IP Library Granted Patent US 12695059
Granted Patent B2
US 12695059 · App. 18/009,978 · Granted Jul 28, 2026

Synchronization of RF pulsing schemes and of sensor data collection

Inventors: John Stephen Drewery (San Jose, CA); Ying Wu (Livermore, CA); Alexander Miller Paterson (San Jose, CA); Luc Albarede (Fremont, CA)
Assignee: Lam Research Corporation
H01J37/32174H01J37/32146
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Quick Facts
Patent No.
US 12695059
App. No.
18/009,978
Granted
Jul 28, 2026
Kind
B2
Abstract

Systems and methods for synchronization of radio frequency (RF) pulsing schemes and of sensor data collection are described. One of the methods includes receiving, by an RF generator, a first set of one or more variable levels and one or more duty cycles of an RF signal. The method further includes receiving, by the RF generator from a pulse controller, a synchronization signal having a plurality of pulses. The method also includes generating, during a clock cycle of a clock signal, multiple instances of a first plurality of states of the RF signal in synchronization with the plurality of pulses of the synchronization signal. Each of the first plurality of states of the RF signal has a corresponding one of the one or more variable levels of the first set and a corresponding one of the one or more duty cycles of the first set.

Claims (21)

1 . A method comprising:

receiving, by a radio frequency (RF) generator, a first set of one or more variable levels and one or more duty cycles of an RF signal;

receiving, by the RF generator from a pulse controller, a synchronization signal having a plurality of pulses;

generating, during a clock cycle of a clock signal, multiple instances of a first plurality of states of the RF signal in synchronization with the plurality of pulses of the synchronization signal, each of the first plurality of states of the RF signal has a corresponding one of the one or more variable levels of the first set and a corresponding one of the one or more duty cycles of the first set;

receiving a second set of one or more variable levels and one or more duty cycles of the RF signal;

receiving a count of a number of pulses of the synchronization signal after which the RF signal is to include the second set of one or more variable levels and one or more duty cycles, the synchronization signal is different from the clock signal;

determining whether the count is exceeded; and

generating a first instance of a second plurality of states of the RF signal in response to determining that the count is exceeded,

each of the second plurality of states of the RF signal has a corresponding one of the one or more variable levels of the second set and a corresponding one of the one or more duty cycles of the second set.

2 . The method of claim 1 , during a time interval between two consecutive ones of the plurality of pulses of the synchronization signal, a pulse of the synchronization signal is not received, the method further comprising:

generating an instance of a single state of the RF signal during the time interval.

3 . The method of claim 1 , the first set of one or more variable levels and one or more duty cycles is received by the RF generator before the synchronization signal is received.

4 . The method of claim 1 , a frequency of occurrence of the plurality of pulses is changeable by the pulse controller.

5 . The method of claim 1 , the plurality of states includes two states, or three states, or four states.

6 . The method of claim 1 , the one or more variable levels of the first set are one or more power levels.

7 . The method of claim 1 , each of the one or more duty cycles of the first set is of the corresponding one of the one or more variable levels of the first set.

8 . The method of claim 1 , the first instance of a second plurality of states of the RF signal is generated during the clock cycle of the clock signal.

9 . The method of claim 1 , the second set of one or more variable levels and one or more duty cycles is received by the RF generator before the synchronization signal is received.

10 . The method of claim 1 , the one or more variable levels of the second set are one or more power levels.

11 . The method of claim 1 , each of the one or more duty cycles of the second set is of the corresponding one of the one or more variable levels of the second set.

12 . The method of claim 1 , the first set of one or more variable levels and one or more duty cycles is received by the RF generator before the synchronization signal is received and the second set of one or more variable levels and one or more duty cycles is received by the RF generator before the synchronization signal is received.