Substrate holder, substrate processing system, and substrate transfer method
A substrate holder includes a main body having a first arm and a second arm whose leading ends are spaced apart from each other and whose base ends are connected to each other; a first holding guide fixed to the leading end of the first arm, and configured to hold a periphery of the substrate; and a second holding guide fixed to the leading end of the second arm, and configured to hold the periphery of the substrate. A length between the first holding guide and the second holding guide is shorter than a diameter of the substrate. In a state that the substrate is located closer to the base ends than a position where the substrate is held by the first holding guide and the second holding guide, the first arm, the second arm, the first holding guide and the second holding guide are located diametrically outside the substrate.
1 . A substrate processing system, comprising:
a vertical holder configured to hold a substrate in a vertical posture;
a horizontal holder configured to hold the substrate in a horizontal posture;
a transfer device configured to transfer the substrate held by the vertical holder to the horizontal holder, and
a control device configured to control the transfer device,
wherein the transfer device comprises a substrate holder configured to hold the substrate, and
the substrate holder comprises:
a main body having a first arm and a second arm whose leading ends are spaced apart from each other and whose base ends are connected to each other;
a first holding guide fixed to the leading end of the first arm, and configured to hold a periphery of the substrate;
a second holding guide fixed to the leading end of the second arm, and configured to hold the periphery of the substrate; and
a clamp member provided at each of the base ends, and configured to be moved between a closing position where the clamp member clamps the periphery of the substrate and an opening position where the clamp member releases clamping of the substrate,
wherein a length between the first holding guide and the second holding guide is shorter than a diameter of the substrate, and
in a state that the substrate is located closer to the base ends than a position where the substrate is held by the first holding guide and the second holding guide, the entire first arm, the entire second arm, the entire first holding guide and the entire second holding guide are all located diametrically outside the substrate on a same plane as the first arm and the second arm,
wherein the control device performs:
receiving the substrate held by the vertical holder with the substrate holder;
changing the substrate from the vertical posture into the horizontal posture with the substrate holder; and
delivering the substrate in the horizontal posture to a delivery table with the substrate holder,
wherein the control device moves the clamp member to the closing position before changing the substrate from the vertical posture into the horizontal posture.
2 . The substrate processing system of claim 1 , further comprising:
a rear surface holding mechanism provided at the base ends,
wherein the rear surface holding mechanism is configured to be moved between a closing position where the rear surface holding mechanism holds the substrate from a rear surface side of the substrate and an opening position diametrically outside the substrate.
3 . The substrate processing system of claim 2 ,
wherein the control device moves the rear surface holding mechanism to the closing position before changing the substrate from the vertical posture into the horizontal posture.
4 . The substrate processing system of claim 1 ,
wherein each of the first holding guide and the second holding guide comprises:
a supporting groove configured to support the periphery of the substrate from both a front surface side and a rear surface side of the substrate; and
a supporting surface provided closer to a center of the substrate than the supporting groove, and configured to support the periphery of the substrate from the rear surface side of the substrate.
5 . The substrate processing system of claim 4 , further comprising:
a pressing member configured to be brought into contact with an end portion of the substrate horizontally held by the substrate holder, and also configured to move the substrate from a position where the substrate is supported by the supporting groove to a position where the substrate is supported by the supporting surface.
6 . The substrate processing system of claim 5 ,
wherein the delivering of the substrate in the horizontal posture to the delivery table with the substrate holder comprises pressing the substrate against the pressing member through a horizontal movement of the substrate holder, thereby moving the substrate from the position where the substrate is held by the supporting groove to the position where the substrate is supported by the supporting surface.
7 . The substrate processing system of claim 5 ,
wherein the substrate includes multiple substrates,
the vertical holder is configured to hold the multiple substrates at a certain distance therebetween, and
the receiving of the substrate held by the vertical holder with the substrate holder comprises:
moving the substrate holder to a same plane as the substrate in a direction perpendicular to a front surface of the substrate; and
moving the substrate holder upwards to allow the substrate to be held by the first holding guide and the second holding guide.
8 . The substrate processing system of claim 5 ,
wherein the substrate includes multiple substrates, and the substrate holder includes multiple substrate holders,
the vertical holder is configured to hold the multiple substrates at a certain distance therebetween,
the transfer device comprises the multiple substrate holders, and
the receiving of the substrate held by the vertical holder with the substrate holder comprises receiving the multiple substrates held by the vertical holder all at once by the multiple substrate holders.
9 . A substrate transfer method in which a transfer device transfers a substrate from a vertical holder configured to hold the substrate in a vertical posture to a horizontal holder configured to hold the substrate in a horizontal posture,
wherein the transfer device comprises a substrate holder configured to hold the substrate, and
the substrate holder comprises:
a main body having a first arm and a second arm whose leading ends are spaced apart from each other and whose base ends are connected to each other;
a first holding guide fixed to the leading end of the first arm, and configured to hold a periphery of the substrate; and
a second holding guide fixed to the leading end of the second arm, and configured to hold the periphery of the substrate; and
a clamp member provided at each of the base ends, and configured to be moved between a closing position where the clamp member clamps the periphery of the substrate and an opening position where the clamp member releases clamping of the substrate,
wherein a length between the first holding guide and the second holding guide is shorter than a diameter of the substrate,
in a state that the substrate is located closer to the base ends than a position where the substrate is held by the first holding guide and the second holding guide, the entire first arm, the entire second arm, the entire first holding guide and the entire second holding guide are all located diametrically outside the substrate on a same plane as the first arm and the second arm, and
the substrate transfer method comprises:
receiving, by the substrate holder, the substrate held by the vertical holder;
changing, by the substrate holder, the substrate from the vertical posture into the horizontal posture; and
delivering, by the substrate holder, the substrate in the horizontal posture to a delivery table,
wherein the clamp member is moved to the closing position before changing the substrate from the vertical posture into the horizontal posture.