Packaged semiconductor device, leadframe and method for improved bonding
There is disclosed a packaged semiconductor device comprising: a leadframe having a first thickness; the leadframe comprising a die pad; a semiconductor die thereabove; and epoxy therebetween and arranged to bond the semiconductor die to the die pad; wherein in at least one region under the semiconductor die, the die pad has a second thickness less than the first thickness; wherein the die pad has at least one through-hole in the at least one region; and wherein the epoxy fills the at least one through-hole and extends thereunder and laterally beyond the through-hole. Corresponding leadframes, and an associated method of manufacture are also disclosed.
1 . A packaged semiconductor device comprising:
a leadframe having a first thickness; the leadframe comprising a die pad;
a semiconductor die thereabove; and
epoxy therebetween and arranged to bond the semiconductor die to the die pad;
wherein in at least one region under the semiconductor die, the die pad has a second thickness less than the first thickness;
wherein the die pad has at least one through-hole in the at least one region; and
wherein the epoxy fills the at least one through-hole to form at least one plug that extends thereunder the at least one region and laterally beyond the through-hole.
2 . The packaged semiconductor device of claim 1 , wherein the epoxy has a thermal conductivity of at least 10 W/m·K.
3 . The packaged semiconductor device of claim 2 wherein the second thickness is within a range of 40% to 60% of the first thickness.
4 . The packaged semiconductor device of claim 1 , wherein the at least one region extends laterally beyond the semiconductor die.
5 . The packaged semiconductor device of claim 4 wherein the second thickness is within a range of 40% to 60% of the first thickness.
6 . The packaged semiconductor device of claim 1 , wherein the at least one region comprises a network of elongate channels.
7 . The packaged semiconductor device of claim 6 , wherein the network of elongate channels extends radially from a hub.
8 . The packaged semiconductor device of claim 6 , wherein the at least one region extends laterally beyond the semiconductor die.
9 . The packaged semiconductor device of claim 1 , wherein the leadframe further comprises a plurality of leads, electrically isolated from the die pad.
10 . The packaged semiconductor device of claim 1 , further comprising a moulding compound encapsulating the semiconductor die.
11 . The packaged semiconductor device of claim 1 configured as a quad-flat-no-lead, QFN, package.
12 . The packaged semiconductor device of claim 1 wherein the second thickness is within a range of 40% to 60% of the first thickness.
13 . The packaged semiconductor device of claim 1 wherein the at least one through-hole includes a plurality of through-holes.
14 . The packaged semiconductor device of claim 13 wherein the at least one plug includes a plurality of plugs, wherein each plug of the plurality of plugs includes a portion located in a through-hole of the plurality of through-holes.
15 . The packaged semiconductor device of claim 1 wherein each plug of the at least one plug includes a first portion located in a through-hole of the at least one through-hole and a head portion that is located under the first portion,
wherein the head portion is wider than the body portion.
16 . The packaged semiconductor device of claim 15 wherein for each plug of the at least one plug, the head portion is wider than a diameter of a through-hole of the at least one through-hole that the first portion of the each plug is located in.
17 . The packaged semiconductor device of claim 1 wherein:
a top surface of the at least one region of the die pad is coplanar with a top surface of other regions of the die pad;
a bottom surface of the at least one region of the die pad is located closer to the top surface of the at least one region than a bottom surface of the other regions of the die pad are located to the top surface of the other regions.
18 . The packaged semiconductor device of claim 1 , wherein:
the at least one region comprises a network of at least two elongate channels;
each elongate channel of the network includes at least one through-hole of the at least one through-hole where each through-hole includes a portion of a plug of the at least one plug.
19 . An assembly including the packaged semiconductor device of claim 1 ,
wherein the assembly further comprises:
a circuit board, wherein the packaged semiconductor devices is mounted on the circuit board;
solder located between the circuit board and the packaged semiconductor device, wherein the solder is in contact with the at least one plug.
20 . The assembly of claim 19 wherein the solder is in contact with an underside surface of the at least one region.