Position sensor devices, methods and systems based on magnetic field gradients

1 . A method of determining a linear or angular position of a magnetic sensor device relative to a magnetic source, or vice versa; the magnetic sensor device comprising:

a first, a second, a third and a fourth magnetic sensor element;

a first, second, third and fourth biasing source for biasing said sensor elements;

at least one amplifier for amplifying a signal originating from said sensor elements;

at least one analog-to-digital converter for digitizing signals originating from said at least one amplifier;

one or both of a temperature sensor and a differential stress measurements circuit;

a digital processing circuit connected downstream of the analog-to-digital convertor; the method comprising the steps of:

obtaining one or both of a temperature value and a differential stress value;

a) determining a first magnetic field gradient based on signals obtained from the first and the third magnetic sensor element;

b) determining a second magnetic field gradient based on signals obtained from the second and the fourth magnetic sensor element;

c) calculating a ratio of the first and the second magnetic field gradient;

d) determining said linear or angular position based on said ratio;

wherein:

step a) comprises:

adjusting the third biasing source and/or adjusting a signal path comprising the at least one amplifier using a first predefined function of temperature and/or differential stress, to match a signal path containing the third sensor element to a signal path containing the first sensor element;

determining an analog difference signal between

a first signal obtained by: biasing the first magnetic sensor element, and amplifying the first sensor signal obtained from the first magnetic sensor element, and

a third signal obtained by: biasing the third magnetic sensor element, and amplifying the third sensor signal obtained from the third magnetic sensor element,

after measuring a temperature and/or a differential stress, and adjusting the third biasing source or the at least one amplifier using a predefined function of the measured temperature and/or differential stress; and

digitizing the analog difference signal to obtain the first magnetic field gradient.

2 . The method according to claim 1 , wherein

step a) comprises: determining said first magnetic field gradient of a first magnetic field component oriented in a first direction along said first direction; and

step b) comprises: determining said second magnetic field gradient of a second magnetic field component oriented in a second direction substantially perpendicular to the first direction, along said first direction;

or

step a) comprises: determining said first magnetic field gradient of a magnetic field component oriented in a first direction along a second direction substantially perpendicular to the first direction; and

step b) comprises: determining said second magnetic field gradient of said magnetic field component oriented in said first direction along a third direction substantially perpendicular to the first direction and substantially perpendicular to said second direction.

3 . The method according to claim 1 , wherein the predefined function for adjusting the biasing source and/or the amplifier gain and/or for correcting the digitized value, is a function of only temperature, or is a function of only differential stress, or is a function of temperature and differential stress.

4 . The method according to claim 1 , wherein step d) further comprises: determining said linear or angular position based on said ratio while taking into account a predefined factor K or a predefined function K of temperature.

5 . A method of determining a linear or angular position of a magnetic sensor device relative to a magnetic source, or vice versa; the magnetic sensor device comprising:

a first, a second, a third and a fourth magnetic sensor element;

a first, second, third and fourth biasing source for biasing said sensor elements;

at least one amplifier for amplifying a signal originating from said sensor elements;

at least one analog-to-digital converter for digitizing signals originating from said at least one amplifier;

one or both of a temperature sensor and a differential stress measurements circuit;

a digital processing circuit connected downstream of the analog-to-digital convertor; the method comprising the steps of:

obtaining one or both of a temperature value and a differential stress value;

a) determining a first magnetic field gradient based on signals obtained from the first and the third magnetic sensor element;

b) determining a second magnetic field gradient based on signals obtained from the second and the fourth magnetic sensor element;

c) calculating a ratio of the first and the second magnetic field gradient;

d) determining said linear or angular position based on said ratio;

wherein:

step a) comprises:

adjusting the third biasing source and/or adjusting a signal path comprising the at least one amplifier using a first predefined function of temperature and/or differential stress, to match a signal path containing the third sensor element to a signal path containing the first sensor element;

determining a digital difference value between

a first digital value obtained by: biasing the first magnetic sensor element and amplifying the first sensor signal obtained from the first magnetic sensor element, and digitizing this amplified signal; and

a third digital value obtained by: biasing the third magnetic sensor element, and amplifying the third sensor signal obtained from the third magnetic sensor element, and digitizing this amplified signal,

after measuring a temperature and/or a differential stress, and adjusting the third biasing source or the at least one amplifier using a predefined function of the measured temperature and/or differential stress.

