMUM
DUTY
RATIO
=
0.66831566544375
+
0.821829726029454
×
(
(
″
ELECTRODE
FILM
THICKNESS
[
λ
]
″
)
-
0.0625000000000001
)
+
0.0377723825227273
×
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.275
)
+
5.41169053151292
×
(
(
(
″
ELECTRODE
FILM
THICKNESS
[
λ
]
″
)
-
0.0625000000000001
)
×
(
(
″
ELECTRODE
FILM
THICKNESS
[
λ
]
″
)
-
0.0625000000000001
)
-
0.00053125
)
+
(
-
0.325118002174692
)
×
(
(
(
″
ELECTRODE
FILM
THICKNESS
[
λ
]
″
)
-
0.0625000000000001
)
×
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.275
)
)
+
(
-
0.0722908233901528
)
×
(
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.275
)
)
×
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.275
)
-
0.020625
)
.
FORMULA
1
5 . The acoustic wave device according to claim 1 , wherein
the IDT electrode includes a Cu layer; and
when an optimum duty ratio is a duty ratio in the first edge region and the second edge region at which an acoustic velocity in the first edge region and the second edge region is lowest, an LT film thickness is a film thickness of the piezoelectric layer, and a Cu film thickness is a film thickness of the Cu layer in the first electrode fingers and the second electrode fingers of the IDT electrode, the LT film thickness and the Cu film thickness are within ranges where the optimum duty ratio is from 0.62 to 0.73 in Formula 2 below:
OPTIMUM
DUTY
RATIO
=
0.722361035255556
+
0.0561123231333331
×
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.3
)
+
0.450142117104374
×
(
(
″
Cu
FILM
THICKNESS
[
λ
]
″
)
-
0.055
)
+
(
-
0.189939099134199
)
×
(
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.3
)
×
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.3
)
-
0.0166666666666667
)
+
0.0947647208080766
×
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.3
)
×
(
(
″
Cu
FILM
THICKNESS
[
λ
]
″
)
-
0.055
)
+
5.94554881734021
×
(
(
(
″
Cu
FILM
THICKNESS
[
λ
]
″
)
-
0.055
)
×
(
(
″
Cu
FILM
THICKNESS
[
λ
]
″
)
-
0.055
)
-
0.000824999999999999
)
.
FORMULA
2
6 . The acoustic wave device according to claim 1 , wherein
the IDT electrode includes a Pt layer stacked on the piezoelectric layer and an Al layer stacked on the Pt layer; and
when an optimum duty ratio is a duty ratio in the first edge region and the second edge region at which an acoustic velocity in the first edge region and the second edge region is lowest, an LT film thickness is a film thickness of the piezoelectric layer, and a Pt film thickness and an Al film thickness are respectively a film thickness of the Pt layer and a film thickness of the Al layer in the first electrode fingers and the second electrode fingers of the IDT electrode, the LT film thickness, the Pt film thickness, and the Al film thickness are in ranges where the optimum duty ratio is from 0.62 to 0.73 in Formula 3 below:
OPTIMUM
DUTY
RATIO
=
0.706311420324445
+
0.0515443705199995
×
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.3
)
+
0.340692430577689
×
(
(
″
Al
FILM
THICKNESS
[
λ
]
″
)
-
0.0750000000000001
)
+
1.92242704222223
×
(
(
″
Pt
FILM
THICKNESS
[
λ
]
″
)
-
0.0125
)
+
(
-
0.1623038581645
)
×
(
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.3
)
×
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.3
)
-
0.0166666666666667
)
+
0.0686507973333415
×
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.3
)
×
(
(
″
Al
FILM
THICKNESS
[
λ
]
″
)
-
0.0750000000000001
)
+
5.08720585142787
×
(
(
(
″
Al
FILM
THICKNESS
[
λ
]
″
)
-
0.0750000000000001
)
×
(
(
″
Al
FILM
THICKNESS
[
λ
]
″
)
-
0.0750000000000001
)
-
0.0003125
)
+
0.292474862666682
×
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.3
)
×
(
(
″
Pt
FILM
THICKNESS
[
λ
]
″
)
-
0.0125
)
+
(
-
22.1884852444445
)
×
(
(
″
Al
FILM
THICKNESS
[
λ
]
″
)
-
0.0750000000000001
)
×
(
(
″
Pt
FILM
THICKNESS
[
λ
]
″
)
-
0.0125
)
+
-
63.3669675555578
×
(
(
(
″
Pt
FILM
THICKNESS
[
λ
]
″
)
-
0.0125
)
×
(
(
″
Pt
FILM
THICKNESS
[
λ
]
″
)
-
0.0125
)
-
0.00005
)
.
