IP Library Granted Patent US 12696704
Granted Patent B2
US 12696704 · App. 17/931,940 · Granted Jul 28, 2026

Type of bumpless and wireless semiconductor device

Inventors: You Ge (Tianjin, CN); Zhijie Wang (Tianjin, CN); Yit Meng Lee (Kuala Lumpur, MY)
Assignee: NXP USA, Inc.
H10P54/00H10W42/00H10W42/121H10W46/00H10W46/503H10W72/936H10W72/9445H10W72/965H10W72/967
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Quick Facts
Patent No.
US 12696704
App. No.
17/931,940
Filed
Sep 14, 2022
Granted
Jul 28, 2026
Kind
B2
Art Unit
2893
USPC
257/773
Abstract

According to a first aspect of the present invention there is provided a semiconductor device comprising: a die having a central active region, a top surface, a bottom surface, and sidewalls having a plurality of perforations therein, each perforation extending from a top end at the top surface to a bottom end at the bottom surface; a plurality of die pads on the top surface and extending from the central active region to respective top ends; a patterned back-side-metallization layer on the bottom surface, comprising a plurality of electrically isolated regions extending to respective bottom ends; metal coating partially filling the perforations and providing electrical connection between respective ones of the plurality of die pads and respective ones of the plurality of electrically isolated regions; and a passivation layer covering the top surface and the die pads.

Claims (18)

1 . A semiconductor device comprising:

a die having a central active region,

a top surface,

a bottom surface,

and sidewalls having a plurality of perforations therein, each perforation extending from a top end at the top surface to a bottom end at the bottom surface;

a plurality of die pads on the top surface and extending from the central active region to respective top ends;

a patterned back-side-metallization layer on the bottom surface, comprising a plurality of electrically isolated regions extending to respective bottom ends;

metal coating partially filling the perforations and providing electrical connection between respective ones of the plurality of die pads and respective ones of the plurality of electrically isolated regions; and

a passivation layer covering the top surface and the die pads.

2 . The semiconductor device of claim 1 , comprising four sidewalls each of which have perforations therein.

3 . The semiconductor device of claim 1 , wherein a cross-section of the perforations is a one of semi-circular, rectangular with a 2:1 aspect ratio, semi-slotted, rectangular, semi-oval, or a segment of a circle.

4 . The semiconductor device of claim 2 , wherein the cross-section of the perforations is semi-circular and a diameter of the semi-circular perforations is 50-100 um.

5 . The semiconductor device of claim 2 , wherein the cross-section of the perforations is semi-slotted and a long diameter of the semi-slotted perforations is 150-250 um.

6 . The semiconductor device of claim 1 , wherein the patterned back-side-metallization layer further comprises an electrically isolated central region.

7 . The semiconductor device of claim 6 , wherein a cross-section of the electrically isolated central region is one of square, rectangular, circular.

8 . The semiconductor device of claim 1 , wherein a distance between two adjacent perforations is 0.3-0.5 mm.

9 . The semiconductor device of claim 1 , wherein the electrically isolated regions of the patterned back-side-metallization layers have a width along the sidewall, of 0.15-0.25 mm and a length 0.35-0.55 mm.

10 . The semiconductor device of claim 1 , wherein the patterned back-side-metallization layer comprises an alloy including at least one of following elements: Au, Ag, Cu, Al, Ni.