Method for beam interference compensation based on computer vision
The present invention relates to a method and a system for compensating interference in a charged particle beam microscopy system. A step of capturing data obtained from irradiation of a sample for a sampling duration can be implemented. In the system a respective data storage is provided for capturing and/or storing this data. Further steps of dividing at least representative parts of the sampling duration into time-windows and constructing, for each of the time-windows, an intermediate image, can be implemented. Detecting shift between the intermediate images and determining a compensation function for the shift between the intermediate images is realized as well. In a system the latter steps are automated by a respective processing component. The shift between intermediate images can be a two-dimensional shift and the compensation function represents a shift of the intermediate images in the two dimensions over time.
1 . A computer program product comprising instructions that, when run on a processing unit of a charged particle beam microscopy system configured to acquire and compensate charged-particle-beam image data, cause the performance of a method for compensating external interference in a charged particle beam microscopy system in the image data, the method comprising:
capturing data obtained from irradiation of a sample for a sampling duration;
dividing at least representative parts of the sampling duration into time-windows, based on a nature of the external interference;
constructing an intermediate image for the time-windows of the representative parts, wherein, for any defined time window, the intermediate image is constructed also from data captured in any of the time intervals of the same length as the defined time-window and separated from the defined window by an integral multiple of a period of a periodic function;
detecting a shift between the intermediate images; and
determining a compensation for the shift between the intermediate images.
2 . The computer program product of claim 1 , wherein the shift between intermediate images is a two-dimensional shift and the compensation comprises a compensation function representing the shift of the intermediate images in the two dimensions over time.
3 . The computer program product of claim 1 , wherein dividing at least representative parts of the sampling duration into a number of equally long time-windows (N).
4 . The computer program product of claim 1 , wherein the compensation comprises a compensation function representing the shift of the intermediate images in the two dimensions over time and wherein the compensation function is a periodic function.
5 . The computer program product of claim 4 , wherein the periodic function is a sine function with amplitude and phase data.
6 . The computer program product of claim 1 , wherein the compensation comprises a compensation function representing the shift of the intermediate images in the two dimensions over time, the method further comprising the step of generating compensated image data on the basis of the data captured with a compensation of the interference according to the compensation function.
7 . The computer program product of claim 1 , wherein the compensation comprises a compensation function representing the shift of the intermediate images in the two dimensions over time, and wherein the data captured comprises position data of a charged particle beam and/or sample holder in the microscopy system and wherein this position data is compensated by the compensation function over time.
8 . A microscopy system for compensating external interference comprising:
a data storage configured for capturing data obtained from irradiation of a sample for a sampling duration, and a processing component configured for:
dividing at least representative parts of the sampling duration into time-windows based on whether the interference is an external interference, wherein, for any defined time window, the intermediate image is constructed also from data captured in any of the time intervals of the same length as the defined time-window and separated from the defined window by an integral multiple of a period of a periodic function;
constructing, for each of the time-windows, an intermediate image; and
detecting a shift between the intermediate images.
9 . The system of claim 8 , wherein the processing component is configured for further compensating the interference in a charged particle beam microscopy system.
10 . The system of claim 8 , wherein the processing component is configured for further determining a compensation function for the shift between the intermediate images.
11 . The system of claim 10 , wherein the processing component is configured for further generating compensated image data on the basis of the data captured with a compensation of the interference according to the compensation function.
12 . The system of claim 10 , wherein the data captured comprises position data of a charged particle beam and/or sample holder in the microscopy system and wherein this position data is compensated by the compensation function over time.
13 . The system of claim 8 , wherein the processing component is configured for determining a compensation function for the shift between the intermediate images by machine learning.
14 . A computer program product comprising instructions that, when run on a processing unit of a charged particle beam microscopy system configured to acquire and compensate charged-particle-beam image data, cause the performance of a method for compensating external interference in a charged particle beam microscopy system in the image data, the method comprising:
capturing data obtained from irradiation of a sample for a sampling duration;
dividing at least representative parts of the sampling duration into a number of equally long time-windows (N), based on a nature of the external interference;
constructing an intermediate image for the time-windows of the representative parts;
detecting a shift between the intermediate images; and
determining a compensation for the shift between the intermediate images.
15 . The computer program product of claim 14 , wherein the shift between intermediate images is a two-dimensional shift and the compensation comprises a compensation function representing the shift of the intermediate images in the two dimensions over time.
16 . The computer program product of claim 14 , wherein the compensation comprises a compensation function representing the shift of the intermediate images in the two dimensions over time, wherein the compensation function is a periodic function, and wherein, for any defined time window, the intermediate image is constructed also from data captured in any of the time intervals of the same length as the defined time-window and separated from the defined window by an integer multiple of a period of a periodic function.
17 . The computer program product of claim 14 , wherein the compensation comprises a compensation function representing the shift of the intermediate images in the two dimensions over time and wherein the compensation function is a periodic function.
18 . The computer program product of claim 17 , wherein the periodic function is a sine function with amplitude and phase data.
19 . The computer program product of claim 14 , wherein the compensation comprises a compensation function representing the shift of the intermediate images in the two dimensions over time, the method further comprising the step of generating compensated image data on the basis of the data captured with a compensation of the interference according to the compensation function.
20 . The computer program product of claim 14 , wherein the compensation comprises a compensation function representing the shift of the intermediate images in the two dimensions over time, and wherein the data captured comprises position data of a charged particle beam and/or sample holder in the microscopy system and wherein this position data is compensated by the compensation function over time.