6 . The method according to claim 5 , wherein

step a) comprises: determining said first magnetic field gradient of a first magnetic field component oriented in a first direction along said first direction; and

step b) comprises: determining said second magnetic field gradient of a second magnetic field component oriented in a second direction substantially perpendicular to the first direction, along said first direction;

or

step a) comprises: determining said first magnetic field gradient of a magnetic field component oriented in a first direction along a second direction substantially perpendicular to the first direction; and

step b) comprises: determining said second magnetic field gradient of said magnetic field component oriented in said first direction along a third direction substantially perpendicular to the first direction and substantially perpendicular to said second direction.

7 . The method according to claim 5 , wherein the predefined function for adjusting the biasing source and/or the amplifier gain and/or for correcting the digitized value, is a function of only temperature, or is a function of only differential stress, or is a function of temperature and differential stress.

8 . The method according to claim 5 , wherein step d) further comprises: determining said linear or angular position based on said ratio while taking into account a predefined factor K or a predefined function K of temperature.

9 . A method of determining a linear or angular position of a magnetic sensor device relative to a magnetic source, or vice versa; the magnetic sensor device comprising:

a first, a second, a third and a fourth magnetic sensor element;

a first, second, third and fourth biasing source for biasing said sensor elements;

at least one amplifier for amplifying a signal originating from said sensor elements;

at least one analog-to-digital converter for digitizing signals originating from said at least one amplifier;

one or both of a temperature sensor and a differential stress measurements circuit;

a digital processing circuit connected downstream of the analog-to-digital convertor; the method comprising the steps of:

obtaining one or both of a temperature value and a differential stress value;

a) determining a first magnetic field gradient based on signals obtained from the first and the third magnetic sensor element;

b) determining a second magnetic field gradient based on signals obtained from the second and the fourth magnetic sensor element;

c) calculating a ratio of the first and the second magnetic field gradient;

d) determining said linear or angular position based on said ratio;

wherein:

step a) comprises:

adjusting the third biasing source and/or adjusting a signal path comprising the at least one amplifier using a first predefined function of temperature and/or differential stress, to match a signal path containing the third sensor element to a signal path containing the first sensor element;

determining a digital difference value between

a first digital value obtained by: biasing the first magnetic sensor element and amplifying the first sensor signal obtained from the first magnetic sensor element, and digitizing this amplified signal; and

a third digital value obtained by: biasing the third magnetic sensor element and amplifying the third sensor signal obtained from the third magnetic sensor element, and digitizing this amplified signal, and adjusting this digitized value by multiplication with a correction factor using a predefined function of the measured temperature and/or differential stress.

10 . The method according to claim 9 , wherein

step a) comprises: determining said first magnetic field gradient of a first magnetic field component oriented in a first direction along said first direction; and

step b) comprises: determining said second magnetic field gradient of a second magnetic field component oriented in a second direction substantially perpendicular to the first direction, along said first direction;

or

step a) comprises: determining said first magnetic field gradient of a magnetic field component oriented in a first direction along a second direction substantially perpendicular to the first direction; and

step b) comprises: determining said second magnetic field gradient of said magnetic field component oriented in said first direction along a third direction substantially perpendicular to the first direction and substantially perpendicular to said second direction.

11 . The method according to claim 9 , wherein the predefined function for adjusting the biasing source and/or the amplifier gain and/or for correcting the digitized value, is a function of only temperature, or is a function of only differential stress, or is a function of temperature and differential stress.

12 . The method according to claim 9 , wherein step d) further comprises: determining said linear or angular position based on said ratio while taking into account a predefined factor K or a predefined function K of temperature.

13 . A magnetic position sensor device comprising a semiconductor substrate comprising:

at least a first magnetic sensor element located at a first sensor location, and a second magnetic sensor element located at a second sensor location, spaced apart from the first sensor location;

at least a first biasing source for biasing the first magnetic sensor element, and a second biasing source for biasing the second magnetic sensor element;

at least one amplifier for amplifying a signal obtained from the first magnetic sensor element, and for amplifying a signal obtained from the second magnetic sensor element;

at least a third magnetic sensor element, and a fourth magnetic sensor element;

at least a third biasing source for biasing the third magnetic sensor element, and optionally a fourth biasing source for biasing the fourth magnetic sensor element;

the at least one amplifier further provided for amplifying a signal obtained from the third magnetic sensor element, and optionally for amplifying a signal obtained from the fourth magnetic sensor element;

a temperature sensor located at a predefined position on the substrate;

at least one differential stress sensing circuit configured for determining at least one stress difference between two of said magnetic sensor elements;

at least one analog-to-digital-converter connected downstream of said at least one amplifier;

a digital processing circuit connected downstream of the analog-to-digital-converter;

