Integrated circuit device
An integrated circuit device may include a transistor on a substrate and a capacitor structure electrically connected to the transistor. The capacitor structure may include a first electrode, a dielectric layer structure on the first electrode, and a second electrode on the dielectric layer structure. The dielectric layer structure may include a plurality of first dielectric layers and a plurality of second dielectric layers that are alternately stacked. The plurality of first dielectric layers may include a ferroelectric material, and the plurality of second dielectric layers may include an anti-ferroelectric material. The distribution proportion of internal defect dipoles gradually may vary in a thickness direction of the dielectric layer structure.
1 . An integrated circuit device comprising:
a transistor on a substrate; and
a capacitor structure electrically connected to the transistor, wherein
the capacitor structure includes a first electrode, a dielectric layer structure on the first electrode, and a second electrode on the dielectric layer structure,
the dielectric layer structure includes a plurality of first dielectric layers and a plurality of second dielectric layers that are alternately stacked,
the plurality of first dielectric layers include a ferroelectric material,
the plurality of second dielectric layers include an anti-ferroelectric material, and
a distribution proportion of internal defect dipoles gradually varies in a thickness direction of the dielectric layer structure.
2 . The integrated circuit device of claim 1 , wherein
a first fraction corresponds to a fraction of the plurality of first dielectric layers in the dielectric layer structure, based on a total amount of the dielectric layer structure,
a second fraction corresponds to a fraction of the plurality of second dielectric layers in the dielectric layer structure, based on the total amount of the dielectric layer structure, and
the first fraction is greater than the second fraction such that a content of the plurality of first dielectric layers is greater than a content of the plurality of second dielectric layers in the dielectric layer structure.
3 . The integrated circuit device of claim 1 , wherein
the internal defect dipoles are present inside the plurality of first dielectric layers and the plurality of second dielectric layers.
4 . The integrated circuit device of claim 3 , wherein
the internal defect dipoles, which are present inside the plurality of first dielectric layers and the plurality of second dielectric layers, are derived from residual impurities that are not removed according to a differential distribution of oxygen content during a process of forming the dielectric layer structure.
5 . The integrated circuit device of claim 4 , wherein the residual impurities comprise carbon (C) atoms or a hydrocarbon (C x H y )-based material.
6 . The integrated circuit device of claim 1 , wherein the internal defect dipoles are present in interfaces between the plurality of first dielectric layers and the plurality of second dielectric layers.
7 . The integrated circuit device of claim 6 , wherein
the internal defect dipoles present in the interfaces are derived from residual impurities that are supplied from a metal oxide during a heat treatment in a process of forming the metal oxide in the interfaces between the plurality of first dielectric layers and the plurality of second dielectric layers.
8 . The integrated circuit device of claim 7 , wherein the residual impurities comprise metal atoms.
9 . The integrated circuit device of claim 1 , wherein
each of the plurality of first dielectric layers has a first thickness in a vertical direction perpendicular to an upper surface of the first electrode,
the first thickness ranges from about 5 Å to about 20 Å,
each of the plurality of second dielectric layers has a second thickness in the vertical direction,
the second thickness ranges from about 5 Å to about 20 Å,
the dielectric layer structure has a third thickness in the vertical direction, and
the third thickness ranges from about 15 Å to about 60 Å.
10 . The integrated circuit device of claim 1 , wherein
a dielectric characteristic curve of the dielectric layer structure has a stepwise step-to-step polarization variation state with respect to an electric field.
11 . An integrated circuit device comprising:
a transistor on a substrate; and
a capacitor structure electrically connected to the transistor, wherein
the capacitor structure includes a first electrode, a dielectric layer structure on the first electrode, and a second electrode on the dielectric layer structure,
the dielectric layer structure includes a single ferroelectric material, and
a distribution proportion of internal defect dipoles gradually varies in a thickness direction of the dielectric layer structure.
12 . The integrated circuit device of claim 11 , wherein
the internal defect dipoles are derived from residual impurities present inside the dielectric layer structure, and
the residual impurities comprise carbon (C) atoms or a hydrocarbon (C x H y )-based material.
13 . The integrated circuit device of claim 12 , wherein
a content of the residual impurities ranges from about 1% to less than about 10% based on a total mass of the dielectric layer structure, and
the content of the residual impurities increases in the thickness direction of the dielectric layer structure.
14 . The integrated circuit device of claim 11 , wherein
the internal defect dipoles are present inside the dielectric layer structure, and
the internal defect dipoles present inside are derived from residual impurities that are not removed according to a differential distribution of oxygen content during a process of forming the dielectric layer structure.
15 . The integrated circuit device of claim 11 , wherein a dielectric characteristic curve of the single ferroelectric material of the dielectric layer structure has a stepwise step-to-step polarization variation state with respect to an electric field.
16 . An integrated circuit device comprises:
a transistor on a substrate; and
a capacitor structure electrically connected to the transistor, wherein
the capacitor structure includes a first electrode, a dielectric layer structure on the first electrode, and a second electrode on the dielectric layer structure,
the dielectric layer structure includes a plurality of first dielectric layers and a plurality of second dielectric layers that are alternately stacked,
the plurality of first dielectric layers include a ferroelectric material,
the plurality of second dielectric layers include an anti-ferroelectric material,
the dielectric layer structure includes a lower stack structure and an upper stack structure having different arrangements,
the lower stack structure and the upper stack structure are defined based on a center of the dielectric layer structure in a vertical direction such that the lower stack structure is under the center of the dielectric layer structure and the upper stack structure is over the center of the dielectric layer structure, and
a distribution proportion of internal defect dipoles gradually varies in the vertical direction of the dielectric layer structure.
17 . The integrated circuit device of claim 16 , wherein
a first fraction corresponds to a fraction of the plurality of first dielectric layers in the dielectric layer structure, based on a total amount of the dielectric layer structure,
a second fraction corresponds to a fraction of the plurality of second dielectric layers in the dielectric layer structure, based on the total amount of the dielectric layer structure, and
the first fraction is greater than the second fraction.
18 . The integrated circuit device of claim 16 , wherein
the internal defect dipoles are derived from residual impurities,
the residual impurities comprise carbon (C) atoms or a hydrocarbon (C x H y )-based material,
the residual impurities are present inside the plurality of first dielectric layers and the plurality of second dielectric layers, and
the internal defect dipoles present inside are derived from residual impurities that are not removed according to a differential distribution of oxygen content during a process of forming the dielectric layer structure.
19 . The integrated circuit device of claim 16 , wherein
the internal defect dipoles are derived from residual impurities,
the internal defect dipoles comprise metal atoms,
the internal defect dipoles are present in interfaces between the plurality of first dielectric layers and the plurality of second dielectric layers, and
the internal defect dipoles present in the interfaces are derived from residual impurities that are supplied from a metal oxide during a heat treatment in a process of forming the metal oxide in the interfaces.
20 . The integrated circuit device of claim 16 , wherein a dielectric characteristic curve of the dielectric layer structure has a stepwise step-to-step polarization variation state with respect to an electric field.