SEM-EDS holder device for thin filter-type sample
View Patent ↗The present disclosure relates to an SEM-EDS analysis holder device configured to fix a sample in an SEM-EDX analysis apparatus. More specifically, the present disclosure relates to an SEM-EDS analysis holder device capable of minimizing damage to a sample and reusing the sample. An object of the present disclosure is to provide an SEM-EDS analysis holder device capable of minimizing damage to a sample and reusing the sample in an SEM-EDX analysis apparatus configured by attaching an energy dispersive X-rays spectroscope (EDS) detector to scanning electron microscopy (SEM). Another object of the present disclosure is to provide an SEM-EDS analysis holder device that is easily attached or detached and includes chemical components detected by an EDS detector without a component of a holder.
1 . An SEM-EDS holder device for a thin filter type sample, the SEM-EDS holder device comprising:
a cylindrical holder main body part;
a disc part provided at one side of the holder main body part and configured such that a sample is seated on the disc part; and
a sample holder part having one side fixedly supported by being coupled to the holder main body part, and the other side configured to fix the sample seated on the disc,
wherein the holder main body part comprises a body having a seating groove in which the disc part is seated.
2 . The SEM-EDS holder device of claim 1 ,
wherein
the holder main body part further comprises
a central shaft formed on a lower portion of the body, and
wherein the body has two stepped portions and has a plurality of fastening holes formed in a diameter direction based on a center point thereof.
3 . The SEM-EDS holder device of claim 2 , wherein:
the plurality of fastening holes is radially disposed at equal intervals at 45 degrees.
4 . The SEM-EDS holder device of claim 1 , wherein:
the disc part has a circular plate shape and a diameter smaller than a diameter of an upper portion of the holder main body part and forms a stepped portion together with the holder main body part.
5 . The SEM-EDS holder device of claim 1 , wherein:
the sample holder part has a “¬” shape and includes a coupling portion coupled to the holder main body part, and a fixing portion positioned at an upper side of the coupling portion and fixed while being in contact with the sample.
6 . The SEM-EDS holder device of claim 1 , wherein:
the sample holder part fixes and supports the sample by any one of two-point supporting, three-point supporting, and four-point supporting.
7 . The SEM-EDS holder device of claim 1 , wherein:
the holder main body part, the disc part, or the sample holder part is made of a non-magnetic element having electrical conductivity.
8 . The SEM-EDS holder device of claim 1 , wherein:
a material of the holder main body part is aluminum.
9 . The SEM-EDS holder device of claim 1 , wherein:
a material of the disc part is beryllium.
10 . The SEM-EDS holder device of claim 1 , wherein:
a material of the sample holder part is a beryllium copper alloy.
11 . The SEM-EDS holder device of claim 1 , further comprising:
a detector spaced apart from the sample and configured to detect characteristic X-rays emitted from the sample, wherein the detector is disposed at a position at which the characteristic X-rays emitted from the sample do not interfere with the sample holder part.