Film forming method, article manufacturing method, supply device, film forming apparatus, and substrate

1 . A film forming method of forming a film on a substrate, wherein

the substrate includes a region including a first concave portion and a second concave portion, and

the first concave portion has a width larger than that of the second concave portion,

the film forming method comprising:

selectively supplying a first material into the first concave portion and curing the first material; and

supplying a second material onto the region including the first concave portion and the second concave portion and curing the second material, such that the second concave portion is filled with the second material and a planarization film of the second material is formed over all of the region,

each of the first material and the second material containing a polymerizable compound and a polymerization initiator and being a curable composition whose volume changes by being cured, and

in the selectively supplying, the first material is supplied into the first concave portion at an amount such that a height of a surface of the cured first material is higher than a height of an edge of the first concave portion.

2 . The film forming method according to claim 1 , wherein the first material is selectively supplied into the first concave portion based on information about at least one of a position and a capacity of the first concave portion.

3 . The film forming method according to claim 2 , further comprising:

obtaining the information by measuring at least one of the position and the capacity of the first concave portion, before the first material is selectively supplied into the first concave portion.

4 . The film forming method according to claim 1 , wherein

the first material is supplied into the first concave portion at the amount such that a thickness of the cured first material exceeds a depth of the first concave portion by not more than 20%.

5 . The film forming method according to claim 1 , wherein

the first material is a material whose volume becomes smaller after being cured than before being cured, and

the supplied amount of the first material is larger than a capacity of the first concave portion.

6 . The film forming method according to claim 1 , wherein curing the first material includes solidifying the first material supplied into the first concave portion.

7 . The film forming method according to claim 1 , wherein the first material is cured by waiting until the first concave portion is filled with the first material.

8 . The film forming method according to claim 1 , wherein a capacity of the first concave portion is larger than a capacity of the second concave portion.

9 . The film forming method according to claim 1 , wherein each of the first concave portion and the second concave portion includes at least one edge with a rectangular shape.

10 . The film forming method according to claim 1 , wherein

the first material is supplied as a droplet into the first concave portion, and

the droplet has a width diameter smaller than a width diameter of the first concave portion and/or a volume smaller than a capacity of the first concave portion.

11 . The film forming method according to claim 10 , wherein the droplet has a width diameter of not more than 8 μm and/or a volume of 2 pL.

12 . The film forming method according to claim 1 , wherein the first concave portion has a width diameter of not less than 0.3 μm and/or a capacity of the first concave portion is not less than 0.1 fL.

13 . The film forming method according to claim 1 , wherein based on a surface shape of the cured first material, a supply amount of the first material applied next is decided such that the surface shape of the first material to be cured next falls within an allowable range.

14 . The film forming method according to claim 1 , wherein the second material is supplied onto the region such that a surface of the planarization film of the second material is higher than a surface of the cured first material in the first concave portion.

15 . The film forming method according to claim 1 , wherein based on a surface shape of the cured second material, a supply amount of the second material to be applied next is decided such that the surface shape of the second material to be cured next falls within an allowable range.

16 . The film forming method according to claim 1 , wherein the planarization film of the second material whose average film thickness falls within a range of not less than 0.1 nm to not more than 1,000 nm is formed on the region.

17 . The film forming method according to claim 1 , wherein the planarization film of the second material whose surface roughness is not more than 20 nm is formed on the region.

18 . The film forming method according to claim 1 , wherein the planarization film of the second material is formed on the region using at least one of a spin coating method, a superstrate contact separating method, an SST-NIL spread method, a heat imprinting method, and an optical imprinting method.

19 . An article manufacturing method comprising:

forming a film on a substrate using a film forming method defined in claim 1 ; and

processing the substrate on which the film has been formed,

wherein an article is manufactured from the processed substrate.