Touch sensing unit minimizing contact defects between conductive layers of touch signal lines
A touch sensing unit that minimizes a contact defect between conductive layers of a touch signal line includes a substrate; a touch electrode disposed in a touch sensor area of the substrate; and a touch signal line connected to the touch electrode and that extends to a touch peripheral area of the substrate. The touch signal line includes a first conductive layer disposed on the substrate, and a second conductive layer disposed on the first conductive layer with an insulating layer interposed therebetween. The second conductive layer is in contact with the first conductive layer through a contact hole in the insulating layer. The first conductive layer includes at least one of Mo, MoNb, Ti or Ta, and the second conductive layer includes at least one of Al or AlNb.
1 . A touch sensing unit, comprising:
a substrate;
a touch electrode disposed in a touch sensor area of the substrate; and
a touch signal line connected to the touch electrode and that extends to a touch peripheral area of the substrate,
wherein in at least the touch peripheral area, the touch signal line includes a first conductive layer disposed on the substrate, and a second conductive layer disposed on the first conductive layer with an insulating layer interposed therebetween, wherein the second conductive layer is in contact with the first conductive layer through a contact hole in the insulating layer,
wherein the first conductive layer includes at least one of molybdenum niobium (MoNb), or tantalum (Ta),
wherein the second conductive layer includes aluminum niobium (AlNb),
wherein the touch signal line prevents formation of an oxide layer of aluminum niobium at an interface between the first conductive layer and the second conductive layer where the first conductive layer and the second conductive layer are in contact with each other, and
wherein the interface where the first conductive layer and the second conductive layer are in contact with each other has an uneven portion, wherein the interface extends in directions parallel to extension directions of the substrate and the uneven portion extends in a direction perpendicular to the extension directions of the substrate.
2 . The touch sensing unit of claim 1 , wherein the first conductive layer of the touch signal line is made of a same material as a connection electrode disposed in the touch sensor area.
3 . The touch sensing unit of claim 2 , wherein the first conductive layer is disposed on a same layer as the connection electrode.
4 . The touch sensing unit of claim 1 , wherein the second conductive layer is disposed on a same layer as the touch electrode.
5 . The touch sensing unit of claim 1 , wherein the touch signal line further includes a third conductive layer disposed on the second conductive layer, wherein the third conductive layer is in contact with the second conductive layer.
6 . The touch sensing unit of claim 5 , wherein the third conductive layer surrounds the second conductive layer exposed by the contact hole.
7 . The touch sensing unit of claim 5 , wherein the third conductive layer is directly in contact with the second conductive layer.
8 . The touch sensing unit of claim 5 , wherein the third conductive layer includes a transparent conductive layer.
9 . The touch sensing unit of claim 5 , wherein the third conductive layer is made of a same material as the touch electrode.
10 . The touch sensing unit of claim 9 , wherein the third conductive layer is disposed on a same layer as the touch electrode.
11 . The touch sensing unit of claim 1 , wherein the insulating layer includes a plurality of contact holes.
12 . The touch sensing unit of claim 1 ,
wherein the first conductive layer and the second conductive layer each include a plurality of convex portions and a plurality of concave portions alternately arranged, and
wherein the uneven portion includes the plurality of convex portions of the first conductive layer directly contacting the plurality of concave portions of the second conductive layer and the plurality of convex portions of the second conductive layer directly contacting the plurality of concave portions of the first conductive layer.
13 . The touch sensing unit of claim 12 , wherein the uneven portion has a triangular-wave shape or a rounded-wave shape.
14 . The touch sensing unit of claim 1 , wherein an interface where an inner wall of the contact hole and the second conductive layer are in contact with each other has an uneven portion.
15 . The touch sensing unit of claim 14 , wherein the uneven portion has a triangular-wave shape or a rounded-wave shape.
