Microelectronic devices including staircase structures, and related memory devices
A method of forming a microelectronic device comprises forming isolated nitride structures on steps of stair step structures comprising stacked tiers comprising alternating levels of a first insulative material and a second insulative material, forming a photoresist material over some of the stair step structures, and replacing the isolated nitride structures and the second insulative material with an electrically conductive material to respectively form conductive pad structures and electrically conductive lines. Related microelectronic devices and electronic devices are also disclosed.
1 . A microelectronic device, comprising:
a stack structure including tiers respectively comprising conductive material and insulative material vertically neighboring the conductive material;
a staircase structure having steps comprising edges of a group of the tiers of the stack structure;
conductive pad structures, the steps of the staircase structure respectively having one of the conductive pad structures thereon; and
an additional staircase structure vertically offset from the staircase structure and having additional steps comprising edges of an additional group of the tiers of the stack structure, the additional steps free of any of the conductive pad structures thereon.
2 . The microelectronic device of claim 1 , further comprising:
conductive contact structures vertically extending to and terminating at upper surfaces of the conductive pad structures; and
additional conductive contact structures vertically extending to and terminating at upper surfaces of the conductive material of some other of the tiers partially defining the additional steps of the additional staircase structure.
3 . The microelectronic device of claim 1 , wherein the conductive pad structures and the conductive material of the tiers of the stack structure have substantially the same material composition as one another.
4 . The microelectronic device of claim 1 , wherein the conductive pad structures are integral and continuous with the conductive material of the group of the tiers partially defining the steps of the staircase structure.
5 . The microelectronic device of claim 1 , further comprising a further staircase structure vertically interposed between the staircase structure and the additional staircase structure and having further steps comprising edges of a further group of the tiers of the stack structure, the further steps respectively having a further one of the conductive pad structures thereon.
6 . The microelectronic device of claim 1 , wherein the additional staircase structure vertically underlies the staircase structure.
7 . The microelectronic device of claim 6 , wherein the staircase structure is a vertically uppermost staircase structure within the stack structure.
8 . The microelectronic device of claim 7 , wherein the additional staircase structure is a vertically lowermost staircase structure within the stack structure.
9 . A memory device, comprising:
blocks horizontally separated from one another in a first direction by insulative slot structures and respectively including a vertically alternating sequence of conductive structures and insulative structures arranged in tiers, one of the blocks comprising:
a stadium structure including opposing staircase structures individually having steps comprising horizontal ends of some of the tiers; and
an additional stadium structure horizontally offset from the stadium structure in a second direction orthogonal to the first direction and including additional opposing staircase structures individually having additional steps comprising horizontal ends of some other of the tiers;
conductive pads on the steps of the opposing staircase structures of the stadium structure of the one of the blocks and absent from the additional steps of the additional opposing staircase structures of the additional stadium structure of the one of the blocks;
conductive contacts on upper surfaces of the conductive pads;
additional conductive contacts on upper surfaces of the conductive structures of the some other of the tiers at the additional steps of the additional opposing staircase structures of the additional stadium structure of the one of the blocks; and
strings of memory cells vertically extending through a portion of the one of the blocks horizontally neighboring the stadium structure in the second direction.
10 . The memory device of claim 9 , wherein:
at least some of the conductive structures of the some of the tiers of the one of the blocks comprise drain side select gates; and
at least some of the conductive structures of the some other of the tiers of the one of the blocks comprise source side select gates.
11 . The memory device of claim 9 , further comprising dielectric material within trenches defined by the stadium structure and the additional stadium structure of the one of the blocks, the dielectric material comprising:
a portion physically contacting the conductive contacts, the conductive pads, and portions of the steps of the stadium structure horizontally neighboring the conductive pads in the second direction; and
an additional portion physically contacting the additional conductive contacts and the additional steps of the additional stadium structure.
12 . The memory device of claim 9 , wherein the conductive pads are integral and continuous with the conductive structures of the some of the tiers of the one of the blocks.
13 . The memory device of claim 9 , wherein each of the opposing staircase structures of the stadium structure of the one of the blocks is located at a first vertical position within the one of the blocks.
14 . The memory device of claim 13 , wherein each of the additional opposing staircase structures of the additional stadium structure of the one of the blocks is located at a second vertical position within the one of the blocks, the second vertical position relatively lower than the first vertical position.
15 . The memory device of claim 13 , wherein:
one of the additional opposing staircase structures of the additional stadium structure of the one of the blocks is located at a second vertical position within the one of the blocks, the second vertical position relatively lower than the first vertical position; and
another one of the additional opposing staircase structures of the additional stadium structure of the one of the blocks is located at a third vertical position within the one of the blocks, the third vertical position relatively lower than the second vertical position.
16 . A 3D NAND Flash memory device, comprising:
a stack structure including tiers respectively comprising conductive material and insulative material vertically neighboring the conductive material, the stack structure comprising:
a memory array region; and
a stair step region horizontally neighboring the memory array region and comprising:
an upper select gate stadium structure comprising staircase structures respectively having steps comprising edges of an upper group of the tiers; and
a lower select gate stadium structure comprising additional staircase structures respectively having additional steps comprising edges of a lower group of the tiers;
conductive pad structures within the stair step region of the stack structure,
at least some of the conductive pad structures on the steps of the staircase structures of the upper select gate stadium structure, and
the additional steps of the additional staircase structures of the lower select gate stadium structure free of any of the conductive pad structures thereon; and
vertical strings of memory cells within the memory array region of the stack structure.
17 . The 3D NAND Hash memory device of claim 16 , further comprising conductive contacts within the stair step region of the stack structure and comprising:
first conductive contacts within a horizontal area of the upper select gate stadium structure and individually landing on respective ones of the conductive pad structures; and
second conductive contacts within a horizontal area of the lower select gate stadium structure and individually landing on the conductive material of respective ones of the tiers of the lower group of the tiers.
18 . The 3D NAND Hash memory device of claim 16 , wherein the stair step region of the stack structure further comprises an access line stadium structure horizontally and vertically interposed between the upper select gate stadium structure and the lower select gate stadium structure, the access line stadium structure comprising further staircase structures respectively having further steps comprising edges of a further group of the tiers.
19 . The 3D NAND Hash memory device of claim 18 , wherein at least some other of the conductive pad structures are on the further steps of the further staircase structures of the access line stadium structure.
20 . The 3D NAND Hash memory device of claim 18 , wherein the further steps of the further staircase structures of the access line stadium structure are free of any of the conductive pad structures thereon.