IP Library Granted Patent US 12692218
Granted Patent B2
US 12692218 · App. 18/829,865 · Granted Jul 28, 2026

Resist material and pattern forming method

Inventors: Kimiko Hattori (Tokyo, JP); Kazuyo Morita (Tokyo, JP)
Assignee: Oji Holdings Corporation
C07C69/653C08F220/22C08F220/283G03F7/039G03F7/2059
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Quick Facts
Patent No.
US 12692218
App. No.
18/829,865
Granted
Jul 28, 2026
Kind
B2
Abstract

It is an object of the present invention to form a resist film that is highly sensitive and enables high-resolution patterning. The present invention relates to a resist material that comprises a polymer comprising a unit derived from a structure represented by the following formula (101). In the formula (101), R 1 each independently represents a hydrogen atom, an alkyl group optionally having a substituent, an acyl group optionally having a substituent, an allyl group optionally having a substituent, an alkoxy group optionally having a substituent, or an alkylsilyl group optionally having a substituent, and a plurality of R 1 may be the same or different. R 11 represents a hydrogen atom or an alkyl group optionally having a substituent. R 2 represents a hydrogen atom, an alkyl group, a fluorine atom, a chlorine atom, a bromine atom, or a halogenated alkyl group; and Y 1 represents a single bond or a linking group.

Claims (4)

1 . A monomer for forming resist material represented by the following formula (101):

wherein R 1 each independently represents a hydrogen atom, an alkyl group optionally having a substituent, an acyl group optionally having a substituent, an allyl group optionally having a substituent, an alkoxy group optionally having a substituent, or an alkylsilyl group optionally having a substituent, and a plurality of R 1 may be the same or different; R 11 represents a hydrogen atom or an alkyl group optionally having a substituent; R 2 represents a fluorine atom, a chlorine atom, or a bromine atom; and Y 1 represents a single bond or a linking group.

2 . The monomer for forming resist material according to claim 1 , wherein, in the formula (101), R 1 is an acyl group optionally having a substituent.

3 . The monomer for forming resist material according to claim 1 , wherein, in the formula (101), R 11 is a hydrogen atom.