16 . A display device, comprising:
a display panel; and
a touch sensing unit disposed on the display panel,
wherein the touch sensing unit includes:
a substrate;
a touch electrode disposed in a touch sensor area of the substrate; and
a touch signal line connected to the touch electrode and that extends to a touch peripheral area of the substrate,
wherein in at least the touch peripheral area, the touch signal line includes a first conductive layer disposed on the substrate, and a second conductive layer disposed on the first conductive layer with an insulating layer interposed therebetween, wherein the second conductive layer is in contact with the first conductive layer through a contact hole in the insulating layer,
wherein the first conductive layer includes at least one of molybdenum niobium (MoNb), or tantalum (Ta),
wherein the second conductive layer includes aluminum niobium (AlNb),
wherein the touch signal line prevents formation of an oxide layer of aluminum niobium at an interface between the first conductive layer and the second conductive layer where the first conductive layer and the second conductive layer are in contact with each other, and
wherein the interface where the first conductive layer and the second conductive layer are in contact with each other has an uneven portion, wherein the interface extends in directions parallel to extension directions of the substrate and the uneven portion extends in a direction perpendicular to the extension directions of the substrate.
17 . The display device of claim 16 , wherein the first conductive layer of the touch signal line is made of a same material as a connection electrode disposed on the touch sensor area.
18 . The display device of claim 17 , wherein the first conductive layer is disposed on a same layer as the connection electrode.
19 . The display device of claim 16 , wherein the second conductive layer is disposed on a same layer as the touch electrode.
20 . The display device of claim 16 , wherein the touch signal line further includes a third conductive layer disposed on the second conductive layer, wherein the third conductive layer is in contact with the second conductive layer.
21 . A manufacturing method of a touch sensor unit, the manufacturing method comprising:
preparing a substrate that includes a touch sensor area and a touch peripheral area; and
forming a touch signal line on the substrate,
wherein forming the touch signal line in the touch peripheral area includes:
forming a first conductive layer on the substrate;
forming an insulating layer on the first conductive layer;
forming a contact hole in the insulating layer, wherein contact hole exposes at least a portion of the first conductive layer; and
forming a second conductive layer on the insulating layer after the forming of the first conductive layer, wherein the second conductive layer is in contact with the first conductive layer through the contact hole,
wherein the first conductive layer includes at least one of molybdenum niobium (MoNb), or tantalum (Ta), and
wherein the second conductive layer includes aluminum niobium (AlNb),
wherein the touch signal line prevents formation of an oxide layer of aluminum niobium at an interface between the first conductive layer and the second conductive layer where the first conductive layer and the second conductive layer are in contact with each other, and
wherein the interface where the first conductive layer and the second conductive layer are in contact with each other has an uneven portion, wherein the interface extends in directions parallel to extension directions of the substrate and the uneven portion extends in a direction perpendicular to the extension directions of the substrate.
22 . The manufacturing method of claim 21 , wherein forming the touch signal line further includes forming a third conductive layer on the second conductive layer wherein the third conductive layer is in contact with the second conductive layer.
23 . An electronic device, comprising:
a display panel; and
a touch sensing unit disposed on the display panel,
wherein the touch sensing unit includes:
a substrate;
a touch electrode disposed in a touch sensor area of the substrate; and
a touch signal line connected to the touch electrode and that extends to a touch peripheral area of the substrate,
wherein in at least the touch peripheral area, the touch signal line includes a first conductive layer disposed on the substrate, and a second conductive layer disposed on the first conductive layer with an insulating layer interposed therebetween,
wherein the second conductive layer is in contact with the first conductive layer through a contact hole in the insulating layer,
wherein the first conductive layer includes at least one of molybdenum niobium (MoNb), or tantalum (Ta),
wherein the second conductive layer includes aluminum niobium (AlNb),
wherein the touch signal line prevents formation of an oxide layer of aluminum niobium at an interface between the first conductive layer and the second conductive layer where the first conductive layer and the second conductive layer are in contact with each other, and
wherein the interface where the first conductive layer and the second conductive layer are in contact with each other has an uneven portion, wherein the interface extends in directions parallel to extension directions of the substrate and the uneven portion extends in a direction perpendicular to the extension directions of the substrate.