Display apparatus, fabrication method of the display apparatus, display module, and electronic device
Provided is a high-resolution or high-definition display apparatus. The display apparatus includes a first light-emitting element, a second light-emitting element, and a sidewall. The first and second light-emitting elements each include a pixel electrode, a first light-emitting layer over the pixel electrode, an intermediate layer over the first light-emitting layer, a second light-emitting layer over the intermediate layer, and a common electrode over the second light-emitting layer. That is, the first and second light-emitting elements can have tandem structures. The pixel electrode, the first light-emitting layer, the intermediate layer, and the second light-emitting layer are separately provided between the light-emitting elements. The first light-emitting element and the second light-emitting element are adjacent to each other, and the sidewall is provided between the first light-emitting element and the second light-emitting element. The sidewall is provided to cover at least part of a side surface of the pixel electrode.
1 . A display apparatus comprising:
a first light-emitting element;
a second light-emitting element;
a first sidewall;
a second sidewall;
a third sidewall; and
a fourth sidewall,
wherein the first light-emitting element comprises:
a first pixel electrode;
a first light-emitting layer over the first pixel electrode;
a first intermediate layer over the first light-emitting layer;
a second light-emitting layer over the first intermediate layer; and
a common electrode over the second light-emitting layer,
wherein the second light-emitting element comprises:
a second pixel electrode;
a third light-emitting layer over the second pixel electrode;
a second intermediate layer over the third light-emitting layer;
a fourth light-emitting layer over the second intermediate layer; and
the common electrode over the fourth light-emitting layer,
wherein the first light-emitting element and the second light-emitting element are adjacent to each other,
wherein the first sidewall covers at least part of a side surface of the first pixel electrode, part of a side surface of the first light-emitting layer and part of a side surface of the second light-emitting layer, and part of a side surface of the first intermediate layer,
wherein the second sidewall covers at least part of a side surface of the first sidewall,
wherein the third sidewall covers at least part of a side surface of the second pixel electrode, part of a side surface of the third light-emitting layer and part of a side surface of the fourth light-emitting layer, and part of a side surface of the second intermediate layer,
wherein the fourth sidewall covers at least part of a side surface of the third sidewall,
wherein the second sidewall covers at least part of a top surface of the first sidewall, and
wherein the fourth sidewall covers at least part of a top surface of the third sidewall.
2 . The display apparatus according to claim 1 , further comprising a gap between the second sidewall and the fourth sidewall.
3 . A fabrication method of a display apparatus, comprising the steps of:
forming an insulating layer;
forming a conductive film, a first light-emitting film, an intermediate film, a second light-emitting film, and a sacrificial film in this order over the insulating layer;
etching the sacrificial film, the second light-emitting film, the intermediate film, the first light-emitting film, and the conductive film to form a first pixel electrode and a second pixel electrode over the insulating layer, a first light-emitting layer over the first pixel electrode, a second light-emitting layer over the second pixel electrode, a first intermediate layer over the first light-emitting layer, a second intermediate layer over the second light-emitting layer, a third light-emitting layer over the first intermediate layer, a fourth light-emitting layer over the second intermediate layer, a first sacrificial layer over the third light-emitting layer, and a second sacrificial layer over the fourth light-emitting layer;
forming an insulating film covering at least part of a side surface of the first pixel electrode and part of a side surface of the second pixel electrode, part of a side surface of the first light-emitting layer, part of a side surface of the second light-emitting layer, part of a side surface of the third light-emitting layer, and part of a side surface of the fourth light-emitting layer, part of a side surface of the first intermediate layer and part of a side surface of the second intermediate layer, and part of a side surface and a top surface of the first sacrificial layer and part of a side surface and a top surface of the second sacrificial layer;
etching the insulating film to form a first sidewall covering at least part of the side surface of the first pixel electrode and a second sidewall covering at least part of the side surface of the second pixel electrode;
removing the first sacrificial layer and the second sacrificial layer; and
forming a common electrode over the third light-emitting layer and over the fourth light-emitting layer.
