Method and apparatus for manufacturing display device
An apparatus for manufacturing a display device includes a mask assembly, and a deposition source that supplies a deposition material toward the mask assembly. The mask assembly includes a mask frame including a first opening, a sheet portion fixed on the mask, overlapping a portion of the first opening in a plan view, and including a plurality of second openings, a plurality of first masks corresponding to the plurality of second openings and fixed on the sheet portion, each including a plurality of third openings, and a second mask arranged on another portion of the first opening defined by an edge of the sheet portion and inner surfaces of the first opening, fixed on the mask frame, and including a plurality of fourth openings.
1 . An apparatus for manufacturing a display device, the apparatus comprising:
a mask assembly; and
a deposition source that supplies a deposition material toward the mask assembly,
wherein the mask assembly comprises:
a mask frame comprising a first opening;
a sheet portion fixed on the mask frame, overlapping a portion of the first opening in a plan view, and comprising a plurality of second openings;
a plurality of first masks corresponding to the plurality of second openings and fixed on the sheet portion, each of the plurality of first masks comprising a plurality of third openings; and
a second mask arranged on another portion of the first opening defined by an edge of the sheet portion and inner surfaces of the first opening, fixed on the mask frame, and comprising a plurality of fourth openings,
wherein the sheet portion further comprises:
a first sheet portion comprising a plurality of 2-1 openings; and
a second sheet portion spaced apart from the first sheet portion and comprising a plurality of 2-2 openings,
wherein
the first sheet portion and the second sheet portion are spaced apart from each other, and
the second mask is disposed between the first sheet portion and the second sheet portion.
2 . The apparatus of claim 1 , wherein an area of the sheet portion in a plan view is greater than an area of the second mask in a plan view.
3 . The apparatus of claim 1 , wherein an area of the first sheet portion and an area of the second sheet portion in a plan view are different from each other.
4 . The apparatus of claim 1 , wherein an area of each of the plurality of 2-1 openings and an area of each of the plurality of 2-2 openings in a plan view are different from each other.
5 . The apparatus of claim 4 , wherein the plurality of first masks further comprise:
a plurality of 1-1 masks corresponding to the 2-1 openings; and
a plurality of 1-2 masks corresponding to the 2-2 openings,
wherein an area of each of the plurality of 1-1 masks and an area of each of the plurality of 1-2 masks in a plan view are different from each other.
6 . The apparatus of claim 1 , wherein the second mask further comprises:
a 2-1 mask; and
a 2-2 mask spaced apart from the 2-1 mask.
7 . The apparatus of claim 6 , wherein
the 2-1 mask and the 2-2 mask are spaced apart from each other, and
the sheet portion is disposed between the 2-1 mask and the 2-2 mask.
8 . The apparatus of claim 1 , wherein the mask assembly further comprises a shield stick fixed on the mask frame crossing the first opening along a boundary between the sheet portion and the second mask.
9 . A method of manufacturing a display device, the method comprising:
arranging a mask assembly; and
supplying a deposition material toward the mask assembly,
wherein the arranging of the mask assembly comprises:
arranging a mask frame comprising a first opening;
a sheet portion fixing operation comprising tensioning a sheet portion comprising a plurality of second openings and fixing the sheet portion to the mask frame to overlap a portion of the first opening in a plan view;
a first mask fixing operation comprising tensioning a plurality of first masks and fixing the plurality of first masks to the sheet portion to correspond to the plurality of second openings; and
a second mask fixing operation comprising tensioning a second mask and fixing the second mask to the mask frame on another portion of the first opening defined by an edge of the sheet portion and inner surfaces of the first opening-,
wherein the fixing of the sheet portion comprises:
fixing a first sheet portion comprising a plurality of 2-1 openings to the mask frame; and
fixing a second sheet portion comprising a plurality of 2-2 openings to the mask frame to be spaced apart from the first sheet portion,
wherein
the first sheet portion and the second sheet portion are spaced apart from each other, and
the second mask is disposed between the first sheet portion and the second sheet portion.
10 . The method of claim 9 , wherein an area of the sheet portion in a plan view is greater than an area of the second mask in a plan view.
11 . The method of claim 9 , wherein an area of the first sheet portion and an area of the second sheet portion in a plan view are different from each other.
12 . The method of claim 9 , wherein an area of each of the plurality of 2-1 openings and an area of each of the plurality of 2-2 openings in a plan view are different from each other.
13 . The method of claim 12 , wherein the fixing of the plurality of first masks comprises:
fixing a plurality of 1-1 masks to the sheet portion to correspond to the plurality of 2-1 openings; and
fixing a plurality of 1-2 masks to the sheet portion to correspond to the plurality of 2-2 openings,
wherein an area of each of the plurality of 1-1 masks and an area of each of the plurality of 1-2 masks in a plan view are different from each other.
14 . The method of claim 9 , wherein the fixing of the second mask comprises:
fixing a 2-1 mask to the mask frame; and
fixing a 2-2 mask to the mask frame spaced apart from the 2-1 mask.
15 . The method of claim 14 , wherein
the 2-1 mask and the 2-2 mask are spaced apart from each other, and
the sheet portion is disposed between the 2-1 mask and the 2-2 mask.
16 . The method of claim 9 , wherein the arranging of the mask assembly further comprises tensioning a shield stick and fixing the shield stick to the mask frame crossing the first opening along a boundary between the sheet portion and the second mask.