Measurement system with detection mechanism and method of operation thereof
A method of operation of a measurement system includes: generating an encoded polarized light with a spatially-varying waveplate; generating an illumination line through a telecentric relay tilted under a condition; projecting the illumination line on a sample corresponding to a phase map carrying a different phase delay based on the encoded polarized light; and forming a line image of the illumination line with a linear detector array for testing the sample based on the line image.
1 . A method of operation of a measurement system comprising:
generating an encoded polarized light with a spatially-varying waveplate;
generating an illumination line through a telecentric relay tilted under a condition at an angle with a surface of a sample;
projecting the illumination line on the sample corresponding to a phase map carrying a different phase delay based on the encoded polarized light; and
forming a line image of the illumination line with a linear detector array for testing the sample based on the line image.
2 . The method as claimed in claim 1 wherein generating the illumination line through the telecentric relay tilted under the condition includes reducing an optical aberration of the illumination line with a front lens of the telecentric relay.
3 . The method as claimed in claim 1 wherein projecting the illumination line on the sample corresponding to the phase map carrying the different phase delay based on the encoded polarized light includes projecting the illumination line on the sample with a magnification.
4 . The method as claimed in claim 1 wherein projecting the illumination line on the sample corresponding to the phase map carrying the different phase delay based on the encoded polarized light includes projecting the illumination line on the sample with a front lens of the telecentric relay tilted relative to the spatially-varying waveplate and the sample for satisfying the condition.
5 . The method as claimed in claim 1 wherein generating the encoded polarized light with the spatially-varying waveplate includes generating the phase map with a continuous phase-retardance gradient spanning a range in the spatially-varying waveplate.
6 . The method as claimed in claim 1 wherein forming the line image of the illumination line with the linear detector array includes forming the line image of the illumination line by a line-scan sensor with a number of pixels along an axis corresponding to a phase-gradient direction of the illumination line.
7 . The method as claimed in claim 1 wherein generating the encoded polarized light with the spatially-varying waveplate includes generating the encoded polarized light with a spatial light modulator or a patterned diffractive optical element.
8 . A measurement system comprising:
a spatially-varying waveplate configured to generate an encoded polarized light;
a telecentric relay, coupled to the spatially-varying waveplate, tilted under a condition at an angle with a surface of a sample and configured to generate an illumination line and project the illumination line on the sample corresponding to a phase map carrying a different phase delay based on the encoded polarized light; and
a linear detector array, coupled to the telecentric relay, configured to form a line image of the illumination line for testing the sample based on the line image.
9 . The measurement system as claimed in claim 8 wherein the telecentric relay includes a front lens to reduce an optical aberration of the illumination line.
10 . The measurement system as claimed in claim 8 wherein the telecentric relay is configured to project the illumination line on the sample with a magnification.
11 . The measurement system as claimed in claim 8 wherein the telecentric relay includes a front lens to project the illumination line on the sample with the front lens tilted relative to the spatially-varying waveplate and the sample for satisfying the condition.
12 . The measurement system as claimed in claim 8 wherein the spatially-varying waveplate is configured to generate the phase map with a continuous phase-retardance gradient spanning a range.
13 . The measurement system as claimed in claim 8 wherein the linear detector array includes a line-scan sensor to form the line image of the illumination line with a number of pixels along an axis corresponding to a phase-gradient direction of the illumination line.
14 . The measurement system as claimed in claim 8 wherein the spatially-varying waveplate includes a spatial light modulator or a patterned diffractive optical element to generate the encoded polarized light.
15 . A non-transitory computer-readable medium storing an instruction that, when executed by a control circuit of a measurement system, causes the control circuit to perform functions comprising:
generating an encoded polarized light with a spatially-varying waveplate;
generating an illumination line through a telecentric relay tilted under a condition at an angle with a surface of a sample;
projecting the illumination line on the sample corresponding to a phase map carrying a different phase delay based on the encoded polarized light; and
forming a line image of the illumination line with a linear detector array for testing the sample based on the line image.
16 . The non-transitory computer-readable medium as claimed in claim 15 wherein generating the illumination line through the telecentric relay tilted under the condition includes reducing an optical aberration of the illumination line with a front lens of the telecentric relay.
17 . The non-transitory computer-readable medium as claimed in claim 15 wherein projecting the illumination line on the sample corresponding to the phase map carrying the different phase delay based on the encoded polarized light includes projecting the illumination line on the sample with a magnification.
18 . The non-transitory computer-readable medium as claimed in claim 15 wherein projecting the illumination line on the sample corresponding to the phase map carrying the different phase delay based on the encoded polarized light includes projecting the illumination line on the sample with a front lens of the telecentric relay tilted relative to the spatially-varying waveplate and the sample for satisfying the condition.
19 . The non-transitory computer-readable medium as claimed in claim 15 wherein generating the encoded polarized light with the spatially-varying waveplate includes generating the phase map with a continuous phase-retardance gradient spanning a range in the spatially-varying waveplate.
20 . The non-transitory computer-readable medium as claimed in claim 15 wherein forming the line image of the illumination line with the linear detector array includes forming the line image of the illumination line by a line-scan sensor with a number of pixels along an axis corresponding to a phase-gradient direction of the illumination line.