4 . A fabrication method of a display apparatus, comprising the steps of:
forming an insulating layer;
forming a conductive film, a first light-emitting film, an intermediate film, a second light-emitting film, and a sacrificial film in this order over the insulating layer;
etching the sacrificial film, the second light-emitting film, the intermediate film, the first light-emitting film, and the conductive film to form a first pixel electrode and a second pixel electrode over the insulating layer, a first light-emitting layer over the first pixel electrode, a second light-emitting layer over the second pixel electrode, a first intermediate layer over the first light-emitting layer, a second intermediate layer over the second light-emitting layer, a third light-emitting layer over the first intermediate layer, a fourth light-emitting layer over the second intermediate layer, a first sacrificial layer over the third light-emitting layer, and a second sacrificial layer over the fourth light-emitting layer;
forming a first insulating film covering at least part of a side surface of the first pixel electrode and part of a side surface of the second pixel electrode, part of a side surface of the first light-emitting layer, part of a side surface of the second light-emitting layer, part of a side surface of the third light-emitting layer, and part of a side surface of the fourth light-emitting layer, part of a side surface of the first intermediate layer and part of a side surface of the second intermediate layer, and part of a side surface and a top surface of the first sacrificial layer and part of a side surface and a top surface of the second sacrificial layer;
forming a second insulating film over the first insulating film;
etching the first insulating film and the second insulating film to form a first sidewall covering at least part of the side surface of the first pixel electrode, a second sidewall covering at least part of the side surface of the second pixel electrode, a third sidewall covering at least part of a side surface of the first sidewall, and a fourth sidewall covering at least part of a side surface of the second sidewall;
removing the first sacrificial layer and the second sacrificial layer; and
forming a common electrode over the third light-emitting layer and over the fourth light-emitting layer.
5 . The fabrication method of a display apparatus, according to claim 3 ,
wherein the conductive film is etched using the first sacrificial layer and the second sacrificial layer as a mask.
6 . The fabrication method of a display apparatus, according to claim 3 , further comprising the steps of:
forming a protective layer over the common electrode; and
forming a first coloring layer comprising a region overlapping with the first light-emitting layer and the third light-emitting layer and a second coloring layer comprising a region overlapping with the second light-emitting layer and the fourth light-emitting layer over the protective layer,
wherein the first coloring layer and the second coloring layer are configured to transmit light of different colors.
7 . The fabrication method of a display apparatus, according to claim 3 ,
wherein after the first sacrificial layer and the second sacrificial layer are removed, a common layer configured to function as one of an electron-injection layer and a hole-injection layer is formed over the third light-emitting layer and over the fourth light-emitting layer, and
wherein the common electrode is formed over the common layer.
8 . The fabrication method of a display apparatus, according to claim 3 ,
wherein a depression is formed in the insulating layer in the etching of the conductive film.
9 . The display apparatus according to claim 1 , further comprising:
a protective layer over the common electrode;
a first coloring layer over the protective layer so as to comprise a region overlapping with the first light-emitting layer and the second light-emitting layer; and
a second coloring layer over the protective layer so as to comprise a region overlapping with the third light-emitting layer and the fourth light-emitting layer,
wherein the first coloring layer and the second coloring layer are configured to transmit light of different colors,
wherein the first light-emitting layer and the third light-emitting layer are configured to emit light of the same color, and
wherein the second light-emitting layer and the fourth light-emitting layer are configured to emit light of the same color.
10 . The display apparatus according to claim 1 , further comprising a common layer between the common electrode and each of the second light-emitting layer and the fourth light-emitting layer,
wherein the common layer is configured to function as one of an electron-injection layer and a hole-injection layer in the first light-emitting element and the second light-emitting element.
11 . The display apparatus according to claim 1 ,
wherein the first pixel electrode and the second pixel electrode are provided over an insulating layer,
wherein the insulating layer comprises a first projection in a region overlapping with the first pixel electrode, and
wherein the insulating layer comprises a second projection in a region overlapping with the second pixel electrode.
12 . A display module comprising:
the display apparatus according to claim 1 ; and
at least one of a connector and an integrated circuit.