FORMULA
3
7 . The acoustic wave device according to claim 1 , wherein
the IDT electrode includes a W layer stacked on the piezoelectric layer and an Al layer stacked on the W layer; and
when an optimum duty ratio is a duty ratio in the first edge region and the second edge region at which an acoustic velocity in the first edge region and the second edge region is lowest, an LT film thickness is a film thickness of the piezoelectric layer, and a W film thickness and an Al film thickness are respectively a film thickness of the W layer and a film thickness of the Al layer in the first electrode fingers and the second electrode fingers of the IDT electrode, the LT film thickness, the W film thickness, and the Al film thickness are in ranges where the optimum duty ratio is from 0.62 to 0.73 in Formula 4 below:
OPTIMUM
DUTY
RATIO
=
0.670366655408889
+
0.0569799749733328
×
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.3
)
+
0.601791697955469
×
(
(
″
Al
FILM
THICKNESS
[
λ
]
″
)
-
0.0750000000000001
)
+
0.0898163408888796
×
(
(
″
W
FILM
THICKNESS
[
λ
]
″
)
-
0.0125
)
+
(
-
0.186654102147184
)
×
(
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.3
)
×
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.3
)
-
0.0166666666666666667
)
+
0.00960756266667166
×
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.3
)
×
(
(
″
Al
FILM
THICKNESS
[
λ
]
″
)
-
0.0750000000000001
)
+
4.24356009650733
×
(
(
(
″
Al
FILM
THICKNESS
[
λ
]
″
)
-
0.0750000000000001
)
×
(
(
″
Al
FILM
THICKNESS
[
λ
]
″
)
-
0.0750000000000001
)
-
0.0003125
)
+
0.54235624266667
×
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.3
)
×
(
(
″
W
FILM
THICKNESS
[
λ
]
″
)
-
0.0125
)
+
(
-
19.6658167822222
)
×
(
(
″
Al
FILM
THICKNESS
[
λ
]
″
)
-
0.0750000000000001
)
×
(
(
″
W
FILM
THICKNESS
[
λ
]
″
)
-
0.0125
)
+
15.4875977777752
×
(
(
(
″
W
FILM
THICKNESS
[
λ
]
″
)
-
0.0125
)
×
(
(
″
W
FILM
THICKNESS
[
λ
]
″
)
-
0.0125
)
-
0.00005
)
.
FORMULA
4
8 . The acoustic wave device according to claim 1 , wherein
the IDT electrode includes a Mo layer stacked on the piezoelectric layer and an Al layer stacked on the Mo layer; and
when an optimum duty ratio is a duty ratio in the first edge region and the second edge region at which an acoustic velocity in the first edge region and the second edge region is lowest, an LT film thickness is a film thickness of the piezoelectric layer, and a Mo film thickness and an Al film thickness are respectively a film thickness of the Mo layer and a film thickness of the Al layer in the first electrode fingers and the second electrode fingers of the IDT electrode, the LT film thickness, the Mo film thickness, and the Al film thickness are in ranges so that the optimum duty ratio is from 0.62 to 0.73 in Formula 5 below:
OPTIMUM
DUTY
RATIO
=
0.650578355337778
+
0.0565759044933328
×
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.3
)
+
0.896476823999908
×
(
(
″
Al
FILM
THICKNESS
[
λ
]
″
)
-
0.0750000000000001
)
+
(
-
0.835424887999999
)
×
(
(
″
Mo
FILM
THICKNESS
[
λ
]
″
)
-
0.0125
)
+
(
-
0.182142102839825
)
×
(
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.3
)
×
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.3
)
-
0.0166666666666666667
)
+
(
-
0.0337296554666596
)
×
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.3
)
×
(
(
″
Al
FILM
THICKNESS
[
λ
]
″
)
-
0.0750000000000001
)
+
3.10610546793597
×
(
(
(
″
Al
FILM
THICKNESS
[
λ
]
″
)
-
0.0750000000000001
)
×
(
(
″
Al
FILM
THICKNESS
[
λ
]
″
)
-
0.0750000000000001
)
-
0.0003125
)
+
0.286014725333341
×
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.3
)
×
(
(
″
Mo
FILM
THICKNESS
[
λ
]
″
)
-
0.0125
)
+
(
-
8.1523516622225
)
×
(
(
″
Al
FILM
THICKNESS
[
λ
]
″
)
-
0.0750000000000001
)
×
(
(
″
Mo
FILM
THICKNESS
[
λ
]
″
)
-
0.0125
)
+
63.3934203174576
×
(
(
(
″
W
FILM
THICKNESS
[
λ
]
″
)
-
0.0125
)
×
(
(
″
Mo
FILM
THICKNESS
[
λ
]
″
)
-
0.0125
)
-
0.00005
)
.
