Three-dimensional integrated circuit with hybrid bond metal structure
One aspect of the present disclosure pertains to an IC packaging structure that includes a bottom circuit structure having first semiconductor devices on a first substrate, a first interconnect structure over the first semiconductor devices, and a first bonding structure over the first interconnect structure; and a top circuit structure having second semiconductor devices on a second substrate, a second interconnect structure underlying the second semiconductor devices, and a second bonding structure underlying the second interconnect structure. The first bonding structure includes a first metal feature having a first crystalline bulk layer of a metal and a first amorphous surface layer of the metal. The second bonding structure includes a second metal feature having a second crystalline bulk layer of the metal and a second amorphous surface layer of the metal. The top circuit structure is bonded to the bottom circuit structure through the first and second amorphous surface layers.
1 . An integrated circuit (IC) packaging structure, comprising:
a bottom circuit structure having first semiconductor devices on a first substrate, a first interconnect structure over the first semiconductor devices, and a first bonding structure over the first interconnect structure; and
a top circuit structure having second semiconductor devices on a second substrate, a second interconnect structure underlying the second semiconductor devices, and a second bonding structure underlying the second interconnect structure, wherein
the first bonding structure includes a first metal feature having a first crystalline bulk layer of a metal and a first amorphous surface layer of the metal,
the second bonding structure includes a second metal feature having a second crystalline bulk layer of the metal and a second amorphous surface layer of the metal, and
the top circuit structure is bonded to the bottom circuit structure through the first and second amorphous surface layers.
2 . The IC packaging structure of claim 1 , wherein each of the first and second crystalline bulk layers includes a (111) plane in parallel with a bonding interface between the first and second amorphous surface layers.
3 . The IC packaging structure of claim 2 , wherein the metal is copper.
4 . The IC packaging structure of claim 1 , wherein the first metal feature of the first bonding structure further includes a third amorphous surface layer of the metal configured such that the first crystalline bulk layer is sandwiched between the first and third amorphous surface layers.
5 . The IC packaging structure of claim 4 , wherein the second metal feature of the second bonding structure further includes a fourth amorphous surface layer of the metal configured such that the second crystalline bulk layer is sandwiched between the second and fourth amorphous surface layers.
6 . The IC packaging structure of claim 5 , wherein
the first bonding structure further includes a first metal via of the metal contacting the first metal feature;
the first metal via includes a third crystalline bulk layer of the metal and a fifth amorphous surface layer of the metal disposed on the third crystalline bulk layer; and
the fifth amorphous surface layer directly contacts the third amorphous surface layer.
7 . The IC packaging structure of claim 6 , wherein the first metal via further includes a sixth amorphous surface layer of the metal configured such that the third crystalline bulk layer is sandwiched between the fifth and sixth amorphous surface layers.
8 . The IC packaging structure of claim 7 , wherein
the second bonding structure further includes a second metal via of the metal contacting the second metal feature;
the second metal via includes a fourth crystalline bulk layer of the metal and a seventh amorphous surface layer of the metal disposed on the fourth crystalline bulk layer; and
the seventh amorphous surface layer directly contacts the fourth amorphous surface layer.
9 . The IC packaging structure of claim 8 , wherein the second metal via further includes an eighth amorphous surface layer of the metal configured such that the fourth crystalline bulk layer is sandwiched between the seventh and eighth amorphous surface layers.
10 . The IC packaging structure of claim 1 , wherein the metal includes Au, Ag, Pd, or a combination thereof.
11 . The IC packaging structure of claim 1 , wherein the metal includes Ni, Co, or other suitable metal, or a combination thereof.
12 . An integrated circuit (IC) packaging structure, comprising:
a bottom circuit structure having first semiconductor devices on a first substrate, a first interconnect structure over the first semiconductor devices, and a first bonding structure over the first interconnect structure; and
a top circuit structure having second semiconductor devices on a second substrate, a second interconnect structure underlying the second semiconductor devices, and a second bonding structure underlying the second interconnect structure, wherein
the first bonding structure includes a first metal feature having a first crystalline bulk layer of a metal,
the second bonding structure includes a second metal feature having a second crystalline bulk layer of the metal, and
the top circuit structure is bonded to the bottom circuit structure through a first amorphous surface layer of the metal sandwiched between the first and second crystalline bulk layers, and a dielectric-dielectric bonding structure.
13 . The IC packaging structure of claim 12 , wherein the first metal feature of the first bonding structure further includes a second amorphous surface layer of the metal configured such that the first crystalline bulk layer is sandwiched between the first and second amorphous surface layers, and wherein the metal is copper.
14 . The IC packaging structure of claim 13 , wherein the second metal feature of the second bonding structure further includes a third amorphous surface layer of the metal configured such that the second crystalline bulk layer is sandwiched between the first and third amorphous surface layers.
15 . The IC packaging structure of claim 14 , wherein
the first bonding structure further includes a first metal via of the metal contacting the first metal feature;
the first metal via includes a third crystalline bulk layer of the metal and a fourth amorphous surface layer of the metal disposed on the third crystalline bulk layer; and
the fourth amorphous surface layer directly contacts the second amorphous surface layer.
16 . The IC packaging structure of claim 15 , wherein the first metal via further includes a fifth amorphous surface layer of the metal configured such that the third crystalline bulk layer is sandwiched between the fourth and fifth amorphous surface layers.
17 . The IC packaging structure of claim 16 , wherein
the second bonding structure further includes a second metal via of the metal contacting the second metal feature;
the second metal via includes a fourth crystalline bulk layer of the metal and a sixth amorphous surface layer of the metal disposed on the fourth crystalline bulk layer; and
the sixth amorphous surface layer directly contacts the third amorphous surface layer.
18 . The IC packaging structure of claim 12 , wherein each of the first and second crystalline bulk layers includes a (111) plane in parallel with the first amorphous surface layer.
19 . A method of forming an integrated circuit (IC) packaging structure, comprising:
forming a bottom circuit structure having first semiconductor devices on a first substrate, and a first interconnect structure over the first semiconductor devices;
forming a first bonding structure over the first interconnect structure, wherein the first bonding structure includes a first metal feature having a first crystalline bulk layer of a metal and a first amorphous surface layer of the metal;
forming a top circuit structure having second semiconductor devices on a second substrate, and a second interconnect structure underlying the second semiconductor devices;
forming a second bonding structure underlying the second interconnect structure, wherein the second bonding structure includes a second metal feature having a second crystalline bulk layer of the metal and a second amorphous surface layer of the metal; and
bonding the top circuit structure and the bottom circuit structure together such that the first and second amorphous surface layers are aligned and bonded.
20 . The method of claim 19 , wherein
the metal is copper; and
the bonding the top circuit structure and the bottom circuit structure together is implemented at a bonding temperature ranging between 200° C. and 280° C.