Functional aqueous solution supply apparatus
Functional aqueous solution supply apparatus ( 1 ) has a replenishment water production unit ( 3 ) that is supplied with ultrapure water (W) from a pipe conduit ( 2 ) and produces functional aqueous solution as washing water (W 1 ), a storage tank ( 5 ) that is supplied/replenished with the produced washing water (W 1 ) via a pipe ( 4 ), and a circulation pipe conduit ( 7 ) that supplies the washing water (W 1 ) from the storage tank ( 5 ) to single-wafer type washers ( 6 A, 6 B, 6 C, and 6 D) and returns unused washing water (W 1 ) to the storage tank ( 5 ). The circulation pipe conduit ( 7 ) is branched into supply pipes ( 7 A, 7 B, 7 C, and 7 D) and is further connected to return pipes ( 8 A, 8 B, 8 C, and 8 D) that communicate into the circulation pipe conduit ( 7 ) from the washers ( 6 A, 6 B, . . . ), respectively. The operation plan of the washers ( 6 A, 6 B, . . . ) is preliminarily transmitted to a control means ( 9 ), and this control means ( 9 ) can control the replenishment water production unit ( 3 ). Such a functional aqueous solution supply apparatus can supply the functional aqueous solution as the washing water to use points such as washing apparatuses for electronic components/electronic members, etc.
1 . A functional aqueous solution supply apparatus comprising:
a replenishment water production unit configured to produce washing water which comprises water and one or more functional components selected from a conductivity-imparting substance, a redox potential-adjusting substance, and a pH-adjusting substance;
a storage tank configured to store the washing water which is supplied/replenished from the replenishment water production unit;
a circulation-type washing water supply pipe configured to supply the washing water from the storage tank to a use point;
a return pipe configured to return unused washing water at the use point to the circulation-type washing water supply pipe; and
a controller configured to: obtain usage plan information of at least one washing water at the use point; predict an amount of the washing water to be used based on the usage plan information to obtain a predicted amount; and control a replenishment amount of the washing water supplied from the replenishment water production unit to the storage tank in accordance with the predicted amount.
2 . The functional aqueous solution supply apparatus according to claim 1 , wherein the use point has a plurality of washers.
3 . The functional aqueous solution supply apparatus according to claim 1 , wherein the conductivity-imparting substance comprises at least one selected from the group consisting of ammonia and carbonic acid.
4 . The functional aqueous solution supply apparatus according to claim 1 , wherein the redox potential-adjusting substance comprises at least one selected from the group consisting of hydrogen peroxide, O 3 , and H 2 .
5 . The functional aqueous solution supply apparatus according to claim 2 , wherein the conductivity-imparting substance comprises at least one selected from the group consisting of ammonia and carbonic acid.
6 . The functional aqueous solution supply apparatus according to claim 2 , wherein the redox potential-adjusting substance comprises at least one selected from the group consisting of hydrogen peroxide, O 3 , and H 2 .
7 . The functional aqueous solution supply apparatus according to claim 5 , wherein the redox potential-adjusting substance comprises at least one selected from the group consisting of hydrogen peroxide, O 3 , and H 2 .