Vibrator device
A vibrator device includes a vibration element, a circuit element configured to drive the vibration element, and a package that accommodates the vibration element and the circuit element. The package includes a mounting surface having a rectangular shape in a plan view and a plurality of external terminals arranged at the mounting surface, the plurality of external terminals include a corner terminal disposed at a corner of the mounting surface and a side terminal disposed at a side of the mounting surface, and an area of the corner terminal is larger than an area of the side terminal.
1 . A vibrator device comprising:
three axes orthogonal to each other being defined as an X axis, a Y axis, and a Z axis;
a vibration element that is an angular velocity detection element, the vibration element being configured to detect an angular velocity;
a circuit element including;
a drive circuit configured to apply a drive signal to drive the angular velocity detection element; and
a detection circuit configured to detect the angular velocity based on an output signal from the angular velocity detection element; and
a package that accommodates the vibration element and the circuit element, the package being configured with a base and a lid, the base having a recess in which the vibration element and the circuit element are provided, wherein
a bottom of the base of the package is a mounting surface having a rectangular shape in a plan view and a plurality of external terminals arranged at the mounting surface,
the plurality of external terminals include a corner terminal disposed at a corner of the mounting surface and a side terminal disposed at a side of the mounting surface,
an area of the corner terminal is larger than an area of the side terminal,
an outer edge of each of the plurality of external terminals is aligned with an outermost periphery of the base of the package in the plan view,
the mounting surface includes:
a first side and a second side that face each other and respectively extend along the X-axis in a plan view viewed along the Z axis; and
a third side and a fourth side that face each other and respectively extend along the Y-axis in the plan view,
the side terminal includes a first side terminal arranged along the first side and a second side terminal arranged along the second side in the plan view, and
the corner terminal extends along the Y axis.
2 . The vibrator device according to claim 1 , wherein
a length along the Y-axis of the corner terminal is larger than a length along the Y-axis of the side terminal in the plan view.
3 . The vibrator device according to claim 2 , wherein
a length along the X-axis of the corner terminal is larger than a length along the X-axis of the side terminal in the plan view.
4 . The vibrator device according to claim 1 , wherein
the circuit element includes an active element formation region where an active element is formed, and
the active element formation region does not overlap the plurality of external terminals in the plan view.
5 . The vibrator device according to claim 4 , wherein
at least a part of a region of the circuit element that is not the active element formation region overlaps at least one of the plurality of external terminals in the plan view.
6 . The vibrator device according to claim 1 , wherein
a first length along the Y-axis of the corner terminal is longer than a second length along the X-axis of the corner terminal in the plan view.
7 . The vibrator device according to claim 2 , wherein
the length along the Y-axis of the corner terminal is longer than another length along the X-axis of the corner terminal in the plan view.
8 . The vibrator device according to claim 3 , wherein
another length along the Y-axis of the corner terminal is longer than the length along the X-axis of the corner terminal in the plan view.