a non-volatile memory operatively connected to the digital processing circuit, configured for storing one or more values or parameters of said predefined function;

wherein the digital processing circuit is configured for performing a method

comprising the steps of:

obtaining one or both of a temperature value and a differential stress value;

a) determining a first magnetic field gradient based on signals obtained from the first and the third magnetic sensor element;

b) determining a second magnetic field gradient based on signals obtained from the second and the fourth magnetic sensor element;

c) calculating a ratio of the first and the second magnetic field gradient;

d) determining a linear or angular position of the magnetic position sensor device based on said ratio;

wherein:

step a) comprises: adjusting the third biasing source and/or adjusting a signal path comprising the at least one amplifier using a first predefined function of temperature and/or differential stress, to match a signal path containing the third sensor element to a signal path containing the first sensor element.

14 . The magnetic position sensor device according to claim 13 , wherein

step a) comprises: determining said first magnetic field gradient of a first magnetic field component oriented in a first direction along said first direction; and

step b) comprises: determining said second magnetic field gradient of a second magnetic field component oriented in a second direction substantially perpendicular to the first direction, along said first direction;

or

step a) comprises: determining said first magnetic field gradient of a magnetic field component oriented in a first direction along a second direction substantially perpendicular to the first direction; and

step b) comprises: determining said second magnetic field gradient of said magnetic field component oriented in said first direction along a third direction substantially perpendicular to the first direction and substantially perpendicular to said second direction.

15 . The magnetic position sensor device according to claim 13 , wherein the predefined function for adjusting the biasing source and/or the amplifier gain and/or for correcting the digitized value, is a function of only temperature, or is a function of only differential stress, or is a function of temperature and differential stress.

16 . The magnetic position sensor device according to claim 13 , wherein step d) further comprises: determining said linear or angular position based on said ratio while taking into account a predefined factor K or a predefined function K of temperature.

17 . A magnetic position sensor system, comprising:

a two-pole ring or disk magnet, rotatable about an axis;

a magnetic position sensor device, arranged at a distance from said magnet, and comprising a first, a second, a third, and a fourth horizontal Hall element arranged on an imaginary circle, and angularly spaced apart by 90°, and four biasing sources, and at least one amplifier;

the magnetic sensor further comprising: at least one analog-to-digital convertor, and a temperature sensor and two differential stress sensors; and a digital processing circuit comprising a non-volatile memory, and being configured for performing a method comprising the steps of:

obtaining one or both of a temperature value and a differential stress value;

a) determining a first magnetic field gradient based on signals obtained from the first and the third horizontal Hall element;

b) determining a second magnetic field gradient based on signals obtained from the second and the fourth horizontal Hall element;

c) calculating a ratio of the first and the second magnetic field gradient;

d) determining a linear or angular position of the magnetic position sensor device based on said ratio;

wherein:

step a) comprises:

adjusting the third biasing source and/or adjusting a signal path comprising the at least one amplifier using a first predefined function of temperature and/or differential stress, to match a signal path containing the third horizontal Hall element to a signal path containing the first sensor element.

18 . A magnetic position sensor system, comprising:

a magnetic structure having at least four poles;

a magnetic position sensor device, arranged at a distance from said magnetic structure, and comprising two magnetic sensors spaced apart from each other,

each magnetic sensor comprising:

a horizontal Hall element and a vertical Hall element, and four biasing sources, and at least one amplifier, or

an integrated magnetic concentrator and two horizontal Hall elements located on opposite sides of the corresponding integrated magnetic concentrator, and two biasing sources, and at least one amplifier, or

an integrated magnetic concentrator and four horizontal Hall elements arranged at a periphery of the integrated magnetic concentrator, and four biasing sources, and at least one amplifier;

the magnetic sensor further comprising: at least one analog-to-digital convertor, and a temperature sensor and two differential stress sensors; and a digital processing circuit comprising a non-volatile memory, and being configured for performing a method comprising the steps of:

obtaining one or both of a temperature value and a differential stress value;

a) determining a first magnetic field gradient based on signals obtained from the two magnetic sensors;

b) determining a second magnetic field gradient based on signals obtained from the two magnetic sensors;

c) calculating a ratio of the first and the second magnetic field gradient;

d) determining a linear or angular position of the magnetic position sensor device based on said ratio;

wherein:

step a) comprises:

adjusting at least one of the biasing sources and/or adjusting a signal path comprising the at least one amplifier using a first predefined function of temperature and/or differential stress, to match a signal path containing one of the two magnetic sensors to a signal path containing the other of the two magnetic sensors.