Fluid control valve, fluid control device, and method for manufacturing orifice
The present invention achieves a larger flow rate of a fluid control valve without increasing a size of an orifice or an actuator. The fluid control valve includes an orifice having a valve seat surface and a valve body having a seating surface to be seated on the valve seat surface. The orifice has a plurality of inflow ports and a plurality of outflow ports that are open along a first direction on the valve seat surface. The plurality of inflow ports and the plurality of outflow ports are arranged side by side in a second direction intersecting the first direction.
1 . A fluid control valve comprising:
an orifice having a valve seat surface; and
a valve body having a seating surface to be seated on the valve seat surface,
wherein the orifice has a plurality of inflow ports and a plurality of outflow ports that are open along a first direction on the valve seat surface, and
the plurality of inflow ports and the plurality of outflow ports are arranged side by side in a second direction intersecting the first direction, wherein
the orifice includes:
a first internal flow path that is open to the valve seat surface and an opposing surface facing the valve seat surface; and
a second internal flow path that is open to the valve seat surface and an outer peripheral surface between the valve seat surface and the opposing surface,
the first internal flow path communicates with one of the plurality of inflow ports and the plurality of outflow ports, and
the second internal flow path communicates with the other of the plurality of inflow ports and the plurality of outflow ports.
2 . The fluid control valve according to claim 1 , wherein the plurality of inflow ports and the plurality of outflow ports are alternately arranged side by side in the second direction.
3 . The fluid control valve according to claim 1 , wherein the plurality of inflow ports and the plurality of outflow ports are formed from one end portion to another end portion of an outer peripheral portion of the valve seat surface along the first direction.
4 . The fluid control valve according to claim 1 , wherein a plurality of second internal flow paths are formed so as to respectively correspond to the other of the plurality of inflow ports and the plurality of outflow ports.
5 . The fluid control valve according to claim 1 , wherein a plurality of second internal flow paths are formed to penetrate the orifice along the first direction.
6 . The fluid control valve according to claim 1 , wherein the first internal flow path includes:
a merging flow path that is open to the opposing surface; and
a plurality of branch flow paths that branch from the merging flow path and are open to the valve seat surface, and
each of the plurality of branch flow paths communicates with one of the plurality of inflow ports and the plurality of outflow ports.
7 . The fluid control valve according to claim 6 , wherein a plurality of second internal flow paths are formed in side walls respectively forming the plurality of branch flow paths.
8 . The fluid control valve according to claim 1 , wherein the orifice includes one or a plurality of outer internal flow paths having one end that is open to a circumference of the valve seat surface and another end that is open to the outer peripheral surface or the opposing surface.
9 . A fluid control device comprising:
a fluid control valve according to claim 1 ;
a flow rate sensor that measures a flow rate of the flow path; and
a control unit that controls the fluid control valve based on a measurement value of the flow rate sensor, wherein the fluid control valve comprises:
an orifice having a valve seat surface; and
a valve body having a seating surface to be seated on the valve seat surface,
wherein the orifice has a plurality of inflow ports and a plurality of outflow ports that are open along a first direction on the valve seat surface, and
the plurality of inflow ports and the plurality of outflow ports are arranged side by side in a second direction intersecting the first direction.
10 . A method for manufacturing an orifice having a valve seat surface on which a valve body of a fluid control valve is to be seated, the method comprising:
forming a plurality of inflow ports and a plurality of outflow ports that are open along a first direction on the valve seat surface of the orifice, and forming the plurality of inflow ports and the plurality of outflow ports side by side in a second direction intersecting the first direction;
forming a first internal flow path that is open to the valve seat surface and an opposing surface facing the valve seat surface; and
forming a second internal flow path that is open to the valve seat surface and an outer peripheral surface between the valve seat surface and the opposing surface,
wherein the first internal flow path communicates with one of the plurality of inflow ports and the plurality of outflow ports, and the second internal flow path communicates with the other of the plurality of inflow ports and the plurality of outflow ports.