IP Library › Granted Patent US 12692947
Granted Patent B2
US 12692947 · App. 18/797,067 · Granted Jul 28, 2026

Multi-piece slit valve gate

Inventors: Farzad Vakilzadeh (San Jose, CA); Shawn Thanhson Le (Manteca, CA); Ofer Amir (Half Moon Bay, CA); Ramon Zaragoza (San Jose, CA)
Assignee: Applied Materials, Inc.
F16K3/0227F16K3/0272F16K3/0281F16K3/18F16K3/314F16K51/02
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Quick Facts
Patent No.
US 12692947
App. No.
18/797,067
Granted
Jul 28, 2026
Kind
B2
Abstract

A slit valve gate includes a base portion, a seal portion, and a clamp portion. The base portion is configured to a slit valve actuator and includes a first angled alignment feature. The seal portion is coupled to the base portion. The seal portion is configured to create an airtight seal between the slit valve gate and a sealing surface of a slit valve opening. The clamp portion is coupled to the base portion. The clamp portion includes a second angled alignment feature configured to interface with the first angled alignment feature of the base portion to align the clamp portion with respect to the base portion. The clamp portion retains the seal portion at least partially between the clamp portion and the base portion.

Claims (35)

1 . A slit valve gate comprising:

a base portion configured to couple to a slit valve actuator and comprising a first angled alignment feature, wherein the base portion forms a recess;

a seal portion coupled to the base portion, wherein the base portion forms a receiving area for the seal portion, wherein the first angled alignment feature extends from a bottom of the recess to the receiving area for the seal portion, and wherein the seal portion is configured to create an airtight seal between the slit valve gate and a sealing surface of a slit valve opening; and

a clamp portion coupled to the base portion and comprising a second angled alignment feature extending from a first side of the clamp portion to a second side of the clamp portion, wherein the second angled alignment feature is configured to interface with the first angled alignment feature of the base portion to align the clamp portion with respect to the base portion, wherein the clamp portion retains the seal portion at least partially between the clamp portion and the base portion.

2 . The slit valve gate of claim 1 , wherein the first angled alignment feature extends around a periphery of the clamp portion.

3 . The slit valve gate of claim 1 , wherein the recess has an angled edge to accept the clamp portion and form the second angled alignment feature.

4 . The slit valve gate of claim 1 , further comprising:

a plurality of mechanical fasteners that secure the clamp portion to the base portion.

5 . The slit valve gate of claim 4 , wherein at least one of the plurality of mechanical fasteners forms a vent feature.

6 . The slit valve gate of claim 1 , wherein at least one of the clamp portion or the base portion forms a vent feature configured to vent a region formed between the clamp portion and the base portion.

7 . The slit valve gate of claim 1 , wherein one or more of the base portion or the clamp portion comprise a material selected from a group consisting of aluminum, stainless steel, titanium, ceramic, and plastic.

8 . The slit valve gate of claim 1 , wherein one or more of the base portion or the clamp portion are coated with a protective coating.

9 . The slit valve gate of claim 1 , wherein the clamp portion and the base portion form a groove, and wherein at least a portion of the clamp portion retains the seal portion at least partially in the groove.

10 . The slit valve gate of claim 9 , wherein the groove is a dovetail groove, and wherein a first portion of the dovetail groove is formed by the clamp portion and a second portion of the dovetail groove is formed by the base portion.

11 . A slit valve comprising:

a slit valve opening;

a slit valve actuator; and

a slit valve gate coupled to the slit valve actuator, wherein the slit valve gate is configured to seal the slit valve opening responsive to the slit valve actuator moving the slit valve gate to a closed position, wherein the slit valve gate comprises:

a base portion comprising a first angled alignment feature, wherein the slit valve gate is coupled to the slit valve actuator via the base portion, wherein the base portion forms a recess;

a seal portion coupled to the base portion, wherein the base portion forms a receiving area for the seal portion, wherein the first angled alignment feature extends from a bottom of the recess to the receiving area for the seal portion, and wherein the seal portion is configured to create an airtight seal between the slit valve gate and a sealing surface of the slit valve opening responsive to the slit valve actuator moving the slit valve gate to the closed position; and

a clamp portion coupled to the base portion and comprising a second angled alignment feature extending from a first side of the clamp portion to a second side of the clamp portion, wherein the second angled alignment feature is configured to interface with the first angled alignment feature of the base portion to align the clamp portion with respect to the base portion, wherein the clamp portion retains the seal portion at least partially between the clamp portion and the base portion.

12 . The slit valve of claim 11 , wherein the first angled alignment feature extends around a periphery of the clamp portion.

13 . The slit valve of claim 11 , wherein the recess has an angled edge to accept the clamp portion and form the second angled alignment feature.

14 . The slit valve of claim 11 , further comprising:

a plurality of mechanical fasteners that secure the clamp portion to the base portion.

15 . The slit valve of claim 11 , wherein at least one of the clamp portion or the base portion forms a vent feature configured to vent a region formed between the clamp portion and the base portion.

16 . The slit valve of claim 11 , wherein one or more of the base portion or the clamp portion comprise a material selected from a group consisting of aluminum, stainless steel, titanium, ceramic, or plastic.

17 . The slit valve of claim 11 , wherein one or more of the base portion or the clamp portion are coated with a protective coating.

18 . The slit valve of claim 11 , wherein the clamp portion and the base portion form a groove, and wherein at least a portion of the clamp portion retains the seal portion at least partially in the groove, and wherein a first portion of the groove is formed by the clamp portion and a second portion of the groove is formed by the base portion.

19 . A slit valve gate, comprising:

a base portion configured to couple to a slit valve actuator and comprising a first angled alignment feature, wherein the base portion forms a recess;

a seal portion coupled to the base portion, wherein the base portion forms a receiving area for the seal portion, wherein the first angled alignment feature extends from a bottom of the recess to the receiving area for the seal portion, and wherein the seal portion is configured to create an airtight seal between the slit valve gate and a sealing surface of a slit valve opening; and

a clamp portion coupled to the base portion and comprising a second angled alignment feature extending from a first side of the clamp portion to a second side of the clamp portion, wherein the second angled alignment feature is configured to interface with the first angled alignment feature, wherein the clamp portion retains the seal portion at least partially between the clamp portion and the base portion, and wherein at least one of the clamp portion or the base portion forms one or more first vent features configured to vent a first region formed between the clamp portion and the base portion.

20 . The slit valve gate of claim 19 , further comprising

a plurality of mechanical fasteners that secure the clamp portion to the base portion, wherein at least one of the plurality of mechanical fasteners forms a second vent feature.