Systems and methods for distributing light delivery

1 . A method for improved sequencing of light delivery in a lithographic process, the method comprising:

determining a time-based sequence of intensities of light and a distribution of the determined time-based sequence of intensities to be delivered to a substrate, wherein the determined time-based sequence includes a plurality of intervals that includes an interval within the determined time-based sequence of intensities where substantially no light is delivered to a substrate; and

delivering light to a substrate by a light source utilizing a digital mirror device (DMD) according to the plurality of intervals of the determined time-based sequence of intensities.

2 . The method of claim 1 , further comprising determining a target intensity of light to deliver to a spot at the substrate.

3 . The method of claim 2 , wherein the determined time-based sequence of intensities is to be delivered to the substrate by the digital mirror device (DMD) to reach the target intensity and wherein substantially no light is delivered to the substrate during the interval.

4 . The method of claim 3 , further comprising storing, in a physical memory, a set of instructions for the determined time-based sequence of intensities of light.

5 . The method of claim 4 , wherein the presence of the interval reduces an influence of an upcoming set of instructions in the determined time-based sequence of intensities that is stored in the physical memory for a configuration of the DMD.

6 . The method of claim 2 , further comprising determining an asymmetric distribution of the determined time-based sequence of intensities that reduces a difference between a delivered center of gravity of the spot and a target center of gravity of the spot.

7 . The method of claim 1 , wherein the determined time-based sequence of intensities is represented by bits stored in physical memory and the interval is located in the sequence after a most significant bit.

8 . A computer program product comprising a non-transitory computer readable medium having instructions recorded thereon, the instructions when executed by a system causes the system to implement the method of claim 1 .

9 . A method for improved sequencing of light delivery in a lithographic process, the method comprising:

determining a target intensity of light to deliver to a spot at a substrate;

determining a sequence of intensities of light to be delivered to the substrate by a digital mirror device (DMD) to reach the target intensity, the sequence of intensities including an interval within the sequence of intensities where substantially no light is delivered to the substrate;

storing, in a physical memory, a set of instructions for the sequence of intensities of light; and

delivering light to the substrate by a light source utilizing the DMD according to the sequence of intensities, wherein the presence of the interval reduces an influence of an upcoming set of instructions in the sequence of intensities that is stored in the physical memory for a configuration of the DMD.

10 . The method of claim 9 , wherein the sequence of intensities is represented by bits stored in physical memory and the interval is located in the sequence after a most significant bit.

11 . The method of claim 8 , further comprising determining a symmetric distribution of the sequence of intensities that reduces a difference between a delivered center of gravity of the spot and a target center of gravity of the spot.

12 . The method of claim 11 , further comprising modifying the symmetric distribution into an asymmetric distribution by including an asymmetry into the sequence of intensities, the asymmetry further reducing the difference between the delivered center of gravity and the target center of gravity.

13 . The method of claim 9 , further comprising adjusting a delivered center of gravity by changing the sequence of the intensities or a location of the interval.

14 . The method of claim 13 , wherein changing the sequence of the intensities or a location of the interval further comprising:

calculating a plurality of alternative bit locations and their corresponding centers of gravity as a function of intensity; and

choosing alternative bit locations, such that COG of the sequence of intensities, has the minimum deviation from a middle of an intensity pattern delivered by an optical system comprising the DMD.

15 . The method of claim 9 , wherein the sequence of intensities includes skipping delivery of the light between two delivered intervals of light.

16 . The method of claim 9 , further comprising determining the sequence of intensities separately for each of a plurality of mirrors in the DMD.

17 . A system for delivering light to a substrate, the system comprising:

a light source;

a digital mirror device;

a physical memory configured to store instructions for delivery of light from the light source utilizing the digital mirror device; and

a non-transitory computer readable medium having instructions recorded thereon, the instructions when executed by one or more processors of the system cause the system to perform operations comprising:

determining a target intensity of light to deliver to a spot at a substrate;

determining a sequence of intensities of light to be delivered to the substrate by a digital mirror device (DMD) to reach the target intensity, the sequence of intensities including an interval within the sequence of intensities where substantially no light is delivered to the substrate;

storing, in a physical memory, a set of instructions for the sequence of intensities of light; and

delivering light to the substrate by a light source utilizing the DMD according to the sequence of intensities, wherein the presence of the interval reduces an influence of an upcoming set of instructions in the sequence of intensities that is stored in the physical memory for a configuration of the DMD.

18 . The system of claim 17 , wherein the physical memory is located proximate the DMD such that electrical charges utilized for the storing of the sequence in the physical memory causes a deviation in an angle of a mirror in the DMD.

19 . The system of claim 17 , wherein the system is configured to manufacture computer chips.

20 . The system of claim 17 , wherein the system is configured to manufacture flat panel displays.