Laser crystallization apparatus
A laser crystallization apparatus according to an embodiment includes a light source unit irradiating a laser beam; and an optical unit to which the laser beam is incident, wherein the optical unit includes a first portion and a second portion bonded to each other on a bonded surface, and a first width of the first portion and a second width of the second portion are the same as each other on the bonded surface based on a direction parallel to the incident direction of the laser beam.
1 . A laser crystallization apparatus comprising:
a light source configured to irradiate a laser beam; and
an optical unit having a light receiving surface on which the laser beam is incident in an incident direction,
wherein the optical unit includes a first portion and a second portion bonded to each other on a bonded surface to form a single plano-convex cylindrical lens,
a first width of the first portion and a second width of the second portion are the same as each other on the bonded surface based on a direction parallel to the incident direction of the laser beam,
the light receiving surface includes the first portion, the second portion, and the bonded surface,
the light source and the optical unit are arranged such that the light source is configured to irradiate the laser beam continuously on the light receiving surface including the first portion, to the second portion, and the bonded surface,
the bonded surface is configured to reduce an intensity of the laser beam, and
the first portion and the second portion are bonded by optical contact bonding.
2 . The laser crystallization apparatus of claim 1 , wherein
based on a direction perpendicular to the incident direction of the laser beam, a first length of the first portion and a second length of the second portion are different from each other.
3 . The laser crystallization apparatus of claim 1 , wherein
the bonded surface is parallel to the incident direction of the laser beam.
4 . The laser crystallization apparatus of claim 1 , wherein
the bonded surface is inclined to form a predetermined angle with the incident direction of the laser beam.
5 . The laser crystallization apparatus of claim 4 , wherein
the width of the bonded surface is about 0.3% to about 0.6% of a length of the optical unit, and
the width of the bonded surface is measured in the direction parallel to the incident direction of the laser beam.
6 . The laser crystallization apparatus of claim 1 , wherein
a length of the optical unit is about 2000 mm to about 2500 mm, and
the length of the optical unit is measured in a direction perpendicular to the incident direction of the laser beam.
7 . A laser crystallization apparatus comprising:
a light source configured to irradiate a laser beam; and
an optical unit to which the laser beam is incident in an incident direction and including a plurality of sub-optical units,
wherein each of the plurality of sub-optical units includes a first portion and a second portion bonded to each other on a bonded surface to form a single plano-convex cylindrical lens,
the plurality of sub-optical units are sequentially arranged based on a direction parallel to the incident direction of the laser beam, and
the bonded surface is configured to reduce an intensity of the laser beam, and
the first portion and the second portion are bonded by optical contact bonding.
8 . The laser crystallization apparatus of claim 7 , wherein
the plurality of sub-optical units include a first sub-optical unit and a second sub-optical unit, and
the length of the first portion of the first sub-optical unit is different from the length of the first portion of the second sub-optical unit.
9 . The laser crystallization apparatus of claim 8 , wherein
the bonded surface of the first sub-optical unit is offset from the bonded surface of the second sub-optical unit so as to not overlap in the direction parallel to the incident direction of the laser beam.
10 . The laser crystallization apparatus of claim 9 , wherein
based on the direction parallel to the incident direction of the laser beam, a first width of the first portion and a second width of the second portion are the same as each other on the bonded surface.
11 . The laser crystallization apparatus of claim 10 , wherein
the bonded surface of the first sub-optical unit and the bonded surface of the second sub-optical unit are parallel to the incident direction of the laser beam.
12 . The laser crystallization apparatus of claim 11 , wherein
the plurality of sub-optical units are disposed to be bonded along the incident direction of the laser beam.
13 . The laser crystallization apparatus of claim 11 , wherein
the plurality of sub-optical units are disposed to be separated from each other along the incident direction of the laser beam.
14 . The laser crystallization apparatus of claim 10 , wherein
the bonded surface of the first sub-optical unit and the bonded surface of the second sub-optical unit are inclined to form a predetermined angle with the incident direction of the laser beam.
15 . The laser crystallization apparatus of claim 14 , wherein
a width of the bonded surface of the first sub-optical unit is about 0.3% to about 0.6% of a length of the first sub-optical unit, and
the width of the bonded surface is measured in the direction parallel to the incident direction of the laser beam.
16 . The laser crystallization apparatus of claim 15 , wherein
the length of the first sub-optical unit is about 2000 mm to about 2500 mm, and
the length of the first sub-optical unit is measured in a direction perpendicular to the incident direction of the laser beam.
17 . The laser crystallization apparatus of claim 14 , wherein
the plurality of sub-optical units are disposed to be bonded along the incident direction of the laser beam.
18 . The laser crystallization apparatus of claim 15 , wherein
the plurality of sub-optical units are disposed to be separated from each other along the incident direction of the laser beam.
19 . A laser crystallization apparatus comprising:
a light source configured to irradiate a laser beam; and
an optical unit having a light receiving surface to which the laser beam is incident in an incident direction,
wherein the optical unit includes a first portion and a second portion bonded to each other on a bonded surface,
the light receiving surface includes the first portion, the second portion, and the bonded surface,
the light source and the optical unit are arranged such that the light source is configured to irradiate the laser beam continuously on the light receiving surface including the first portion, the second portion, and the bonded surface,
the bonded surface is inclined to form a predetermined angle less than 45 degrees with the incident direction of the laser beam, and
the bonded surface is configured to reduce an intensity of the laser beam, and
the first portion and the second portion are bonded by optical contact bonding.