FORMULA
5
9 . The acoustic wave device according to claim 1 , wherein the high-acoustic-velocity material layer is a high-acoustic-velocity support substrate.
10 . The acoustic wave device according to claim 1 , further comprising:
a support substrate; wherein
the high-acoustic-velocity material layer is a high-acoustic-velocity film provided on the support substrate.
11 . The acoustic wave device according to claim 2 , wherein
the IDT electrode includes a main electrode layer;
the main electrode layer is an Al layer or an AlCu layer;
a Cu content percentage of the main electrode layer is less than or equal to 2 wt %; and
when an optimum duty ratio is a duty ratio in the first edge region and the second edge region at which an acoustic velocity in the first edge region and the second edge region is lowest, an LT film thickness is a film thickness of the piezoelectric layer, and an electrode film thickness is a film thickness of the main electrode layer in the first electrode fingers and the second electrode fingers of the IDT electrode, the LT film thickness and the electrode film thickness are within ranges where the optimum duty ratio is from 0.62 to 0.73 in Formula 1 below:
OPTIMUM
DUTY
RATIO
=
0.66831566544375
+
0.821829726029454
×
(
(
″
ELECTRODE
FILM
THICKNESS
[
λ
]
″
)
-
0.0625000000000001
)
+
0.0377723825227273
×
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.275
)
+
5.41169053151292
×
(
(
(
″
ELECTRODE
FILM
THICKNESS
[
λ
]
″
)
-
0.0625000000000001
)
×
(
(
″
ELECTRODE
FILM
THICKNESS
[
λ
]
″
)
-
0.0625000000000001
)
-
0.00053125
)
+
(
-
0.325118002174692
)
×
(
(
(
″
ELECTRODE
FILM
THICKNESS
[
λ
]
″
)
-
0.0625000000000001
)
×
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.275
)
)
+
(
-
0.0722908233901528
)
×
(
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.275
)
)
×
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.275
)
-
0.020625
)
.
FORMULA
1
12 . The acoustic wave device according to claim 2 , wherein
the IDT electrode includes a Cu layer; and
when an optimum duty ratio is a duty ratio in the first edge region and the second edge region at which an acoustic velocity in the first edge region and the second edge region is lowest, an LT film thickness is a film thickness of the piezoelectric layer, and a Cu film thickness is a film thickness of the Cu layer in the first electrode fingers and the second electrode fingers of the IDT electrode, the LT film thickness and the Cu film thickness are within ranges where the optimum duty ratio is from 0.62 to 0.73 in Formula 2 below:
OPTIMUM
DUTY
RATIO
=
0.722361035255556
+
0.0561123231333331
×
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.3
)
+
0.450142117104374
×
(
(
″
Cu
FILM
THICKNESS
[
λ
]
″
)
-
0.055
)
+
(
-
0.189939099134199
)
×
(
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.3
)
×
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.3
)
-
0.0166666666666667
)
+
0.0947647208080766
×
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.3
)
×
(
(
″
Cu
FILM
THICKNESS
[
λ
]
″
)
-
0.055
)
+
5.94554881734021
×
(
(
(
″
Cu
FILM
THICKNESS
[
λ
]
″
)
-
0.055
)
×
(
(
″
Cu
FILM
THICKNESS
[
λ
]
″
)
-
0.055
)
-
0.000824999999999999
)
.
