Strain gauge
According to the present disclosure, a strain gauge includes: a flexible substrate; and a resistor formed of a film containing Cr, CrN, and Cr 2 N, on the substrate, and, in this strain gauge, the strain gauge is attached to a measurement object such that a grid direction of the resistor is orthogonal to a strain direction of the measurement object.
1 . A strain gauge comprising:
a flexible substrate;
a resistor formed of a film containing Cr, CrN, and Cr 2 N, on the substrate; and
a pair of electrodes disposed on the substrate such that the resistor is interposed between the pair of electrodes, one of the pair of electrodes electrically connected with the resistor via a first conductive trace, and another one of the pair of electrodes electrically connected with the resistor via a second conductive trace,
wherein a longitudinal length of the first conductive trace is greater than a longitudinal length of the second conductive trace, and
wherein the strain gauge is attached to a measurement object such that a grid direction of the resistor is orthogonal to a strain direction of the measurement object.
2 . The strain gauge according to claim 1 ,
wherein the electrodes are arranged on respective sides of the resistor in a direction orthogonal to the strain direction.
3 . The strain gauge according to claim 1 ,
wherein the electrodes are arranged on respective sides of the resistor in the strain direction.
4 . The strain gauge according to claim 2 , wherein the conductive traces include a part that is inclined relative to the grid direction of the resistor.
5 . The strain gauge according to claim 3 , wherein the conductive traces include a part that extends perpendicularly to the grid direction of the resistor.
6 . A strain gauge comprising:
a flexible substrate;
a resistor formed of a film containing Cr, CrN, and Cr 2 N, on the substrate, the resistor including an elongated part extending in a grid direction of the resistor, the elongated part having a first side and a second side opposite to the first side; and
a pair of electrodes formed on the substrate and electrically connected with the resistor via conductive traces,
wherein each of the conductive traces includes a bent part that is inclined relative to the grid direction of the resistor, and
wherein the bent part is positioned between the first side and the second side of the elongated part of the resistor when viewed in a direction perpendicular to the grid direction of the resistor.
7 . The strain gauge according to claim 6 , wherein the bent part is inclined to be perpendicular to the grid direction of the resistor.
8 . The strain gauge according to claim 6 , wherein the strain gauge is attached to a measurement object such that the grid direction of the resistor is parallel to a strain direction of the measurement object.
9 . The strain gauge according to claim 8 , wherein the electrodes are arranged such that the resistor is interposed between the electrodes in a direction orthogonal to the strain direction.
10 . The strain gauge according to claim 1 , wherein a gauge factor is 10 or greater.
11 . The strain gauge according to claim 1 , wherein a proportion of CrN and Cr 2 N contained in the resistor is 20% or less by weight of the resistor.
12 . The strain gauge according to claim 1 , wherein a proportion of the Cr 2 N in the CrN and the Cr 2 N is 80% or more by weight and less than 90% by weight of the CrN and the Cr 2 N.
13 . A strain gauge comprising:
a flexible substrate;
a resistor formed of a film containing Cr, CrN, and Cr 2 N, the resistor disposed on the substrate; and
a pair of electrodes disposed on the substrate and electrically connected with the resistor via conductive traces,
wherein each of the conductive traces includes a first bent part extending away from the resistor, a second bent part extending to contact each of the pair of electrodes, and a third bent part connecting the first bent part and the second bent part, the first bent part and the second bent part extending parallel to each other.
14 . The strain gauge according to claim 13 , wherein the first bent part, the second bent part, and the third bent part of each of the conductive traces form a weaving pattern.