Wafer placement table
A wafer placement table includes a ceramic plate having a wafer placement surface on its top surface and incorporating an electrode; an electrically conductive plate joined to a bottom surface of the ceramic plate; a ceramic plate penetrating part extending through the ceramic plate; an electrically insulating gas passage plug provided in the ceramic plate penetrating part and that allows gas to pass inside; a gas introduction passage provided at least inside the electrically conductive plate and communicating with the ceramic plate penetrating part; and an electrically conductive gas passage part provided in the gas introduction passage, being in contact with a bottom surface of the electrically insulating gas passage plug, being electrically continuous with the electrically conductive plate, and that allows gas to pass inside.
1 . A wafer placement table comprising:
a ceramic plate having a wafer placement surface on its top surface and incorporating an electrode;
an electrically conductive plate joined to a bottom surface of the ceramic plate;
a ceramic plate penetrating part extending through the ceramic plate;
an electrically insulating gas passage plug provided at the ceramic plate penetrating part, gas being allowed to pass through an inside of the electrically insulating gas passage plug;
a gas introduction passage provided at least inside the electrically conductive plate, the gas introduction passage communicating with the ceramic plate penetrating part; and
an electrically conductive gas passage part provided in the gas introduction passage, the electrically conductive gas passage part being in contact with a bottom surface of the electrically insulating gas passage plug, the electrically conductive gas passage part being electrically continuous with the electrically conductive plate, the electrically conductive gas passage part allowing gas to pass inside.
2 . The wafer placement table according to claim 1 , wherein
the electrically conductive gas passage part is provided separately from the electrically conductive plate.
3 . The wafer placement table according to claim 2 , wherein
the electrically conductive gas passage part has a stretch member, and the stretch member is pressed against the bottom surface of the electrically insulating gas passage plug to be compressed.
4 . The wafer placement table according to claim 2 , wherein
the electrically conductive gas passage part has at least one of an electrically conductive mesh or a clump body of electrically conductive fiber.
5 . The wafer placement table according to claim 2 , wherein
the electrically conductive gas passage part has a structure in which one or more electrically conductive meshes and one or more electrically conductive sheets having a hole that allows gas to pass in an up and down direction are laminated, and
a diameter of the hole is greater than or equal to 0.1 mm and less than or equal to 1 mm.
6 . The wafer placement table according to claim 1 , wherein
the electrically conductive gas passage part has an electrically conductive bulk body having a hole through which gas is allowed to pass in an up and down direction, and
a diameter of the hole is greater than or equal to 0.1 mm and less than or equal to 1 mm.
7 . The wafer placement table according to claim 1 , wherein
the electrically conductive gas passage part has an electrically conductive porous body.
8 . The wafer placement table according to claim 1 , wherein
the electrically conductive gas passage part is disposed so as to overlap an entire bottom surface of the electrically insulating gas passage plug when imaginarily seen through from above.
9 . The wafer placement table according to claim 1 , wherein
the electrically insulating gas passage plug is a porous body.
10 . The wafer placement table according to claim 1 , wherein
the electrically conductive gas passage part has a coating layer that coats the bottom surface of the electrically insulating gas passage plug.
11 . The wafer placement table according to claim 1 , wherein
the electrically conductive gas passage part has a coating layer that coats the bottom surface of the electrically insulating gas passage plug and an elastic body that presses the coating layer upward with an elastic force.