Analysis apparatus, analysis method, and analysis program

1 . An analysis apparatus for analyzing a fine structure of a plate-shaped sample formed to have columnar scattering bodies that are long in a thickness direction and periodically arranged, comprising:

processing circuitry configured to

store data of a scattering intensity from the plate-shaped sample measured by transmission of X-rays in one ω scan,

acquire a waveform of a scattering vector in the thickness direction of the plate-shaped sample at a specific diffraction point and perform coordinate conversion from the coordinate of the scattering vector in the thickness direction of the plate-shaped sample to the coordinate of the tilt of the scattering body, with respect to the waveform based on an intensity of the specific diffraction point on the two-direction components, using the data of the measured scattering intensity,

specify a peak position of the waveform of the intensity with respect to the coordinate of the tilt applied the coordinate conversion, and

calculate a difference between the specified peak position and the peak position obtained on the assumption that the scattering body is not tilted from the direction perpendicular to the surface of the plate-shaped sample, on the two-direction components of the tilt of the scattering body.

2 . The analysis apparatus according to claim 1 , wherein the processing circuitry is further configured to

perform the coordinate conversion to the coordinate of the tilt of the scattering body on at least one of the two-direction components, by a single analysis using a diffraction point at which one of the two-direction components of the scattering vectors is 0.

3 . The analysis apparatus according to claim 1 , wherein the processing circuitry is further configured to

perform the coordinate conversion to the coordinate of the tilt of the scattering body on the two-direction components, by a loop analysis using a diffraction point where none of the two-direction components of the scattering vectors is not 0.

4 . The analysis apparatus according to claim 1 , wherein

the two-direction components correspond to components in X direction along with the unit cell and Y direction orthogonal to the X direction, both of the X and Y directions being parallel to the surface of the plate-shaped sample.

5 . The analysis apparatus according to claim 1 , wherein

components correspond to the two-direction components in a 0 direction and being the scanning direction of the ω-scan and a direction orthogonal to a 0 direction, both of the a 0 and a 1 directions being parallel to the surface of the plate-shaped sample.

6 . The analysis apparatus according to claim 1 , wherein the processing circuitry is further configured to

use a waveform integrated over a plurality of diffraction points as a waveform based on an intensity of a two-direction component of the specific diffraction point.

7 . An analysis method for a fine structure of a plate-shaped sample formed to have columnar scattering bodies that are long in a thickness direction and periodically arranged, comprising:

preparing data of a scattering intensity from the plate-shaped sample measured by transmission of X-rays in one ω scan;

acquiring a waveform of a scattering vector in the thickness direction of the plate-shaped sample at a specific diffraction point and performing coordinate conversion from the coordinate of the scattering vector in the thickness direction of the plate-shaped sample to the coordinate of the tilt of the scattering body, with respect to the waveform based on an intensity of the specific diffraction point on the two-direction components, using the data of the measured scattering intensity;

specifying a peak position of the waveform of the intensity with respect to the coordinate of the tilt applied the coordinate conversion; and

calculating a difference between the specified peak position and the peak position obtained on the assumption that the scattering body is not tilted from the direction perpendicular to the surface of the plate-shaped sample, on the two-direction components of the tilt of the scattering body.

8 . The method of claim 7 , further comprising:

performing the coordinate conversion to the coordinate of the tilt of the scattering body on at least one of the two-direction components, by a single analysis using a diffraction point at which one of the two-direction components of the scattering vectors is 0.

9 . The method of claim 7 , further comprising:

performing the coordinate conversion to the coordinate of the tilt of the scattering body on the two-direction components, by a loop analysis using a diffraction point where none of the two-direction components of the scattering vectors is not 0.

10 . The method of claim 7 , wherein

the two-direction components correspond to components in X direction along with the unit cell and Y direction orthogonal to the X direction, both of the X and Y directions being parallel to the surface of the plate-shaped sample.

11 . The method of claim 7 , wherein

the two-direction components correspond to components in a 0 direction and being the scanning direction of the ω-scan and a 1 direction orthogonal to a 0 direction, both of the a 0 and a 1 directions being parallel to the surface of the plate-shaped sample.

12 . The method of claim 7 , further comprising:

using a waveform integrated over a plurality of diffraction points as a waveform based on an intensity of a two-direction component of the specific diffraction point.

13 . A non-transitory computer readable recording medium having recorded thereon an analysis program for analyzing a fine structure of a plate-shaped sample formed to have columnar scattering bodies that are long in a thickness direction and periodically arranged, the program causing a computer to execute the following processes of:

preparing data of a scattering intensity from the plate-shaped sample measured by transmission of X-rays in one w scan;

acquiring a waveform of a scattering vector in the thickness direction of the plate-shaped sample at a specific diffraction point and performing coordinate conversion from the coordinate of the scattering vector in the thickness direction of the plate-shaped sample to the coordinate of the tilt of the scattering body, with respect to the waveform based on an intensity of the specific diffraction point on the two-direction components, using the data of the measured scattering intensity;

specifying a peak position of the waveform of the intensity with respect to the coordinate of the tilt applied the coordinate conversion; and

calculating a difference between the specified peak position and the peak position obtained on the assumption that the scattering body is not tilted from the direction perpendicular to the surface of the plate-shaped sample, on the two-direction components of the tilt of the scattering body.

14 . The non-transitory computer readable recording medium of claim 13 , further comprising:

performing the coordinate conversion to the coordinate of the tilt of the scattering body on at least one of the two-direction components, by a single analysis using a diffraction point at which one of the two-direction components of the scattering vectors is 0.

15 . The non-transitory computer readable recording medium of claim 13 , further comprising:

performing the coordinate conversion to the coordinate of the tilt of the scattering body on the two-direction components, by a loop analysis using a diffraction point where none of the two-direction components of the scattering vectors is not 0.

16 . The non-transitory computer readable recording medium of claim 13 , wherein

the two-direction components correspond to components in X direction along with the unit cell and Y direction orthogonal to the X direction, both of the X and Y directions being parallel to the surface of the plate-shaped sample.

17 . The non-transitory computer readable recording medium of claim 13 , wherein

the two-direction components correspond to components in a 0 direction and being the scanning direction of the ω-scan and a 1 direction orthogonal to a 0 direction, both of the a 0 and a 1 directions being parallel to the surface of the plate-shaped sample.

18 . The non-transitory computer readable recording medium of claim 13 , further comprising:

using a waveform integrated over a plurality of diffraction points as a waveform based on an intensity of a two-direction component of the specific diffraction point.