Resist material and pattern forming method
It is an object of the present invention to form a resist film that is highly sensitive and enables high-resolution patterning. The present invention relates to a resist material that comprises a polymer comprising a unit derived from a structure represented by the following formula (101). In the formula (101), R 1 each independently represents a hydrogen atom, an alkyl group optionally having a substituent, an acyl group optionally having a substituent, an allyl group optionally having a substituent, an alkoxy group optionally having a substituent, or an alkylsilyl group optionally having a substituent, and a plurality of R 1 may be the same or different. R 11 represents a hydrogen atom or an alkyl group optionally having a substituent. R 2 represents a hydrogen atom, an alkyl group, a fluorine atom, a chlorine atom, a bromine atom, or a halogenated alkyl group; and Y 1 represents a single bond or a linking group.
1 . A monomer for forming resist material represented by the following formula (101):
wherein R 1 each independently represents a hydrogen atom, an alkyl group optionally having a substituent, an acyl group optionally having a substituent, an allyl group optionally having a substituent, an alkoxy group optionally having a substituent, or an alkylsilyl group optionally having a substituent, and a plurality of R 1 may be the same or different; R 11 represents a hydrogen atom or an alkyl group optionally having a substituent; R 2 represents a fluorine atom, a chlorine atom, or a bromine atom; and Y 1 represents a single bond or a linking group.
2 . The monomer for forming resist material according to claim 1 , wherein, in the formula (101), R 1 is an acyl group optionally having a substituent.
3 . The monomer for forming resist material according to claim 1 , wherein, in the formula (101), R 11 is a hydrogen atom.