Method for producing treatment liquid
An object of the present invention is to provide a method for producing a treatment liquid, having excellent filterability. The method for producing a treatment liquid of an embodiment of the present invention is a method for producing a treatment liquid, the method including filtering an object to be purified including a surfactant, using a first filter having a first filter medium, to produce a treatment liquid for a semiconductor substrate, in which the first filter medium includes at least one selected from the group consisting of a nylon, a polyallyl sulfonic acid, a perfluoroalkoxy alkane which has been subjected to a hydrophilization treatment, a polytetrafluoroethylene which has been subjected to a hydrophilization treatment, a polyolefin which has been subjected to a hydrophilization treatment, and a polyvinylidene fluoride which has been subjected to a hydrophilization treatment, and the surfactant includes at least one selected from the group consisting of a nonionic surfactant including a group represented by Formula (1) and an anionic surfactant including a group represented by Formula (1). (LO) n Formula (1) L represents an alkylene group, and n represents 3 to 55.
1 . A method for producing a treatment liquid, comprising:
performing filtration of an object to be purified including a surfactant, using a first filter having a first filter medium, to produce a treatment liquid for a semiconductor substrate,
wherein the first filter medium includes at least one selected from the group consisting of a nylon, a polyallyl sulfonic acid, a perfluoroalkoxy alkane which has been subjected to a hydrophilization treatment, a polytetrafluoroethylene which has been subjected to a hydrophilization treatment, a polyolefin which has been subjected to a hydrophilization treatment, and a polyvinylidene fluoride which has been subjected to a hydrophilization treatment,
the surfactant includes at least one selected from the group consisting of a nonionic surfactant including a group represented by Formula (1) and an anionic surfactant including a group represented by Formula (1), and
the treatment liquid is a treatment liquid to be applied to a semiconductor substrate which has been subjected to a chemical mechanical polishing treatment,
(LO) n Formula (1)
in Formula (1), L represents an alkylene group, and n represents 3 to 55.
2 . The method for producing a treatment liquid according to claim 1 ,
wherein the object to be purified further includes an amine compound.
3 . The method for producing a treatment liquid according to claim 2 ,
wherein a mass ratio of a content of the amine compound to a content of the surfactant in the object to be purified is 2 to 1,000.
4 . The method for producing a treatment liquid according to claim 2 ,
wherein the object to be purified further includes an amine compound.
5 . The method for producing a treatment liquid according to claim 4 ,
wherein a mass ratio of a content of the amine compound to a content of the surfactant in the object to be purified is 2 to 1,000.
6 . The method for producing a treatment liquid according to claim 2 ,
wherein the nonionic surfactant and the anionic surfactant include a group represented by Formula (2),
-Ph-O-(LO)n- Formula (2)
in Formula (2), Ph represents a phenylene group, L represents an alkylene group, and n represents 3 to 55.
7 . The method for producing a treatment liquid according to claim 2 ,
wherein in Formula (1), n represents 6 to 20.
8 . The method for producing a treatment liquid according to claim 2 ,
wherein the object to be purified includes an aliphatic carboxylic acid-based chelating agent having 3 or more carbon atoms.
9 . The method for producing a treatment liquid according to claim 1 ,
wherein the nonionic surfactant and the anionic surfactant include a group represented by Formula (2),
-Ph-O-(LO) n - Formula (2)
in Formula (2), Ph represents a phenylene group, L represents an alkylene group, and n represents 3 to 55.
10 . The method for producing a treatment liquid according to claim 1 ,
wherein in Formula (1), n represents 6 to 20.
11 . The method for producing a treatment liquid according to claim 1 ,
wherein the object to be purified includes an aliphatic carboxylic acid-based chelating agent having 3 or more carbon atoms.
12 . The method for producing a treatment liquid according to claim 1 ,
wherein a pH of the object to be purified is 8 to 12.
13 . The method for producing a treatment liquid according to claim 1 ,
wherein the first filter medium is at least one selected from the group consisting of the nylon, the polyallyl sulfonic acid, the perfluoroalkoxy alkane which has been subjected to a hydrophilization treatment, and the polytetrafluoroethylene which has been subjected to a hydrophilization treatment.
14 . The method for producing a treatment liquid according to claim 1 ,
wherein the first filter medium includes the polyallyl sulfonic acid.
15 . The method for producing a treatment liquid according to claim 1 ,
wherein the filtration of the object to be purified is performed using the first filter and a second filter including a second filter medium, which is different from the first filter.
16 . The method for producing a treatment liquid according to claim 15 ,
wherein a pore diameter of the second filter medium is larger than a pore diameter of the first filter medium, and
the object to be purified is passed through the second filter and the first filter in this order to perform the filtration of the object to be purified.
17 . The method for producing a treatment liquid according to claim 16 ,
wherein a ratio of the pore diameter of the second filter medium to the pore diameter of the first filter medium is 2 to 500.
18 . The method for producing a treatment liquid according to claim 1 ,
wherein a filtration pressure for the filtration of the object to be purified, which is performed using the first filter, is 0.4 MPa or less.
19 . The method for producing a treatment liquid according to claim 1 ,
wherein a filtration pressure for the filtration of the object to be purified, which is performed using the first filter, is 0.05 MPa or more.
20 . The method for producing a treatment liquid according to claim 1 ,
wherein the first filter medium includes at least one selected from the group consisting of a polyallyl sulfonic acid, and a perfluoroalkoxy alkane which has been subjected to a hydrophilization treatment.