FORMULA
2
13 . The acoustic wave device according to claim 2 , wherein
the IDT electrode includes a Pt layer stacked on the piezoelectric layer and an Al layer stacked on the Pt layer; and
when an optimum duty ratio is a duty ratio in the first edge region and the second edge region at which an acoustic velocity in the first edge region and the second edge region is lowest, an LT film thickness is a film thickness of the piezoelectric layer, and a Pt film thickness and an Al film thickness are respectively a film thickness of the Pt layer and a film thickness of the Al layer in the first electrode fingers and the second electrode fingers of the IDT electrode, the LT film thickness, the Pt film thickness, and the Al film thickness are in ranges where the optimum duty ratio is from 0.62 to 0.73 in Formula 3 below:
OPTIMUM
DUTY
RATIO
=
0.706311420324445
+
0.0515443705199995
×
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.3
)
+
0.340692430577689
×
(
(
″
Al
FILM
THICKNESS
[
λ
]
″
)
-
0.0750000000000001
)
+
1.92242704222223
×
(
(
″
Pt
FILM
THICKNESS
[
λ
]
″
)
-
0.0125
)
+
(
-
0.1623038581645
)
×
(
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.3
)
×
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.3
)
-
0.0166666666666667
)
+
0.0686507973333415
×
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.3
)
×
(
(
″
Al
FILM
THICKNESS
[
λ
]
″
)
-
0.0750000000000001
)
+
5.08720585142787
×
(
(
(
″
Al
FILM
THICKNESS
[
λ
]
″
)
-
0.0750000000000001
)
×
(
(
″
Al
FILM
THICKNESS
[
λ
]
″
)
-
0.0750000000000001
)
-
0.0003125
)
+
0.292474862666682
×
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.3
)
×
(
(
″
Pt
FILM
THICKNESS
[
λ
]
″
)
-
0.0125
)
+
(
-
22.1884852444445
)
×
(
(
″
Al
FILM
THICKNESS
[
λ
]
″
)
-
0.0750000000000001
)
×
(
(
″
Pt
FILM
THICKNESS
[
λ
]
″
)
-
0.0125
)
+
-
63.3669675555578
×
(
(
(
″
Pt
FILM
THICKNESS
[
λ
]
″
)
-
0.0125
)
×
(
(
″
Pt
FILM
THICKNESS
[
λ
]
″
)
-
0.0125
)
-
0.00005
)
.
FORMULA
3
14 . The acoustic wave device according to claim 2 , wherein
the IDT electrode includes a W layer stacked on the piezoelectric layer and an Al layer stacked on the W layer; and
when an optimum duty ratio is a duty ratio in the first edge region and the second edge region at which an acoustic velocity in the first edge region and the second edge region is lowest, an LT film thickness is a film thickness of the piezoelectric layer, and a W film thickness and an Al film thickness are respectively a film thickness of the W layer and a film thickness of the Al layer in the first electrode fingers and the second electrode fingers of the IDT electrode, the LT film thickness, the W film thickness, and the Al film thickness are in ranges where the optimum duty ratio is from 0.62 to 0.73 in Formula 4 below:
OPTIMUM
DUTY
RATIO
=
0.670366655408889
+
0.0569799749733328
×
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.3
)
+
0.601791697955469
×
(
(
″
Al
FILM
THICKNESS
[
λ
]
″
)
-
0.0750000000000001
)
+
0.0898163408888796
×
(
(
″
W
FILM
THICKNESS
[
λ
]
″
)
-
0.0125
)
+
(
-
0.186654102147184
)
×
(
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.3
)
×
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.3
)
-
0.0166666666666666667
)
+
0.00960756266667166
×
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.3
)
×
(
(
″
Al
FILM
THICKNESS
[
λ
]
″
)
-
0.0750000000000001
)
+
4.24356009650733
×
(
(
(
″
Al
FILM
THICKNESS
[
λ
]
″
)
-
0.0750000000000001
)
×
(
(
″
Al
FILM
THICKNESS
[
λ
]
″
)
-
0.0750000000000001
)
-
0.0003125
)
+
0.54235624266667
×
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.3
)
×
(
(
″
W
FILM
THICKNESS
[
λ
]
″
)
-
0.0125
)
+
(
-
19.6658167822222
)
×
(
(
″
Al
FILM
THICKNESS
[
λ
]
″
)
-
0.0750000000000001
)
×
(
(
″
W
FILM
THICKNESS
[
λ
]
″
)
-
0.0125
)
+
15.4875977777752
×
(
(
(
″
W
FILM
THICKNESS
[
λ
]
″
)
-
0.0125
)
×
(
(
″
W
FILM
THICKNESS
[
λ
]
″
)
-
0.0125
)
-
0.00005
)
.
