Device and method for handling pot-shaped hollow bodies, more particularly transport containers for semiconductor wafers or EUV lithography masks
A device for handling pot-shaped hollow bodies, more particularly transport containers for semiconductor wafers or for EUV lithography masks includes a wall, which encloses an inner space, a gripping and moving apparatus arranged in an inner space for moving the hollow body within the inner space and a wall opening which is formed by the wall, can be closed by a closure body and through which the inner space is accessible. The device includes a lid handling unit which can be detachably connected to the lid. The lid can be connected to the lid handling unit and is separated from the hollow body.
1 . A device for handling a hollow body having a pot-shape comprised of a transport container for semiconductor wafers or for EUV lithography masks, the device comprising:
a wall that surrounds an inner space;
a gripping and moving device arranged in the inner space for moving the hollow body within the inner space; and
a wall opening that is formed by the wall, the wall opening being closable by a closure body, the inner space is accessible through the wall opening, the closure body being movably supported in the device by a fastening unit and having a reception section by which the hollow body is releasably connectable to the closure body, the hollow body includes a first gripping section on a first side wall and a second gripping section on an opposite second side wall, the reception section includes a locking device by which the closure body cooperates with the hollow body using the first gripping section, the gripping and moving device includes a gripping and releasing device by which the gripping and moving device cooperates with the hollow body using the second gripping section.
2 . The device in accordance with claim 1 , wherein the fastening unit is formed as a hinge by which the closure body is rotatably fastened to the wall.
3 . The device in accordance with claim 1 , wherein the closure body is movable between a first position and a second position, with the closure body closing the wall opening in the first position and in the second position.
4 . The device in accordance with claim 1 , further comprising:
a further gripping and moving device for supplying the hollow body to the closure body and for removing the hollow body from the closure body.
5 . The device in accordance with claim 4 , wherein the further gripping and moving device has a further gripping and releasing device by which the further gripping and moving device can cooperate with the hollow body using the second gripping section.
6 . The device in accordance with claim 1 , wherein the hollow body has a base wall, an opening disposed opposite the base wall, a cover by which the opening is closable, a cover handling unit releasably connectable to the cover.
7 . The device in accordance with claim 6 , further comprising:
a handling unit by which the hollow body can be handled, the handling unit having a process space in which the hollow body can be handled, the process space being accessible through a process space opening, the cover handling unit being movably supported by a further fastening device between an open position in which the cover handling unit releases the process space opening and a closure position in which the cover handling unit closes the process space opening.
8 . The device in accordance with claim 7 , wherein the handling unit is formed as a cleaning device for cleaning the hollow body or the cover.
9 . The device in accordance with claim 7 , further comprising:
a second handling unit that is formed as an evacuation device for applying a vacuum in the hollow body or at the cover.
10 . A method of handling the hollow body using the device in accordance with claim 1 , said method comprising the following steps:
moving the closure body between a first position and a second position in which the closure body releases the wall opening;
supplying the hollow body to the reception section by a further gripping and moving device that has a further gripping and releasing device by which the further gripping and moving device is connected to the hollow body using the second gripping section and activating the locking device of the reception section to connect the hollow body to the closure body using the first gripping section;
moving the closure body into a closed position in which the closure body closes the wall opening;
connecting the hollow body to the gripping and moving device using the second gripping section; and
releasing the hollow body from the closure body by deactivating the reception section.
11 . The method in accordance with claim 10 , wherein the hollow body has a base wall, an opening disposed opposite the base wall and a cover by which the opening is closable, the method including the further steps:
supplying the hollow body to a cover handling unit with the gripping and moving device;
connecting the cover to the cover handling unit; and
separating the cover from the hollow body with the cover handling unit or the gripping and moving device.
12 . The method in accordance with claim 11 , further comprising:
a handling unit by which the hollow body can be handled, the handling unit cooperating with the cover handling unit, wherein the handling unit has a process space in which the hollow body can be handled, the process space being accessible through a process space opening, the method including the further steps:
moving the cover handling unit into an open position in which the cover handling unit releases the process space opening;
connecting the cover to the cover handling unit and separating the cover from the hollow body with the cover handling unit or the gripping and moving device; and
moving the cover handling unit into the closed position in which the cover handling unit closes the process space opening.