Contactless conveyor device
The disclosure relates to a conveyor device which is designed to simultaneously convey a plurality of payloads, in particular wafers. Each payload is paired with a transport body (mover) which can be moved and positioned in a floating manner over a surface of a stator, and the transport body is moved and positioned preferably with respect to all six degrees of freedom. The transport body and the paired payloads are received in a sealed transport chamber, the stator is arranged below the sealed transport chamber, the floor of the transport chamber is arranged above the surface of the stator and parallel thereto, and the housing of each transport body is likewise preferably sealed.
1 . A conveyor device configured to convey at least one payload, comprising:
at least one transport body configured to be moved and positioned in a floating manner over a surface of a stator, wherein each at least one payload is paired with a respective one of the at least one transport body, wherein the at least one payload and the respective one of the at least one transport body are received in a sealed transport chamber, and wherein the stator is arranged outside the sealed transport chamber,
wherein:
a housing of the respective one of the at least one transport body is sealed,
a plurality of process chambers configured to process the at least one payload are arranged adjacent to the transport chamber,
the respective one of the at least one transport body has an extension arm, and an end portion of the extension arm that is remote from the housing includes a receptacle for the at least one payload,
a counterweight is arranged in a region of the housing that is spaced apart from the extension arm,
a service station is arranged in the transport chamber, the service station being configured to be brought into operative connection with the at least one transport body cyclically or as required, and
the service station comprises a first changing station configured for changing the counterweight of the transport body.
2 . The conveyor device according to claim 1 , wherein the service station further comprises a cooling station or a second changing station configured for changing a heat storage device of the transport body.
3 . The conveyor device according to claim 2 , wherein the counterweight and the heat storage device are formed together by a metal block.
4 . The conveyor device according to claim 1 , wherein the service station further comprises a charging station or a second changing station configured for changing an electrical energy storage device of the transport body.
5 . The conveyor device according to claim 1 , wherein one of a gas, a gas mixture, a liquid, a vacuum, an ultra-high vacuum, an aseptic area, and an ABC-protected area is provided in the sealed transport chamber.
6 . The conveyor device according to claim 1 , wherein:
the stator and the plurality of process chambers are spaced apart from one another by a relevant distance so as to weaken a magnetic field of the stator with respect to the plurality of process chambers,
the extension arm is configured to bridge the relevant distance, and
a distance between the housing and the receptacle for the payload corresponds at least to an extension of the housing and/or an extension of the payload in a direction of the extension arm.
7 . The conveyor device according to claim 1 , wherein at least one of the plurality of process chambers is separated from the transport chamber via a lock.
8 . The conveyor device according to claim 1 , further comprising:
an optical position sensing device comprising:
at least one camera in the housing of the transport body; and
a flat code arrangement on a floor of the transport chamber.
9 . The conveyor device according to claim 1 , wherein at least one permanent magnet array is arranged in the housing of the transport body, and the at least one permanent magnet array is configured to be brought into operative connection with the stator and is configured to be moved by the operative connection with the stator.
10 . The conveyor device according to claim 9 , wherein a center of the at least one permanent magnet array is arranged at a center of gravity of the transport body.
11 . A conveyor device configured to convey at least one payload, comprising:
at least one transport body configured to be moved and positioned in a floating manner over a surface of a stator, wherein each at least one payload is paired with a respective one of the at least one transport body, wherein the at least one payload and the respective one of the at least one transport body are received in a sealed transport chamber, and wherein the stator is arranged outside the sealed transport chamber,
wherein a service station is arranged in the transport chamber, the service station being configured to be brought into operative connection with the at least one transport body cyclically or as required, and
wherein the service station includes at least one of:
a cooling station or a first changing station configured for changing a heat storage device of the transport body, or
a charging station or a second changing station configured for changing an electrical energy storage device of the transport body.
12 . The conveyor device according to claim 11 , wherein one of a gas, a gas mixture, a liquid, a vacuum, an ultra-high vacuum, an aseptic area, and an ABC-protected area is provided in the sealed transport chamber.
13 . The conveyor device according to claim 11 , wherein a housing of the respective one of the at least one transport body is sealed.
14 . The conveyor device according to claim 13 , wherein:
a plurality of process chambers configured to process the at least one payload are arranged adjacent to the transport chamber; and
the respective one of the at least one transport body has an extension arm, and an end portion of the extension arm that is remote from the housing includes a receptacle for the at least one payload.
15 . The conveyor device according to claim 14 , wherein a counterweight is arranged in a region of the housing that is spaced apart from the extension arm.
16 . The conveyor device according to claim 14 , wherein:
the stator and the plurality of process chambers are spaced apart from one another by a relevant distance so as to weaken a magnetic field of the stator with respect to the plurality of process chambers,
the extension arm is configured to bridge the relevant distance, and
a distance between the housing and the receptacle for the payload corresponds at least to an extension of the housing and/or an extension of the payload in a direction of the extension arm.
17 . The conveyor device according to claim 14 , wherein at least one of the plurality of process chambers is separated from the transport chamber via a lock.
18 . The conveyor device according to claim 11 , further comprising:
an optical position sensing device comprising:
at least one camera in a housing of the transport body; and
a flat code arrangement on a floor of the transport chamber.
19 . The conveyor device according to claim 13 , wherein at least one permanent magnet array is arranged in the housing of the transport body, and the at least one permanent magnet array is configured to be brought into operative connection with the stator and is configured to be moved by the operative connection with the stator.
20 . The conveyor device according to claim 19 , wherein a center of the at least one permanent magnet array is arranged at a center of gravity of the transport body.