FORMULA
4
15 . The acoustic wave device according to claim 2 , wherein
the IDT electrode includes a Mo layer stacked on the piezoelectric layer and an Al layer stacked on the Mo layer; and
when an optimum duty ratio is a duty ratio in the first edge region and the second edge region at which an acoustic velocity in the first edge region and the second edge region is lowest, an LT film thickness is a film thickness of the piezoelectric layer, and a Mo film thickness and an Al film thickness are respectively a film thickness of the Mo layer and a film thickness of the Al layer in the first electrode fingers and the second electrode fingers of the IDT electrode, the LT film thickness, the Mo film thickness, and the Al film thickness are in ranges so that the optimum duty ratio is from 0.62 to 0.73 in Formula 5 below:
OPTIMUM
DUTY
RATIO
=
0.650578355337778
+
0.0565759044933328
×
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.3
)
+
0.896476823999908
×
(
(
″
Al
FILM
THICKNESS
[
λ
]
″
)
-
0.0750000000000001
)
+
(
-
0.835424887999999
)
×
(
(
″
Mo
FILM
THICKNESS
[
λ
]
″
)
-
0.0125
)
+
(
-
0.182142102839825
)
×
(
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.3
)
×
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.3
)
-
0.0166666666666666667
)
+
(
-
0.0337296554666596
)
×
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.3
)
×
(
(
″
Al
FILM
THICKNESS
[
λ
]
″
)
-
0.0750000000000001
)
+
3.10610546793597
×
(
(
(
″
Al
FILM
THICKNESS
[
λ
]
″
)
-
0.0750000000000001
)
×
(
(
″
Al
FILM
THICKNESS
[
λ
]
″
)
-
0.0750000000000001
)
-
0.0003125
)
+
0.286014725333341
×
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.3
)
×
(
(
″
Mo
FILM
THICKNESS
[
λ
]
″
)
-
0.0125
)
+
(
-
8.1523516622225
)
×
(
(
″
Al
FILM
THICKNESS
[
λ
]
″
)
-
0.0750000000000001
)
×
(
(
″
Mo
FILM
THICKNESS
[
λ
]
″
)
-
0.0125
)
+
63.3934203174576
×
(
(
(
″
W
FILM
THICKNESS
[
λ
]
″
)
-
0.0125
)
×
(
(
″
Mo
FILM
THICKNESS
[
λ
]
″
)
-
0.0125
)
-
0.00005
)
.
FORMULA
5
16 . The acoustic wave device according to claim 3 , wherein
the IDT electrode includes a main electrode layer;
the main electrode layer is an Al layer or an AlCu layer;
a Cu content percentage of the main electrode layer is less than or equal to 2 wt %; and
when an optimum duty ratio is a duty ratio in the first edge region and the second edge region at which an acoustic velocity in the first edge region and the second edge region is lowest, an LT film thickness is a film thickness of the piezoelectric layer, and an electrode film thickness is a film thickness of the main electrode layer in the first electrode fingers and the second electrode fingers of the IDT electrode, the LT film thickness and the electrode film thickness are within ranges where the optimum duty ratio is from 0.62 to 0.73 in Formula 1 below:
OPTIMUM
DUTY
RATIO
=
0.66831566544375
+
0.821829726029454
×
(
(
″
ELECTRODE
FILM
THICKNESS
[
λ
]
″
)
-
0.0625000000000001
)
+
0.0377723825227273
×
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.275
)
+
5.41169053151292
×
(
(
(
″
ELECTRODE
FILM
THICKNESS
[
λ
]
″
)
-
0.0625000000000001
)
×
(
(
″
ELECTRODE
FILM
THICKNESS
[
λ
]
″
)
-
0.0625000000000001
)
-
0.00053125
)
+
(
-
0.325118002174692
)
×
(
(
(
″
ELECTRODE
FILM
THICKNESS
[
λ
]
″
)
-
0.0625000000000001
)
×
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.275
)
)
+
(
-
0.0722908233901528
)
×
(
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.275
)
)
×
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.275
)
-
0.020625
)
.
