Antifuse and resistor
A horizontal antifuse structure including a fuse dielectric layer, two slanted annular metal structures arranged adjacent to and opposite one another, wherein bottom portions of the two slanted annular metal structures are embedded in the fuse dielectric layer.
1 . An antifuse structure comprising:
a fuse dielectric layer; and
two slanted annular metal structures arranged adjacent to and opposite one another, wherein bottom portions of the two slanted annular metal structures are embedded in the fuse dielectric layer.
2 . The antifuse structure according to claim 1 , further comprising:
a first fuse contact above and directly contacting a top surface of one of the two slanted annular metal structures; and
a second fuse contact above and directly contacting a top surface of another one of the two slanted annular metal structures.
3 . The antifuse structure according to claim 1 , wherein each of the two slanted annular metal structures is arranged at opposite angles relative to a surface of the fuse dielectric layer.
4 . The antifuse structure according to claim 1 , wherein each of the two slanted annular metal structures comprises an inner core and an outer shell.
5 . The antifuse structure according to claim 1 , wherein each of the two slanted annular metal structures comprises an inner core and an outer shell, wherein the inner core comprises a dielectric material and the outer shell comprises a metal layer.
6 . The antifuse structure according to claim 1 , wherein a first lateral distance between the two slanted annular metal structures measured at a bottom of the two slanted annular metal structures is less than a second lateral distance between the two slanted annular metal structures measured at a top of the two slanted annular metal structures.
7 . The antifuse structure according to claim 1 , further comprising:
a conductive link in direct contact with and extending between bottoms of the two slanted annular metal structures through the fuse dielectric layer.
8 . An antifuse structure comprising:
a fuse dielectric layer;
a top dielectric layer directly on the fuse dielectric layer; and
two slanted annular metal structures arranged adjacent to and opposite one another, wherein only bottom portions of the two slanted annular metal structures are embedded in the fuse dielectric layer.
9 . The antifuse structure according to claim 8 , further comprising:
a first fuse contact above and directly contacting a top surface of one of the two slanted annular metal structures; and
a second fuse contact above and directly contacting a top surface of another one of the two slanted annular metal structures.
10 . The antifuse structure according to claim 8 , wherein each of the two slanted annular metal structures is arranged at opposite angles relative to a surface of the fuse dielectric layer.
11 . The antifuse structure according to claim 8 , wherein each of the two slanted annular metal structures comprises an inner core and an outer shell.
12 . The antifuse structure according to claim 8 , wherein each of the two slanted annular metal structures comprises an inner core and an outer shell, wherein the inner core comprises a dielectric material and the outer shell comprises a metal layer.
13 . The antifuse structure according to claim 8 , wherein a first lateral distance between the two slanted annular metal structures measured in the fuse dielectric layer is less than a second lateral distance between the two slanted annular metal structures measured in the top dielectric layer.
14 . The antifuse structure according to claim 8 , further comprising:
a conductive link in direct contact with and extending between bottoms of the two slanted annular metal structures through the fuse dielectric layer.
15 . An antifuse structure comprising:
a fuse dielectric layer;
a top dielectric layer directly on the fuse dielectric layer; and
two slanted annular metal structures arranged adjacent to and opposite one another, wherein only bottom portions of the two slanted annular metal structures are embedded in the fuse dielectric layer, wherein each of the two slanted annular metal structures comprises a metal liner surrounding a bottom and sides of an inner core.
16 . The antifuse structure according to claim 15 , further comprising:
a first fuse contact above and directly contacting a top surface of one of the two slanted annular metal structures; and
a second fuse contact above and directly contacting a top surface of another one of the two slanted annular metal structures.
17 . The antifuse structure according to claim 15 , wherein each of the two slanted annular metal structures is arranged at opposite angles relative to a surface of the fuse dielectric layer.
18 . The antifuse structure according to claim 15 , wherein each of the two slanted annular metal structures comprises an inner core, wherein the inner core comprises a dielectric material.
19 . The antifuse structure according to claim 15 , wherein a first lateral distance between the two slanted annular metal structures measured in the fuse dielectric layer is less than a second lateral distance between the two slanted annular metal structures measured in the top dielectric layer.
20 . The antifuse structure according to claim 15 , further comprising:
a conductive link in direct contact with and extending through the fuse dielectric layer between the two slanted annular metal structures.