IP Library Granted Patent US 12691447
Granted Patent B2
US 12691447 · App. 17/880,894 · Granted Jul 28, 2026

Microdevice and manufacturing method for microdevice

Inventors: Chikaaki Mizokuchi (Kawasaki, JP); Masanori Shirokawa (Kawasaki, JP); Sho Onose (Kawasaki, JP)
Assignee: TIANMA JAPAN, LTD.
B01L3/502707B01L3/502715B01L2200/0689B01L2300/0816B01L2300/0887B01L2300/12B01L2300/123B01L2400/049
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Quick Facts
Patent No.
US 12691447
App. No.
17/880,894
Granted
Jul 28, 2026
Kind
B2
Abstract

A microdevice includes a first substrate; and a second substrate that is joined to the first substrate, and that includes at least one groove that forms at least one microchannel with the first substrate and recesses that form closed spaces with the first substrate. When viewed from above, the closed spaces are disposed sandwiching the least one microchannel.

Claims (21)

1 . A microdevice comprising:

a first substrate; and

a second substrate that is joined to the first substrate, and that includes at least one groove that forms at least one microchannel with the first substrate and recesses that form closed spaces with the first substrate, the closed spaces being independent from each other, wherein

the at least one microchannel includes a hole through which a solution to be measured or a calibration curve solution is introduced into or discharged from the at least one microchannel, a first portion extending in a predetermined direction in a measurement region in which the solution to be measured or the calibration curve solution is irradiated with light, and a second portion to connect the hole to the first portion,

when viewed from above, two closed spaces of the closed spaces are disposed symmetrically sandwiching the first portion, and another two closed spaces of the closed spaces are disposed symmetrically sandwiching the second portion,

when viewed from above, the two closed spaces sandwiching the first portion have shapes symmetrical with respect to the first portion as a symmetry axis, and the another two closed spaces sandwiching the second portion have shapes symmetrical with respect to the second portion as a symmetry axis, and

each of the closed spaces in a depressurized state causes the first substrate and the second substrate to be joined and each of the closed spaces is devoid of a hole for depressurization.

2 . The microdevice according to claim 1 , further comprising:

a packaging, wherein

the first substrate and the second substrate are vacuum packaged by the packaging.

3 . The microdevice according to claim 1 , wherein a length, in a width direction of the microchannel, of one recess of the recesses is from 3.8 mm to 5 mm.

4 . The microdevice according to claim 1 , wherein

the first substrate is formed from a glass that has low autofluorescence, and

the second substrate is formed from polydimethylsiloxane.

5 . A manufacturing method for the microdevice according to claim 1 , the manufacturing method comprising:

preparing the first substrate;

preparing the second substrate that includes at least one groove that forms at least one microchannel with the first substrate and recesses that are positioned sandwiching the at least one groove and that form closed spaces with the first substrate;

joining the first substrate and the second substrate to form the at least one microchannel and the closed spaces; and

depressurizing an interior of the formed closed spaces.

6 . The manufacturing method according to claim 5 , further comprising:

vacuum packaging the first substrate and the second substrate that are joined and in which the closed spaces are in the depressurized state.