Micro LED selective air layer transfer printing device
A micro LED selective air layer transfer print device, includes: a laser light source part which irradiates laser light; a wafer part which is located under the laser light source part to receive the laser light irradiated from the laser light source part; and a glass substrate part, which is located under the wafer part and onto which micro LED chips of the wafer part are transferred, wherein the glass substrate part includes: a substrate stage which is located under the wafer part; and a substrate lift part which lifts the whole substrate stage or only a portion of the substrate stage.
1 . A micro LED selective air layer transfer print device comprising:
a laser light source part comprising an excimer laser configured to emit laser light having a wavelength of 157 nm to 350 nm;
a wafer part which is located under the laser light source part to receive the laser light irradiated from the laser light source part; and
a glass substrate part, which is located under the wafer part and onto which micro LED chips of the wafer part are transferred,
wherein the glass substrate part includes:
a substrate stage which is located under the wafer part; and
a substrate lift part which lifts the whole substrate stage or only a portion of the substrate stage,
wherein the laser light source part comprises:
an attenuator module, which is formed to adjust power while the laser light passes through;
a beam forming part, which forms a shape of the laser light passed through the attenuator module to reduce a difference in energy intensity occurring depending on a position of a beam irradiation surface; and
a field lens unit, which reduces distortion of the laser light passing through the beam forming part,
wherein the beam forming part is configured to shape the laser light into a top hat laser beam shape.
2 . The micro LED selective air layer transfer print device according to claim 1 , wherein the laser light source part further comprises:
a laser light source which generates the laser light;
a beam path part through which the laser light emitted from the laser light source passes;
a mask part having a non-transmissive film which blocks a portion of the laser light passing through the beam path part and selectively allows only a portion of the laser light to pass; and
a projection lens part which enlarges a scale of the laser light transmitted through the mask part according to an area of the wafer.
3 . The micro LED selective air layer transfer print device according to claim 1 , wherein the glass substrate part further includes:
a substrate lift support on which the substrate lift part is formed;
a substrate left-right movement guide part which guides the substrate lift support to move left and right;
a substrate left-right movement support on which the substrate left-right movement guide part is formed; and
a substrate front-rear movement part which guides the substrate left-right movement support to move forward and backward.
4 . A micro LED selective air layer transfer print device comprising:
a laser light source part which irradiates laser light;
a wafer part which is located under the laser light source part to receive the laser light irradiated from the laser light source part; and
a glass substrate part, which is located under the wafer part and onto which micro LED chips of the wafer part are transferred,
wherein the glass substrate part includes:
a substrate stage which is located under the wafer part; and
a substrate lift part which lifts the whole substrate stage or only a portion of the substrate stage
wherein the substrate lift parts are formed in multiple, and each of the substrate lift parts includes:
a first drive part;
a first drive shaft for the first drive part;
a drive slope member moving back and forth according to the rotation of the first drive shaft;
a passive slope member which contacts the drive slope member and is lifted and lowered by the drive slope member; and
a lift guide part formed to guide the lifting and lowering of the passive slope member.
5 . The micro LED selective air layer transfer print device according to claim 3 , further comprising:
a substrate rotation part, which is formed between the bottom of the substrate stage and the top of the substrate lift support to rotate the substrate stage.
6 . The micro LED selective air layer transfer print device according to claim 3 , further comprising:
a stage support member, which is formed on the substrate lift support to support the bottom of the substrate stage.
7 . The micro LED selective air layer transfer print device according to claim 5 , wherein the substrate rotation part includes:
a cylindrical rotational center member formed in the center of the substrate lift support;
a cylindrical rotation member formed around the cylindrical rotational center member;
a substrate passive rotation member formed on one side of the substrate stage; and
a substrate driving rotation member formed on one side of the top of the substrate lift support to rotate the substrate passive rotation member,
wherein when the substrate passive rotation member moves by the substrate driving rotation member, the cylindrical rotation member rotates around the rotating central cylindrical member.
8 . The micro LED selective air layer transfer print device according to claim 6 , wherein the stage support member includes:
a stage support cylinder part;
a first direction movement support part which is formed on the lower portion of the stage support cylinder part; and
a second direction movement support part, which is formed to be movable in a direction perpendicular to the first direction movement support part on the lower part of the first direction movement support part.