FORMULA
1
17 . The acoustic wave device according to claim 3 , wherein the IDT electrode includes a Cu layer; and
when an optimum duty ratio is a duty ratio in the first edge region and the second edge region at which an acoustic velocity in the first edge region and the second edge region is lowest, an LT film thickness is a film thickness of the piezoelectric layer, and a Cu film thickness is a film thickness of the Cu layer in the first electrode fingers and the second electrode fingers of the IDT electrode, the LT film thickness and the Cu film thickness are within ranges where the optimum duty ratio is from 0.62 to 0.73 in Formula 2 below:
OPTIMUM
DUTY
RATIO
=
0.722361035255556
+
0.0561123231333331
×
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.3
)
+
0.450142117104374
×
(
(
″
Cu
FILM
THICKNESS
[
λ
]
″
)
-
0.055
)
+
(
-
0.189939099134199
)
×
(
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.3
)
×
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.3
)
-
0.0166666666666667
)
+
0.0947647208080766
×
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.3
)
×
(
(
″
Cu
FILM
THICKNESS
[
λ
]
″
)
-
0.055
)
+
5.94554881734021
×
(
(
(
″
Cu
FILM
THICKNESS
[
λ
]
″
)
-
0.055
)
×
(
(
″
Cu
FILM
THICKNESS
[
λ
]
″
)
-
0.055
)
-
0.000824999999999999
)
.
FORMULA
2
18 . The acoustic wave device according to claim 3 , wherein
the IDT electrode includes a Pt layer stacked on the piezoelectric layer and an Al layer stacked on the Pt layer; and
when an optimum duty ratio is a duty ratio in the first edge region and the second edge region at which an acoustic velocity in the first edge region and the second edge region is lowest, an LT film thickness is a film thickness of the piezoelectric layer, and a Pt film thickness and an Al film thickness are respectively a film thickness of the Pt layer and a film thickness of the Al layer in the first electrode fingers and the second electrode fingers of the IDT electrode, the LT film thickness, the Pt film thickness, and the Al film thickness are in ranges where the optimum duty ratio is from 0.62 to 0.73 in Formula 3 below:
OPTIMUM
DUTY
RATIO
=
0.706311420324445
+
0.0515443705199995
×
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.3
)
+
0.340692430577689
×
(
(
″
Al
FILM
THICKNESS
[
λ
]
″
)
-
0.0750000000000001
)
+
1.92242704222223
×
(
(
″
Pt
FILM
THICKNESS
[
λ
]
″
)
-
0.0125
)
+
(
-
0.1623038581645
)
×
(
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.3
)
×
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.3
)
-
0.0166666666666667
)
+
0.0686507973333415
×
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.3
)
×
(
(
″
Al
FILM
THICKNESS
[
λ
]
″
)
-
0.0750000000000001
)
+
5.08720585142787
×
(
(
(
″
Al
FILM
THICKNESS
[
λ
]
″
)
-
0.0750000000000001
)
×
(
(
″
Al
FILM
THICKNESS
[
λ
]
″
)
-
0.0750000000000001
)
-
0.0003125
)
+
0.292474862666682
×
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.3
)
×
(
(
″
Pt
FILM
THICKNESS
[
λ
]
″
)
-
0.0125
)
+
(
-
22.1884852444445
)
×
(
(
″
Al
FILM
THICKNESS
[
λ
]
″
)
-
0.0750000000000001
)
×
(
(
″
Pt
FILM
THICKNESS
[
λ
]
″
)
-
0.0125
)
+
-
63.3669675555578
×
(
(
(
″
Pt
FILM
THICKNESS
[
λ
]
″
)
-
0.0125
)
×
(
(
″
Pt
FILM
THICKNESS
[
λ
]
″
)
-
0.0125
)
-
0.00005
)
.
