IP Library › Granted Patent US 12696375
Granted Patent B2
US 12696375 · App. 19/006,646 · Granted Jul 28, 2026

Pulsed ion source

Inventor: David Lowndes Williams (Los Altos, CA)
Assignee: Adelphi Technology, Inc.
H05H13/005H05H3/06H05H2242/22H05H2242/24
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Quick Facts
Patent No.
US 12696375
App. No.
19/006,646
Granted
Jul 28, 2026
Kind
B2
Abstract

A pulsing ion source having a vacuum enclosure in a cylindrical shape has an exit iris through one closed end providing ions in sequential pulses that are instantly quenched between pulses by imposition of electrical voltage on an element within the ion source.

Claims (55)

1 . An ion source, comprising:

a vacuum enclosure in a shape of a hollow cylinder having an axis, with a first and a second closed end;

an electrical conducting RF feedthrough penetrating through the first closed end in a direction of the axis;

a plurality of annular permanent magnets coaxial with and surrounding the vacuum enclosure, spaced evenly in a direction of the axis of the vacuum enclosure;

an antenna within the vacuum enclosure, connected to the RF feedthrough;

an iris exit opening through the second closed end, coaxial with the vacuum enclosure;

an RF power source coupled through a first remotely operable switching mechanism to the RF feedthrough outside the vacuum enclosure;

a DC electric power supply coupled through a second remotely operable switching mechanism to the RF feedthrough outside the vacuum enclosure; and

control circuitry adapted to operate the first and the second remotely operable switching mechanisms alternately, powering the antenna by the RF power source and by the DC electric power source.

2 . The ion source of claim 1 wherein the control circuitry comprises a single actuator signal operating both the first and the second remotely operable switching mechanisms such that as one is opened the other is closed simultaneously.

3 . The ion source of claim 1 wherein the antenna is an element elongated in the direction of the axis and having a circular cross section concentric with the cylinder of the vacuum enclosure.

4 . The ion source of claim 1 further comprising an RF capacitor rather than a remotely operable switch in a line from the RF source to the RF feedthrough.

5 . The ion source of claim 1 wherein the remotely operable switching mechanisms are solid-state circuitry.

6 . An ion source, comprising:

a vacuum enclosure in a shape of a hollow cylinder with a first and a second closed end;

an RF feedthrough through the first closed end;

an electrical feedthrough through the first closed end:

a plurality of annular permanent magnets coaxial with and surrounding the vacuum enclosure, spaced evenly in a direction of an axis of the vacuum enclosure;

a first antenna within the vacuum enclosure, connected to the RF feedthrough;

a second antenna within the vacuum enclosure connected to the electrical feedthrough;

an iris exit opening through the second closed end, coaxial with the vacuum enclosure;

an RF power source coupled through a first remotely operable switching mechanism to the RF feedthrough outside the vacuum enclosure;

a DC electric power supply coupled through a second remotely operable switching mechanism to the electrical feedthrough outside the vacuum enclosure; and

control circuitry adapted to operate the first and the second remotely operable switching mechanisms to alternately power the first antenna by the RF power source and the second antenna by the DC electric power source.

7 . The ion source of claim 5 wherein the control circuitry comprises a single actuator signal operating both the first and the second remotely operable switching mechanisms such that as one is opened the other is closed simultaneously.

8 . The ion source of claim 6 wherein the antenna is an element elongated in the direction of the axis and having a circular cross section concentric with the cylinder of the vacuum enclosure.

9 . The ion source of claim 6 wherein the second antenna is a ring concentric with the vacuum enclosure.

10 . The ion source of claim 1 wherein the remotely operable switching mechanisms are solid-state circuitry.

11 . An ion source, comprising:

a vacuum enclosure in a shape of a hollow cylinder with a first and a second closed end;

a plurality of annular permanent magnets coaxial with and surrounding the vacuum enclosure, spaced evenly in a direction of an axis of the vacuum enclosure;

an induction coil having a plurality of turns around an outside of the cylindrical vacuum enclosure;

an electrical feedthrough through the first closed end:

an antenna within the vacuum enclosure connected to the electrical feedthrough;

an iris exit opening through the second closed end, coaxial with the vacuum enclosure;

an induction voltage source coupled to the induction coil through a first remotely operable switch;

a DC electric power supply coupled through a second remotely operable switching mechanism to the electrical feedthrough through the first closed end; and

control circuitry adapted to operate the first and the second remotely operable switching mechanisms to alternately power the induction coil and the antenna.

12 . The ion source of claim 11 wherein the control circuitry comprises a single actuator signal operating both the first and the second remotely operable switching mechanisms such that as one is opened the other is closed simultaneously.

13 . The ion source of claim 6 wherein the antenna is a flat disk with a plane oriented parallel to the closed ends and concentric with the vacuum enclosure.

14 . The ion source of claim 1 wherein the remotely operable switching mechanisms are solid-state circuitry.

15 . An ion source, comprising:

a vacuum enclosure in a shape of a hollow cylinder having an axis, with a first and a second closed end;

a ceramic RF window through the first closed end, concentric with the axis;

an electrical feedthrough penetrating through the first closed end in a direction of and off center from the axis;

a plurality of annular permanent magnets coaxial with and surrounding the vacuum enclosure, spaced evenly in a direction of the axis of the vacuum enclosure;

an antenna within the vacuum enclosure, connected to the electrical feedthrough;

an iris exit opening through the second closed end, coaxial with the vacuum enclosure;

an RF power source coupled through a first remotely operable switching mechanism to a waveguide proximate the ceramic window;

a DC electric power supply coupled through a second remotely operable switching mechanism to the electrical feedthrough outside the vacuum enclosure; and

control circuitry adapted to alternately power the waveguide by the RF power source and the antenna by the DC electric power source.

16 . The ion source of claim 15 wherein the control circuitry comprises a single actuator signal operating both the first and the second remotely operable switching mechanisms such that as one is opened the other is closed simultaneously.

17 . The ion source of claim 15 wherein the antenna is a ring element concentric with the cylinder of the vacuum enclosure.

18 . The ion source of claim 15 further comprising an RF capacitor rather than a remotely operable switch in a line from the RF source to the waveguide.

19 . The ion source of claim 1 wherein the remotely operable switching mechanisms are solid-state circuitry.