IP Library Granted Patent US 12693154
Granted Patent B2
US 12693154 · App. 18/279,263 · Granted Jul 28, 2026

Photodetector

Inventor: Soh Uenoyama (Hamamatsu, JP)
Assignee: HAMAMATSU PHOTONICS K.K.
G01J1/0411G01T1/2002
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Quick Facts
Patent No.
US 12693154
App. No.
18/279,263
Granted
Jul 28, 2026
Kind
B2
Abstract

There is provided a photodetector including: a photodetecting element having a surface and including a plurality of light-receiving regions arranged along the surface; and a plurality of meta-lens portions arranged on the surface to correspond to the plurality of light-receiving regions, wherein, in one light-receiving region and one meta-lens portion corresponding to each other among the plurality of light-receiving regions and the plurality of meta-lens portions, the one meta-lens portion includes a plurality of meta-lenses arranged along the surface.

Claims (25)

1 . A photodetector comprising:

a photodetecting element having a surface and including a plurality of light-receiving regions arranged along the surface; and

a plurality of meta-lens portions arranged on the surface to correspond to the plurality of light-receiving regions,

wherein, in one light-receiving region and one meta-lens portion corresponding to each other among the plurality of light-receiving regions and the plurality of meta-lens portions, the one meta-lens portion includes a plurality of meta-lenses arranged along the surface, and

wherein a single period of the plurality of meta-lenses is equal to or smaller than a wavelength of light detected by the photodetecting element.

2 . The photodetector according to claim 1 ,

wherein the photodetecting element further includes an isolation region isolating each of the plurality of light-receiving regions, and

wherein, in the one light-receiving region and the one meta-lens portion corresponding to each other, the plurality of meta-lenses are configured to condense light within the one light-receiving region.

3 . The photodetector according to claim 2 , wherein the isolation region is a trench.

4 . The photodetector according to claim 1 , further comprising a light-transmitting layer arranged between the surface and the plurality of meta-lens portions.

5 . The photodetector according to claim 4 ,

wherein the light-transmitting layer is formed directly on the surface, and

wherein the plurality of meta-lens portions are formed directly on the light-transmitting layer.

6 . A photodetector comprising:

a photodetecting element having a surface and including a plurality of light-receiving regions arranged along the surface; and

a plurality of meta-lens portions arranged on the surface to correspond to the plurality of light-receiving regions,

wherein, in one light-receiving region and one meta-lens portion corresponding to each other among the plurality of light-receiving regions and the plurality of meta-lens portions, the one meta-lens portion includes a plurality of meta-lenses arranged along the surface,

wherein, in the one light-receiving region and the one meta-lens portion corresponding to each other, the one meta-lens portion has a first meta-lens and a plurality of second meta-lenses as the plurality of meta-lenses, and

wherein an area of the first meta-lens is larger than an area of each of the plurality of second meta-lenses.

7 . The photodetector according to claim 6 , wherein the plurality of second meta-lenses are arranged to surround the first meta-lens.

8 . A photodetector comprising:

a photodetecting element having a surface and including a plurality of light-receiving regions arranged along the surface; and

a plurality of meta-lens portions arranged on the surface to correspond to the plurality of light-receiving regions,

wherein, in one light-receiving region and one meta-lens portion corresponding to each other among the plurality of light-receiving regions and the plurality of meta-lens portions, the one meta-lens portion includes a plurality of meta-lenses arranged along the surface,

wherein, in the one light-receiving region and the one meta-lens portion corresponding to each other, when a distance from the one meta-lens portion to a surface of the one light-receiving region is denoted by T (μm) and an area of the one meta-lens portion is denoted by S (μm 2 ), Tis 1.0S 0.5 or less.