Pellicle membrane for a lithographic apparatus
A pellicle membrane for a lithographic apparatus, the membrane including uncapped carbon nanotubes. A method of regenerating a pellicle membrane, the method including decomposing a precursor compound and depositing at least some of the products of decomposition onto the pellicle membrane. A method of reducing the etch rate of a pellicle membrane, the method including providing an electric field in the region of the pellicle membrane to redirect ions from the pellicle, or heating elements to desorb radicals from the pellicle, preferably wherein the pellicle membrane is a carbon nanotube pellicle membrane. An assembly for a lithographic apparatus, the assembly including a biased electrode near or including the pellicle membrane or heating means for the pellicle membrane.
1 . A membrane for a lithographic apparatus, a metrology tool or an inspection tool, the membrane comprising a network of non-aligned boron nitride nanotubes, transition metal chalcogenide nanotubes, or a combination thereof.
2 . The membrane according to claim 1 , wherein the nanotubes comprise double-walled or multi-walled nanotubes.
3 . The membrane according to claim 1 , comprising transition metal chalcogenide nanotubes and wherein the transition metal chalcogenide is tungsten disulphide or antimony telluride.
4 . The membrane according to claim 1 , comprising two or more types of nanotube.
5 . The membrane according to claim 1 , comprising carbon.
6 . The membrane according to claim 1 , comprising transition metal chalcogenide nanotubes and the transition metal is selected from Mo, W, Sb, or Bi.
7 . The membrane according to claim 6 , wherein the chalcogenide is selected from S, Se, or Te.
8 . The membrane according to claim 1 , wherein at least some of the nanotubes include a capping material.
9 . The membrane according to claim 8 , wherein the capping material is selected from: a metal oxide, silicon oxide, or hexagonal boron nitride.
10 . The membrane according to claim 9 , wherein the capping material comprises metal oxide and the metal of the metal oxide is selected from: aluminum, zirconium, yttrium, tungsten, titanium, molybdenum, or hafnium.
11 . The membrane according to claim 8 , wherein the coefficient of thermal expansion of the material of the nanotubes and the capping material are similar.
12 . The membrane according to claim 1 , comprising coaxial nanotubes.
13 . The membrane according to claim 12 , wherein the coaxial nanotubes comprise a core within a hydrogen-etch resistant nanotube.
14 . The membrane according to claim 13 , wherein the coaxial nanotubes comprise a boron nitride nanotube, molybdenum disulphide, or tungsten sulphide shell surrounding the core.
15 . The membrane according to claim 1 , further comprising carbon nanotubes.
16 . An optical element for use in a lithographic apparatus, a metrology tool or an inspection tool, the optical element comprising the membrane according to claim 1 .
17 . The optical element according to claim 16 , wherein the optical element is a pellicle membrane, a mirror, a reticle, or a spectral purity filter.
18 . A membrane for a lithographic apparatus, a metrology tool or an inspection tool, the membrane comprising transition metal chalcogenide nanotubes.
19 . The membrane according to claim 18 , wherein the transition metal is selected from Mo, W, Sb, or Bi.
20 . A membrane for a lithographic apparatus, a metrology tool or an inspection tool, the membrane comprising a network of non-aligned boron nitride nanotubes.