IP Library › Granted Patent US 12690377
Granted Patent B2
US 12690377 · App. 18/347,809 · Granted Jul 21, 2026

Mask for deposition

Inventor: Minji Jang (Yongin-si, KR)
Assignee: SAMSUNG DISPLAY CO., LTD.
H10K71/166C23C14/042H10K59/70H10K71/20
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Quick Facts
Patent No.
US 12690377
App. No.
18/347,809
Granted
Jul 21, 2026
Kind
B2
Abstract

An embodiment provides a deposition mask including an opening area including an opening; a first dummy opening area disposed at a first side of the opening area in a first direction and having a first dummy opening in the first dummy opening area; and a second dummy opening area disposed at a second side of the opening area in the first direction and having a second dummy opening in the second dummy opening area. A first side and a second side of the opening are asymmetrical with respect to a second direction intersecting the first direction, and the first dummy opening and the second dummy opening are symmetrical with the opening with respect to the second direction.

Claims (44)

1 . A deposition mask comprising:

an opening area including an opening;

a first dummy opening area disposed at a first side of the opening area in a first direction and having a first dummy opening in the first dummy opening area; and

a second dummy opening area disposed at a second side of the opening area in the first direction and having a second dummy opening in the second dummy opening area, wherein

a first side and a second side of the opening are asymmetrical with respect to a second direction intersecting the first direction, and

the first dummy opening and the second dummy opening are symmetrical with the opening with respect to the second direction,

wherein

an extending direction of the opening is inclined by a degrees with respect to the second direction, and

an extending direction of the first dummy opening and the second dummy opening is inclined by −α degrees with respect to the second direction.

2 . The deposition mask of claim 1 , wherein

the first dummy opening area and the second dummy opening area are integral with the opening area.

3 . The deposition mask of claim 1 , wherein

the first dummy opening and the opening are arranged to substantially coincide with each other in plan view in a folded configuration of the first dummy opening area along a boundary line between the opening area and the first dummy opening area.

4 . The deposition mask of claim 1 , wherein

the second dummy opening and the opening are arranged to substantially coincide with each other in plan view in a folded configuration of the second dummy opening area along a boundary line between the opening area and the second dummy opening area.

5 . The deposition mask of claim 1 , wherein

a shape of the first dummy opening is substantially identical a shape of the second dummy opening.

6 . The deposition mask of claim 1 , wherein

the first dummy opening area and the second dummy opening area are positioned and dimensioned to partially offset distortion of the opening area caused by tension applied to the deposition mask from opposite sides in a direction parallel to the second direction.

7 . The deposition mask of claim 1 , wherein

the opening area includes a substantially concave pattern that does not overlap the opening of the opening area in plan view.

8 . The deposition mask of claim 7 , wherein

the substantially concave pattern extends in a direction intersecting an extending direction of the opening of the opening area.

9 . The deposition mask of claim 7 , wherein

the substantially concave pattern has a larger area than an area of the opening of the opening area.

10 . The deposition mask of claim 7 , wherein

the opening area includes a boundary portion that surrounds the substantially concave pattern and is thicker than the substantially concave pattern.

11 . The deposition mask of claim 1 , further comprising:

a blocking mask including an open area which overlaps the open area in plan view,

wherein the first dummy opening area and the second dummy opening area are blocked by the blocking mask.

12 . A deposition mask comprising:

an opening area including a first surface and a second surface facing each other, and including an opening;

a substantially concave pattern disposed on the second surface and extending in a direction intersecting an extending direction of the opening; and

a boundary portion disposed between the opening and the substantially concave pattern on the second surface and the boundary portion being thicker than the substantially concave pattern.

13 . The deposition mask of claim 12 , wherein

the substantially concave pattern extends in a direction intersecting the extending direction of the opening of the opening area.

14 . The deposition mask of claim 12 , wherein

the extending direction of the opening and an extending direction of the substantially concave pattern are substantially symmetrical.

15 . The deposition mask of claim 12 , wherein

the substantially concave pattern has a larger area than an area of the opening of the opening area.

16 . The deposition mask of claim 12 , wherein

the substantially concave pattern is arranged and dimensioned to partially offsets a distortion of the opening area caused by tension applied to the deposition mask from opposite sides.

17 . The deposition mask of claim 12 , wherein

the boundary portion surrounds the substantially concave pattern.