Regulator assembly and test method
Regulator assemblies can be tested using test fluids selected to have a molecular weight about that of a selected fluid to be dispensed from a fluid storage and delivery vessel including the regulator assembly. The test fluid can be a single gas or a mixture. The test fluid can have a molecular weight of between 80% and 110% of the molecular weight of the selected fluid dispensed from the fluid storage and delivery vessel. Regulator assemblies tested in this manner can pass evaluation when they show fewer than two spikes on the initiation of flow of the test gas. These regulator assemblies can be installed into fluid storage and delivery vessels, particularly for storage and delivery of pressurized fluids.
1 . A regulator assembly for a fluid supply container for a selected fluid, comprising:
a first regulator configured to receive the selected fluid and having an outlet pressure set to a predetermined set point; and
a second regulator configured to receive the selected fluid from the first regulator at or near the outlet pressure of the first regulator and to further reduce the outlet pressure so as to supply the selected fluid to a tool;
wherein the predetermined set point of the outlet pressure of the first regulator is an outlet pressure that produces fewer than two spikes in a flow through the second regulator when the regulator assembly is operated with a test fluid, the test fluid having a molecular weight that is between 80% and 110% of a molecular weight of the selected fluid; and
wherein the test fluid is not supplied to the tool.
2 . The regulator assembly of claim 1 , wherein the test fluid is a mixture of two or more fluids, and each of the two or more fluids are gases.
3 . The regulator assembly of claim 1 , wherein the molecular weight of the test fluid is between 85% and 95% of the molecular weight of the selected fluid.
4 . The regulator assembly of claim 1 , wherein the selected fluid includes one or more of CF 4 , CO, BF 3 , SiF 4 , AsH 3 , PH 3 , and GeF 4 .
5 . The regulator assembly of claim 4 , wherein the selected fluid is a mixture further including H 2 .
6 . A fluid supply container comprising the regulator assembly of claim 1 , wherein the fluid supply container is configured to store the selected fluid.
7 . The fluid supply container of claim 6 , wherein the selected fluid includes one or more of CF 4 , CO, BF 3 , SiF 4 , AsH 3 , PH 3 , and GeF 4 .
8 . The fluid supply container of claim 7 , wherein the selected fluid is a mixture further including H 2 .
9 . A method of testing a regulator, comprising:
introducing a test fluid into a plurality of test regulator assemblies, wherein
each of the plurality of test regulator assemblies includes a first regulator and a second regulator, and
the test fluid has a molecular weight that is between 80% and 110% of a molecular weight of a selected fluid;
flowing the test fluid from the first regulator to the second regulator of each of the plurality of test regulator assemblies;
monitoring a flow of the test fluid through the second regulator of each of the plurality of test regulator assemblies;
determining a number of spikes in the monitored flow through the second regulator for each of the plurality of test regulator assemblies; and
selecting a regulator assembly for a fluid supply package, the regulator assembly selected from one of the plurality of test regulator assemblies having a second regulator that exhibited fewer than two spikes in the monitored flow when the second regulator received the test fluid at or near the outlet pressure of a first regulator.
10 . The method of claim 9 , wherein the first spikes in the observed monitored flow are spikes in pressure of the observed monitored flow.
11 . The method of claim 9 , wherein the test fluid is a mixture of two or more fluids, and each of the two or more fluids are gases.
12 . The method of claim 9 , wherein the molecular weight of the test fluid is between 85% and 95% of the molecular weight of the selected fluid.
13 . The method of claim 9 , further comprising installing the supply package regulator assembly into the fluid supply package.
14 . The method of claim 9 , wherein the selected fluid includes one or more of CF 4 , CO, BF 3 , SiF 4 , AsH 3 , PH 3 , and GeF 4 .
15 . The method of claim 14 , wherein the selected fluid is a mixture further including H 2 .