Photodetector
There is provided a photodetector including: a photodetecting element having a surface and including a plurality of light-receiving regions arranged along the surface; and a plurality of meta-lens portions arranged on the surface to correspond to the plurality of light-receiving regions, wherein, in one light-receiving region and one meta-lens portion corresponding to each other among the plurality of light-receiving regions and the plurality of meta-lens portions, the one meta-lens portion includes a plurality of meta-lenses arranged along the surface.
1 . A photodetector comprising:
a photodetecting element having a surface and including a plurality of light-receiving regions arranged along the surface; and
a plurality of meta-lens portions arranged on the surface to correspond to the plurality of light-receiving regions,
wherein, in one light-receiving region and one meta-lens portion corresponding to each other among the plurality of light-receiving regions and the plurality of meta-lens portions, the one meta-lens portion includes a plurality of meta-lenses arranged along the surface, and
wherein a single period of the plurality of meta-lenses is equal to or smaller than a wavelength of light detected by the photodetecting element.
2 . The photodetector according to claim 1 ,
wherein the photodetecting element further includes an isolation region isolating each of the plurality of light-receiving regions, and
wherein, in the one light-receiving region and the one meta-lens portion corresponding to each other, the plurality of meta-lenses are configured to condense light within the one light-receiving region.
3 . The photodetector according to claim 2 , wherein the isolation region is a trench.
4 . The photodetector according to claim 1 , further comprising a light-transmitting layer arranged between the surface and the plurality of meta-lens portions.
5 . The photodetector according to claim 4 ,
wherein the light-transmitting layer is formed directly on the surface, and
wherein the plurality of meta-lens portions are formed directly on the light-transmitting layer.
6 . A photodetector comprising:
a photodetecting element having a surface and including a plurality of light-receiving regions arranged along the surface; and
a plurality of meta-lens portions arranged on the surface to correspond to the plurality of light-receiving regions,
wherein, in one light-receiving region and one meta-lens portion corresponding to each other among the plurality of light-receiving regions and the plurality of meta-lens portions, the one meta-lens portion includes a plurality of meta-lenses arranged along the surface,
wherein, in the one light-receiving region and the one meta-lens portion corresponding to each other, the one meta-lens portion has a first meta-lens and a plurality of second meta-lenses as the plurality of meta-lenses, and
wherein an area of the first meta-lens is larger than an area of each of the plurality of second meta-lenses.
7 . The photodetector according to claim 6 , wherein the plurality of second meta-lenses are arranged to surround the first meta-lens.
8 . A photodetector comprising:
a photodetecting element having a surface and including a plurality of light-receiving regions arranged along the surface; and
a plurality of meta-lens portions arranged on the surface to correspond to the plurality of light-receiving regions,
wherein, in one light-receiving region and one meta-lens portion corresponding to each other among the plurality of light-receiving regions and the plurality of meta-lens portions, the one meta-lens portion includes a plurality of meta-lenses arranged along the surface,
wherein, in the one light-receiving region and the one meta-lens portion corresponding to each other, when a distance from the one meta-lens portion to a surface of the one light-receiving region is denoted by T (μm) and an area of the one meta-lens portion is denoted by S (μm 2 ), Tis 1.0S 0.5 or less.