FORMULA
3
19 . The acoustic wave device according to claim 3 , wherein
the IDT electrode includes a W layer stacked on the piezoelectric layer and an Al layer stacked on the W layer; and
when an optimum duty ratio is a duty ratio in the first edge region and the second edge region at which an acoustic velocity in the first edge region and the second edge region is lowest, an LT film thickness is a film thickness of the piezoelectric layer, and a W film thickness and an Al film thickness are respectively a film thickness of the W layer and a film thickness of the Al layer in the first electrode fingers and the second electrode fingers of the IDT electrode, the LT film thickness, the W film thickness, and the Al film thickness are in ranges where the optimum duty ratio is from 0.62 to 0.73 in Formula 4 below:
OPTIMUM
DUTY
RATIO
=
0.670366655408889
+
0.0569799749733328
×
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.3
)
+
0.601791697955469
×
(
(
″
Al
FILM
THICKNESS
[
λ
]
″
)
-
0.0750000000000001
)
+
0.0898163408888796
×
(
(
″
W
FILM
THICKNESS
[
λ
]
″
)
-
0.0125
)
+
(
-
0.186654102147184
)
×
(
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.3
)
×
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.3
)
-
0.0166666666666666667
)
+
0.00960756266667166
×
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.3
)
×
(
(
″
Al
FILM
THICKNESS
[
λ
]
″
)
-
0.0750000000000001
)
+
4.24356009650733
×
(
(
(
″
Al
FILM
THICKNESS
[
λ
]
″
)
-
0.0750000000000001
)
×
(
(
″
Al
FILM
THICKNESS
[
λ
]
″
)
-
0.0750000000000001
)
-
0.0003125
)
+
0.54235624266667
×
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.3
)
×
(
(
″
W
FILM
THICKNESS
[
λ
]
″
)
-
0.0125
)
+
(
-
19.6658167822222
)
×
(
(
″
Al
FILM
THICKNESS
[
λ
]
″
)
-
0.0750000000000001
)
×
(
(
″
W
FILM
THICKNESS
[
λ
]
″
)
-
0.0125
)
+
15.4875977777752
×
(
(
(
″
W
FILM
THICKNESS
[
λ
]
″
)
-
0.0125
)
×
(
(
″
W
FILM
THICKNESS
[
λ
]
″
)
-
0.0125
)
-
0.00005
)
.
FORMULA
4
20 . The acoustic wave device according to claim 3 , wherein
the IDT electrode includes a Mo layer stacked on the piezoelectric layer and an Al layer stacked on the Mo layer; and
when an optimum duty ratio is a duty ratio in the first edge region and the second edge region at which an acoustic velocity in the first edge region and the second edge region is lowest, an LT film thickness is a film thickness of the piezoelectric layer, and a Mo film thickness and an Al film thickness are respectively a film thickness of the Mo layer and a film thickness of the Al layer in the first electrode fingers and the second electrode fingers of the IDT electrode, the LT film thickness, the Mo film thickness, and the Al film thickness are in ranges so that the optimum duty ratio is from 0.62 to 0.73 in Formula 5 below:
OPTIMUM
DUTY
RATIO
=
0.650578355337778
+
0.0565759044933328
×
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.3
)
+
0.896476823999908
×
(
(
″
Al
FILM
THICKNESS
[
λ
]
″
)
-
0.0750000000000001
)
+
(
-
0.835424887999999
)
×
(
(
″
Mo
FILM
THICKNESS
[
λ
]
″
)
-
0.0125
)
+
(
-
0.182142102839825
)
×
(
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.3
)
×
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.3
)
-
0.0166666666666666667
)
+
(
-
0.0337296554666596
)
×
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.3
)
×
(
(
″
Al
FILM
THICKNESS
[
λ
]
″
)
-
0.0750000000000001
)
+
3.10610546793597
×
(
(
(
″
Al
FILM
THICKNESS
[
λ
]
″
)
-
0.0750000000000001
)
×
(
(
″
Al
FILM
THICKNESS
[
λ
]
″
)
-
0.0750000000000001
)
-
0.0003125
)
+
0.286014725333341
×
(
(
″
LT
FILM
THICKNESS
[
λ
]
″
)
-
0.3
)
×
(
(
″
Mo
FILM
THICKNESS
[
λ
]
″
)
-
0.0125
)
+
(
-
8.1523516622225
)
×
(
(
″
Al
FILM
THICKNESS
[
λ
]
″
)
-
0.0750000000000001
)
×
(
(
″
Mo
FILM
THICKNESS
[
λ
]
″
)
-
0.0125
)
+
63.3934203174576
×
(
(
(
″
W
FILM
THICKNESS
[
λ
]
″
)
-
0.0125
)
×
(
(
″
Mo
FILM
THICKNESS
[
λ
]
″
)
-
0.0125
)
-
0.00005
)
.
FORMULA
5