Semiconductor device
Provided a semiconductor device includes at least: a crystalline oxide semiconductor layer including a channel layer, a drift layer, and a source region; a gate electrode arranged over the channel layer across a gate insulating film; a current blocking region arranged between the channel layer and the drift layer; and a source electrode provided on the source region. The current blocking region is composed of a high-resistance layer. The source electrode forms a contact with the current blocking region.
1 . A semiconductor device comprising at least: a crystalline oxide semiconductor layer including a channel layer, a drift layer, and a source region; a gate electrode arranged over the channel layer across a gate insulating film; a current blocking region arranged between the channel layer and the drift layer; and a source electrode provided on the source region,
the current blocking region being composed of a high-resistance layer, the source electrode being in direct contact with the current blocking region.
2 . The semiconductor device according to claim 1 , wherein
the crystalline oxide semiconductor layer contains at least one type of metal selected from aluminum, indium, and gallium.
3 . The semiconductor device according to claim 1 , wherein
the crystalline oxide semiconductor layer has a corundum structure.
4 . The semiconductor device according to claim 1 , wherein
the current blocking region contains a dopant.
5 . The semiconductor device according to claim 4 , wherein
the dopant in the current blocking region has a concentration equal to or greater than 1.0××10 17 /cm 3 .
6 . The semiconductor device according to claim 1 , wherein
the current blocking region is an ion-implanted region.
7 . The semiconductor device according to claim 1 , wherein
electron trap density in the current blocking region is equal to or greater than 4.0×10 18 /cm 3 .
8 . The semiconductor device according to claim 1 , wherein
the semiconductor device is a transistor.
9 . A power converter that uses the semiconductor device according to claim 1 .
10 . A control system that uses the semiconductor device according to claim 1 .