Imprint apparatus, imprint method, method of manufacturing article, determination method. and non-transitory computer-readable storage medium

1 . An imprinting method comprising:

determining, in order to form an imprint material with a pattern on a substrate using a mold, a target arrangement of the imprint material to be supplied as a plurality of droplets onto a predetermined region of the substrate, the plurality of droplets include a first droplet group including a plurality of first droplet arrays, a second droplet group including a plurality of second droplet arrays, and a single third droplet array; and

supplying the imprint material onto the substrate based on information indicating the target arrangement of the imprint material to be supplied as the plurality of droplets onto a predetermined region of the substrate,

wherein in the first droplet group, each of the plurality of first droplet arrays consists of droplets arrayed at a first pitch in a first direction along a side of the predetermined region, and the plurality of first droplet arrays are arranged at a second pitch in a second direction different from the first direction,

wherein in the second droplet group, each of the plurality of second droplet arrays consists of droplets arrayed at the first pitch in the first direction, and the plurality of second droplet arrays are arranged at the second pitch in the second direction,

wherein the third droplet array consists of a plurality of droplets arrayed at the first pitch in the first direction,

wherein the second droplet group is arranged while being shifted, with respect to the first droplet group, by a first distance in the first direction and by a second distance in the second direction, the first distance being smaller than the first pitch, and the second distance being half the second pitch, and

wherein the third droplet array is arranged while being shifted, with respect to a specific droplet array which is the first droplet array of the first droplet group closest to the side of the predetermined region, by the first distance in the first direction, and a distance between the specific droplet array and the third droplet array in the second direction is smaller than the second distance.

2 . The method according to claim 1 , wherein the third droplet array is arranged at a same position as the specific droplet array in the second direction.

3 . The method according to claim 1 , wherein the third droplet array is arranged at a position closer to the side than the specific droplet array in the second direction.

4 . The method according to claim 1 , wherein the third droplet array is arranged at a position farther from the side than the specific droplet array in the second direction.

5 . The method according to claim 1 , wherein

the specific droplet array is arranged so as to be spaced apart from the side by a predetermined distance in the second direction, and

the predetermined distance is within a range of ½ to 1 times the second pitch.

6 . The method according to claim 5 , wherein the third droplet array is arranged so as to be spaced apart from the side by a distance of at least ¼ the second pitch.

7 . The method according to claim 1 , wherein the specific droplet array is arranged so as to be spaced apart from the side by a distance of ¾ the second pitch.

8 . The method according to claim 7 , wherein the third droplet array is arranged so as to be spaced apart from the side by a distance of at least ¼ the second pitch.

9 . The method according to claim 1 , wherein the first distance is half the first pitch.

10 . The method according to claim 1 , wherein the second direction is a direction perpendicular to the first direction.