Surface inspection system
A surface inspection system can be provided with a laser spot size or a laser line width that is selectable based on a measurable aspect of the objects under test that project upward or downward from a surface under test. The larger laser spot size or line width can be selected to cover a larger area of the surface under test at a time, which can increase scanning speed over the surface under test and enhance system measurement throughput.
1 . An apparatus to measure a characteristic of a surface feature on a substrate with improved speed, comprising:
a light source to emit an interrogating beam onto a surface of the substrate comprising at least one surface feature, wherein the interrogating beam has a beam width selected to be equal to or greater than a measurable dimension of the at least one surface feature, wherein the interrogating beam is configured to simultaneously interact with a plurality of spatially distinct portions of the at least one surface feature at each of a plurality of sample positions to form a plurality of reflections, each reflection being derived from a different spatial portion of the interrogating beam;
a sensor to capture the plurality of reflections at each of the plurality of sample positions to generate a corresponding captured image for each sample position; and
one or more processors configured to analyze the captured images from the plurality of sample positions to determine a measurable characteristic of the at least one surface feature.
2 . The apparatus of claim 1 , wherein the measurable characteristic of the at least one surface feature comprises a height of the at least one surface feature with respect to a plane of the surface.
3 . The apparatus of claim 1 , wherein the measurable characteristic of the at least one surface feature comprises a shape of an exposed surface on a top of the at least one surface feature.
4 . The apparatus of claim 1 , wherein a first captured image is derived from a first set of reflections corresponding to an onset of a shadow of a leading edge of the surface feature and a second captured image is derived from a second set of reflections corresponding to a disappearance of a shadow of a trailing edge of the surface feature, and the one or more processors are configured to determine a height of the surface feature with respect to a plane of the surface based on the first captured image and the second captured image.
5 . The apparatus of claim 1 , wherein a plurality of captured images are derived from reflections of the interrogating beam from an exposed surface on a top of the at least one surface feature, and the one or more processors are configured to determine a shape of the exposed surface based on the plurality of captured images.
6 . The apparatus of claim 1 , wherein the light source comprises a plurality of lasers, and wherein the plurality of lasers include continuous wave (CW) lasers, pulsed lasers, or combinations thereof.
7 . The apparatus of claim 1 , wherein the interrogating beam is a first interrogating beam having a first color or spot size,
wherein the light source is configured to emit a second interrogating beam with a second color or spot size.
8 . The apparatus of claim 1 , wherein the sensor includes a plurality of cameras.
9 . The apparatus of claim 1 , wherein the one or more processors is a component of the sensor.
10 . The apparatus of claim 1 , wherein the one or more processors is remote from the sensor.
11 . The apparatus of claim 1 , wherein the one or more processors is configured to apply image pattern analysis to determine the measurable characteristic of the at least one surface feature.
12 . A method for determining a characteristic of a surface feature on a surface of a substrate, the method comprising:
shining the surface with at least one light source, wherein the at least one light source emits an interrogating beam with a beam width selected to be equal to or greater than a measurable dimension of the surface feature that simultaneously interacts with a plurality of spatially distinct portions of the surface feature at each of a plurality of sample positions to form a plurality of reflections, wherein each reflection is derived from a different spatial portion of the interrogating beam;
capturing the plurality of reflections to generate a plurality of captured images, wherein each captured image is derived from a unique sample position relative to the interrogating beam; and
processing at least a portion of the plurality of captured images to determine a measurable characteristic of the surface feature.
13 . The method of claim 12 , wherein the capturing comprises generating a first image comprising an onset of a shadow of a leading edge of the surface feature and a second image comprising a disappearance of a shadow of a trailing edge of the surface feature.
14 . The method of claim 12 , wherein the processing comprises determining a height of the surface feature with respect to a plane of the surface based on a first captured image of a first set of reflections and a second captured image of a second set of reflections.
15 . The method of claim 12 , wherein the measurable characteristic comprises a shape of an exposed surface on a top of the surface feature.
16 . The method of claim 12 , wherein the interrogating beam is a first interrogating beam having a first color or spot size, and wherein the at least one light source is configured to emit a second interrogating beam with a second color or spot size.
17 . A non-transitory computer-readable medium containing instructions that, when executed by one or more processors of a machine, cause the machine to perform operations comprising:
moving at least one light source with respect to a surface of a substrate, wherein the at least one light source emits an interrogating beam with a beam width selected to be equal to or greater than a measurable dimension of a surface feature that simultaneously interacts with a plurality of spatially distinct portions of the surface feature on the surface to form a plurality of reflections, and wherein each reflection is derived from a different spatial portion of the interrogating beam;
capturing the plurality of reflections to generate a plurality of captured images, wherein each captured image is derived from a unique sample position relative to the interrogating beam; and
processing at least a portion of the plurality of captured images to determine a measurable characteristic of the surface feature.
18 . The non-transitory computer-readable medium of claim 17 , wherein the capturing comprises generating a first image comprising an onset of a shadow of a leading edge of the surface feature and a second image comprising a disappearance of a shadow of a trailing edge of the surface feature.
19 . The non-transitory computer-readable medium of claim 17 , wherein the processing comprises determining a height of the surface feature with respect to a plane of the surface based on a first captured image of a first set of reflections and a second captured image of a second set of reflections.
20 . The non-transitory computer-readable medium of claim 17 , wherein the measurable characteristic comprises a shape of an exposed surface on a top of the surface feature.