X-ray fluorescence analyzer

1 . An energy dispersive X-ray fluorescence analyzer for analyzing a sample, comprising:

a sample stage configured to place the sample thereon;

a first housing mounted on a first face of the sample stage, the sample being placed on the first face, the first housing forming a sample chamber together with the sample stage;

an X-ray tube;

a detector configured to detect fluorescent X-rays emitted from the sample when the sample in the sample chamber is irradiated with primary X-rays emitted from the X-ray tube; and

a vacuum adjuster comprising a pump, a valve and a vacuum gauge, the vacuum adjuster being configured to set a degree of vacuum in the sample chamber,

wherein the vacuum adjuster is configured to set the degree of vacuum in the sample chamber during analysis of the sample to be a lower degree of vacuum when the sample is liquid than a degree of vacuum when the sample is solid,

further comprising a controller configured to control the vacuum adjuster,

wherein the controller is configured to set the degree of vacuum in the sample chamber during the analysis of the sample to be a lower degree of vacuum when the sample is liquid than a degree of vacuum when the sample is solid, and

wherein when the sample is liquid including a solvent, the controller is configured to set the degree of vacuum in the sample chamber during the analysis of the sample so as to correspond to a type of solvent of the sample.

2 . The X-ray fluorescence analyzer as recited in claim 1 , further comprising:

a second housing mounted on a second face of the sample stage on a side facing the first face, the second housing forming a measurement chamber together with the sample stage,

wherein the X-ray tube and the detector are provided on the measurement chamber, and

wherein the vacuum adjuster is configured to perform vacuuming so that a degree of vacuum in the sample chamber and a degree of vacuum in the measurement chamber are equalized during the analysis of the sample.

3 . The X-ray fluorescence analyzer as recited in claim 1 ,

wherein the controller is configured to adjust the degree of vacuum in the sample chamber during the analysis of the sample in three or more steps, or steplessly.

4 . The X-ray fluorescence analyzer as recited in claim 1 ,

wherein the controller includes an input device capable of inputting a set value for the degree of vacuum in the sample chamber, and

wherein the controller is configured to set the degree of vacuum in the sample chamber during the analysis of the sample based on the set value for the degree of vacuum.

5 . The X-ray fluorescence analyzer as recited in claim 1 ,

wherein the controller is equipped with an input device capable of inputting the type of solvent, and

wherein the controller is configured to set the degree of vacuum in the sample chamber during the analysis of the sample so as to correspond to the type of solvent input by the input device so that the solvent is liquid.

6 . The X-ray fluorescence analyzer as recited in claim 1 ,

wherein the controller is configured to set sets the degree of vacuum in the sample chamber during the analysis of the sample to be lower than 611 Pa when the solvent is water.

7 . The X-ray fluorescence analyzer as recited in claim 1 ,

wherein the sample is a liquid sample, and

wherein the vacuum adjuster is configured to set the degree of vacuum in the sample chamber during the analysis of the sample to a degree of vacuum corresponding to the type of solvent of the sample.

8 . The X-ray fluorescence analyzer as recited in claim 1 ,

wherein the sample is a liquid sample, solvent of the sample being water, and

wherein the vacuum adjuster adjustment mechanism is configured to set sets the degree of vacuum in the sample chamber during the analysis of the sample to be lower than 611 Pa.

9 . An energy dispersive The X-ray fluorescence analyzer for analyzing a sample, comprising:

a sample stage configured to place the sample thereon;

a first housing mounted on a first face of the sample stage, the sample being placed on the first face, the first housing forming a sample chamber together with the sample stage;

an X-ray tube;

a detector configured to detect fluorescent X-rays emitted from the sample when the sample in the sample chamber is irradiated with primary X-rays emitted from the X-ray tube;

a vacuum adjuster comprising a pump, a valve and a vacuum gauge, the vacuum adjuster being configured to set a degree of vacuum in the sample chamber, and

a cooler configured to cool the sample,

wherein the vacuum adjuster is configured to set the degree of vacuum in the sample chamber during analysis of the sample to be a lower degree of vacuum when the sample is liquid than in a degree of vacuum when the sample is solid.

10 . The X-ray fluorescence analyzer as recited in claim 9 ,

further comprising

a controller configured to control the vacuum adjuster, and

a moving mechanism comprising an X-axis rail, a Y-axis rail, a Z-axis rail, a moving body, an arm and a gripper,

wherein the cooler is positioned away from an analysis position where the sample is positioned during the analysis of the sample, and

wherein the controller is configured to move the sample cooled by the cooler by the moving mechanism, to the analysis position and then analyzes the sample.

11 . The X-ray fluorescence analyzer as recited in claim 9 ,

further comprising a controller configured to control the vacuum adjuster;

wherein the cooler is positioned adjacent to an analysis position at which the sample is positioned during the analysis of the sample, and

wherein the controller is configured to cool the sample during the analysis by the cooler.

12 . The X-ray fluorescence analyzer as recited in claim 9 ,

further comprising a controller configured to control the vacuum adjuster;

wherein the controller is configured to set the degree of cooling of the sample so as to correspond to a type of solvent of the sample, when the sample is liquid.

13 . The X-ray fluorescence analyzer as recited in claim 12 ,

wherein the controller includes an input device capable of inputting a set value for the degree of vacuum in the sample chamber and a set value for the degree of cooling of the sample, and

wherein the controller is configured to set the degree of vacuum in the sample chamber and the degree of cooling of the sample during the analysis of the sample so that the solvent is liquid, based on the set value for the degree of vacuum in the sample chamber and the set value for the degree of cooling of the sample.

14 . The X-ray fluorescence analyzer as recited in claim 12 ,

wherein the controller includes an input device capable of inputting the type of solvent, and

wherein the controller is configured to set the degree of vacuum in the sample chamber and the degree of cooling of the sample during the analysis of the sample so as to correspond to the type of solvent input by the input device so that the solvent is liquid.

15 . The X-ray fluorescence analyzer as recited in claim 14 ,

wherein the controller further includes a memory for storing information on the degree of vacuum in the sample chamber and the degree of cooling of the sample corresponding to the type of solvent, the solvent being liquid, and

wherein the controller is configured to set the degree of vacuum in the sample chamber and the degree of cooling of the sample during the analysis of the sample so that the solvent is liquid, based on the information.